Masataka Shiba

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method
- Patent number 7,604,925
- Issue date Oct 20, 2009
- Renesas Technology Corporation
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,598,020
- Issue date Oct 6, 2009
- Renesas Technology Corporation
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,277,155
- Issue date Oct 2, 2007
- Renesas Technology Corp.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Exposure apparatus and method
- Patent number 7,012,671
- Issue date Mar 14, 2006
- Renesas Technology Corp.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process management system
- Patent number 6,757,621
- Issue date Jun 29, 2004
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device producing method, system for carrying out the...
- Patent number 6,650,409
- Issue date Nov 18, 2003
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of determining lethality of defects in circuit pattern inspe...
- Patent number 6,556,955
- Issue date Apr 29, 2003
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Process control system
- Patent number 6,542,830
- Issue date Apr 1, 2003
- Hitachi, Ltd.
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 6,485,891
- Issue date Nov 26, 2002
- Hitachi, Ltd.
- Minori Noguchi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for processing inspection data
- Patent number 6,456,951
- Issue date Sep 24, 2002
- Hitachi, Ltd.
- Shunji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus and method
- Patent number 6,335,146
- Issue date Jan 1, 2002
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining lethality of defects in circuit pattern inspe...
- Patent number 6,334,097
- Issue date Dec 25, 2001
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 6,016,187
- Issue date Jan 18, 2000
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System for quality control where inspection frequency of inspection...
- Patent number 6,002,989
- Issue date Dec 14, 1999
- Hitachi, Ltd.
- Masataka Shiba
- G05 - CONTROLLING REGULATING
Information Patent Grant
Exposure apparatus and method
- Patent number 5,767,949
- Issue date Jun 16, 1998
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,747,201
- Issue date May 5, 1998
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,526,094
- Issue date Jun 11, 1996
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Controlling method of forming thin film, system for said controllin...
- Patent number 5,409,538
- Issue date Apr 25, 1995
- Hitachi, Ltd.
- Yasuhiko Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,329,333
- Issue date Jul 12, 1994
- Hitachi, Ltd.
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reduced-projection exposure system with chromatic aberration correc...
- Patent number 5,324,953
- Issue date Jun 28, 1994
- Hitachi, Ltd.
- Yasuhiro Yoshitake
- G02 - OPTICS
Information Patent Grant
Optical information processing apparatus and optical pickup therefor
- Patent number 5,195,070
- Issue date Mar 16, 1993
- Hitachi, Ltd.
- Masataka Shiba
- G11 - INFORMATION STORAGE
Information Patent Grant
Optical information storing apparatus and method for production of...
- Patent number 5,191,624
- Issue date Mar 2, 1993
- Hitachi, Ltd.
- Kenchi Ito
- G02 - OPTICS
Information Patent Grant
Surface acoustic waveguide device and manufacturing method
- Patent number 5,187,756
- Issue date Feb 16, 1993
- Hitachi, Ltd.
- Masataka Shiba
- G02 - OPTICS
Information Patent Grant
Method and apparatus for detecting focal plane
- Patent number 5,153,916
- Issue date Oct 6, 1992
- Hitachi, Ltd.
- Akira Inagaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Foreign particle detecting method and apparatus
- Patent number RE33991
- Issue date Jul 14, 1992
- Hitachi, Ltd.
- Masataka Shiba
- 356 - Optics: measuring and testing
Information Patent Grant
Information detecting system of scanning type
- Patent number 5,121,449
- Issue date Jun 9, 1992
- Hitachi, Ltd.
- Masataka Shiba
- G02 - OPTICS
Information Patent Grant
Optical integrated circuit and optical apparatus
- Patent number 5,070,488
- Issue date Dec 3, 1991
- Atsuko Fukushima
- G02 - OPTICS
Information Patent Grant
Exposure method and apparatus
- Patent number 5,008,702
- Issue date Apr 16, 1991
- Hitachi, Ltd.
- Tsutomu Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for pattern detection
- Patent number 4,993,837
- Issue date Feb 19, 1991
- Hitachi, Ltd.
- Yoshitada Oshida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection alignment method and apparatus
- Patent number 4,906,852
- Issue date Mar 6, 1990
- Hitachi, Ltd.
- Toshihiko Nakata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and method
- Publication number 20050196713
- Publication date Sep 8, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050196705
- Publication date Sep 8, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050191583
- Publication date Sep 1, 2005
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process management system
- Publication number 20030130806
- Publication date Jul 10, 2003
- Hitachi, Ltd
- Fumio Mizuno
- G01 - MEASURING TESTING
Information Patent Application
Exposure apparatus and method
- Publication number 20030073045
- Publication date Apr 17, 2003
- Minori Noguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of determining lethality of defects in circuit pattern inspe...
- Publication number 20020042682
- Publication date Apr 11, 2002
- Yasuhiro Yoshitake
- G01 - MEASURING TESTING

Masataka Shiba

Person

Patents Grantslast 30 patents

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Process management system

Semiconductor device producing method, system for carrying out the...

Method of determining lethality of defects in circuit pattern inspe...

Process control system

Exposure apparatus and method

Method and apparatus for processing inspection data

Exposure apparatus and method

Method of determining lethality of defects in circuit pattern inspe...

Exposure apparatus and method

System for quality control where inspection frequency of inspection...

Exposure apparatus and method

Controlling method of forming thin film, system for said controllin...

Exposure apparatus and method

Controlling method of forming thin film, system for said controllin...

Exposure apparatus and method

Reduced-projection exposure system with chromatic aberration correc...

Optical information processing apparatus and optical pickup therefor

Optical information storing apparatus and method for production of...

Surface acoustic waveguide device and manufacturing method

Method and apparatus for detecting focal plane

Foreign particle detecting method and apparatus

Information detecting system of scanning type

Optical integrated circuit and optical apparatus

Exposure method and apparatus

Method and apparatus for pattern detection

Projection alignment method and apparatus

Patents Applicationslast 30 patents

Exposure apparatus and method

Exposure apparatus and method

Exposure apparatus and method

Process management system

Exposure apparatus and method

Method of determining lethality of defects in circuit pattern inspe...