Masashi Sugishita

Person

Toyama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heater, temperature control system, and processing apparatus
- Patent number 12,085,338
- Issue date Sep 10, 2024
- Kokusai Electric Corporation
- Tetsuya Kosugi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and non-transitory computer-readable...
- Patent number 11,761,087
- Issue date Sep 19, 2023
- Kokusai Electric Corporation
- Masashi Sugishita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of controlling...
- Patent number 11,158,529
- Issue date Oct 26, 2021
- Kokusai Electric Corporation
- Hideto Yamaguchi
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Protector tube for thermocouple
- Patent number D819463
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Protector tube for thermocouple
- Patent number D818850
- Issue date May 29, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Thermometry tool for substrate processing apparatus
- Patent number D803075
- Issue date Nov 21, 2017
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 9,695,511
- Issue date Jul 4, 2017
- Hitachi Kokusai Electric Inc.
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus capable of switching control mode of...
- Patent number 9,418,881
- Issue date Aug 16, 2016
- Hitachi Kokusai Electric Inc.
- Shinobu Sugiura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating apparatus, substrate processing apparatus employing the sam...
- Patent number 9,184,069
- Issue date Nov 10, 2015
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus, semiconductor device manufacturing...
- Patent number 8,417,394
- Issue date Apr 9, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature adjustment method
- Patent number 8,367,975
- Issue date Feb 5, 2013
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating apparatus, substrate processing apparatus, and method of ma...
- Patent number 8,116,618
- Issue date Feb 14, 2012
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature regulating method, thermal processing system and semico...
- Patent number 7,930,059
- Issue date Apr 19, 2011
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method and semiconductor manufacturing apparatus
- Patent number 7,727,780
- Issue date Jun 1, 2010
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus having gas side flow via gas inlet
- Patent number 7,700,054
- Issue date Apr 20, 2010
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Temperature regulating method, thermal processing system and semico...
- Patent number 7,577,493
- Issue date Aug 18, 2009
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing equipment
- Patent number 7,346,273
- Issue date Mar 18, 2008
- Hitachi Kokusai Electric Inc.
- Kazuo Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF COOLING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR...
- Publication number 20240309509
- Publication date Sep 19, 2024
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...
- Publication number 20230383411
- Publication date Nov 30, 2023
- Kokusai Electric Corporation
- Masashi SUGISHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...
- Publication number 20230257883
- Publication date Aug 17, 2023
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...
- Publication number 20230221700
- Publication date Jul 13, 2023
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20210313205
- Publication date Oct 7, 2021
- Kokusai Electric Corporation
- Shinobu SUGIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS
- Publication number 20200393197
- Publication date Dec 17, 2020
- KOKUSAI ELECTRIC CORPORATION
- Tetsuya KOSUGI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20200333766
- Publication date Oct 22, 2020
- Kokusai Electric Corporation
- Masashi SUGISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Non-transitory Computer-readable...
- Publication number 20190276938
- Publication date Sep 12, 2019
- Kokusai Electric Corporation
- Masashi SUGISHITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING...
- Publication number 20190267267
- Publication date Aug 29, 2019
- Kokusai Electric Corporation
- Hideto YAMAGUCHI
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...
- Publication number 20150370245
- Publication date Dec 24, 2015
- Hitachi Kokusai Electric Inc.
- Masashi SUGISHITA
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate Processing Apparatus, Method of Manufacturing Semiconduct...
- Publication number 20150093909
- Publication date Apr 2, 2015
- Hitachi Kokusai Electric Inc.
- Hitoshi MURATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...
- Publication number 20120094010
- Publication date Apr 19, 2012
- Hitachi Kokusai Electric Inc.
- Shinobu SUGIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20110223693
- Publication date Sep 15, 2011
- Hitachi Kokusai Electric Inc.
- Masashi SUGISHITA
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20100124726
- Publication date May 20, 2010
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature regulating method, thermal processing system and semico...
- Publication number 20090187268
- Publication date Jul 23, 2009
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- G05 - CONTROLLING REGULATING
Information Patent Application
Temperature Adjustment Method
- Publication number 20090107978
- Publication date Apr 30, 2009
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090095422
- Publication date Apr 16, 2009
- Hitachi Kokusai Electric Inc.
- Masashi SUGISHITA
- C30 - CRYSTAL GROWTH
Information Patent Application
Heating apparatus, substrate processing apparatus employing the sam...
- Publication number 20090014435
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heating apparatus, substrate processing apparatus, and method of ma...
- Publication number 20090016706
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and semiconductor manufacturing apparatus
- Publication number 20080182345
- Publication date Jul 31, 2008
- Hitachi Kokusai Electric Inc.
- Masashi Sugishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, method of manufacturing semiconduct...
- Publication number 20080153314
- Publication date Jun 26, 2008
- Hitachi Kokusai Electric Inc.
- Akira Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Regulating Method, Thermal Processing System and Semico...
- Publication number 20080046110
- Publication date Feb 21, 2008
- HITACHI KOKUSAI ELECTRIC INC.
- Masashi Sugishita
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20060188240
- Publication date Aug 24, 2006
- Hitachi Kokusai Electric Inc.
- Kazuo Tanaka
- G05 - CONTROLLING REGULATING

Masashi Sugishita

Person

Patents Grantslast 30 patents

Heater, temperature control system, and processing apparatus

Substrate processing apparatus and non-transitory computer-readable...

Method of manufacturing semiconductor device, method of controlling...

Protector tube for thermocouple

Protector tube for thermocouple

Thermometry tool for substrate processing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Substrate processing apparatus capable of switching control mode of...

Heating apparatus, substrate processing apparatus employing the sam...

Substrate processing apparatus, semiconductor device manufacturing...

Temperature adjustment method

Heating apparatus, substrate processing apparatus, and method of ma...

Temperature regulating method, thermal processing system and semico...

Substrate processing method and semiconductor manufacturing apparatus

Substrate processing apparatus having gas side flow via gas inlet

Temperature regulating method, thermal processing system and semico...

Substrate processing equipment

Patents Applicationslast 30 patents

METHOD OF COOLING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR...

SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE...

SUBSTRATE PROCESSING APPARATUS, RECORDING MEDIUM, AND METHOD OF MAN...

TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR D...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

HEATER, TEMPERATURE CONTROL SYSTEM, AND PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

Substrate Processing Apparatus and Non-transitory Computer-readable...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SEMICO...

Substrate Processing Apparatus, Method of Manufacturing Semiconduct...

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROLLING METHOD OF S...

HEAT TREATMENT APPARATUS AND METHOD OF PROCESSING SUBSTRATE

SUBSTRATE PROCESSING APPARATUS, SEMICONDUCTOR DEVICE MANUFACTURING...

Temperature regulating method, thermal processing system and semico...

Temperature Adjustment Method

SEMICONDUCTOR MANUFACTURING APPARATUS AND SUBSTRATE PROCESSING METHOD

Heating apparatus, substrate processing apparatus employing the sam...

Heating apparatus, substrate processing apparatus, and method of ma...

Substrate processing method and semiconductor manufacturing apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Temperature Regulating Method, Thermal Processing System and Semico...

Substrate processing apparatus and substrate processing method