Claims
- 1. An apparatus for projecting a pattern, comprising:
a light source for emitting a laser; an illuminating unit which illuminates a mask on which a pattern is formed with the laser emitted from the light source and formed in a particular shape; a holder which holds the mask; an optical lens unit which projects the pattern formed on the mask onto a surface of a substrate by the laser illuminated on the mask; and a table which mounts the substrate and moves in at least one direction.
- 2. An apparatus according to the claim 1, wherein the laser is an excimer laser.
- 3. An apparatus according to the claim 1, wherein the illuminating unit includes a pair of galvano mirrors which scan the excimer laser to form a ring-like shape as the particular shape.
- 4. An apparatus for projecting a pattern, comprising:
a light source for emitting a laser; a coherence decreasing unit for decreasing coherence of the laser emitted from the light source; an illuminating unit which illuminates a mask on which a pattern is formed with the laser emitted from the light source and which is decreased in coherence by the decreasing unit; a holder which holds the mask; an optical lens unit which projects the pattern formed on the mask onto a surface of a substrate by the laser illuminated on the mask; and a table which mounts the substrate and moves in at least one direction.
- 5. An apparatus according to the claim 4, wherein the laser is an excimer laser.
- 6. An apparatus according to the claim 4, wherein the coherence decreasing unit enables forming a shape of the laser as a ring-like shape or a plural dot shape.
- 7. An apparatus according to the claim 4, wherein the illuminating unit including a pair of galvano mirrors which scan the laser to form a ring-like shape.
- 8. A method for projecting a pattern, comprising the steps of:
emitting a laser from a light source; decreasing coherence of the laser; shaping the laser in a particular shape; illuminating a mask on which a pattern is formed with the laser which coherence is decreased and shaped in the particular shape; and forming a light pattern on a substrate by the laser illuminated and passed through the mask.
- 9. A method according to the claim 8, wherein the laser is an excimer laser.
- 10. A method according to the claim 8, wherein the coherence is reduced by scanning the laser in a ring-like shape.
- 11. A method according to the claim 8, wherein the particular shape of the laser is a ring-like shape.
- 12. A method according to the claim 8, wherein the particular shape of the laser is formed by plural dots.
- 13. A method for projecting a pattern, comprising the steps of:
emitting a laser from a light source; forming the laser in a particular shape; illuminating a mask on which a pattern is formed with the laser formed in the particular shape; and projecting a light pattern on a substrate by the laser illuminated and passed through the mask.
- 14. A method according to the claim 13, wherein the laser illuminating the mask is formed in the particular shape and a coherence of the laser is decreased.
- 15. A method according to the claim 14, wherein the coherence of the laser is decreased by scanning the laser.
- 16. A method according to the claim 14, wherein said coherence is reduced by scanning the laser in a ring-like shape.
- 17. A method according to the claim 13, wherein said particular shape of the laser is a ring-like shape.
- 18. A method according to the claim 13, wherein said particular shape of the laser is formed by plural dots.
Priority Claims (4)
Number |
Date |
Country |
Kind |
3-038387 |
Mar 1991 |
JP |
|
3-059944 |
Mar 1991 |
JP |
|
3-258868 |
Oct 1991 |
JP |
|
3-315976 |
Nov 1991 |
JP |
|
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This is a continuation of U.S. application Ser. No. 09/542,072, filed Apr. 3, 2000, which is copending with U.S. application Ser. No. 09/542,071, filed Apr. 13, 2000, now U.S. Pat. No. 6,335,146, which are continuations of U.S. application Ser. No. 09/447,243, filed Nov. 23, 1999, which is a continuation of U.S. application Ser. No. 09/003,141, filed Jan. 6, 1998, now U.S. Pat. No. 6,016,187, issued Jan. 18, 2000, which is a continuation of U.S. application Ser. No. 08/727,762, filed Oct. 8, 1996, now U.S. Pat. No. 5,767,949, issued Jun. 16, 1998, which is a continuation of U.S. application Ser. No. 08/501,178, filed Jul. 11, 1995, now abandoned, which is a continuation of U.S. application Ser. No. 08/235,654, filed Apr. 29, 1994, now U.S. Pat. No. 5,526,094, issued Jun. 11, 1996, which is a continuation of U.S. application Ser. No. 07/846,158, filed Mar. 5, 1992, now U.S. Pat. No. 5,329,333, issued Jul. 12, 1994, the subject matter of which is incorporated by reference herein.
Continuations (1)
|
Number |
Date |
Country |
Parent |
09542072 |
Apr 2000 |
US |
Child |
10282081 |
Oct 2002 |
US |