Masato Moriya

Person

Hiratsuka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Energy measuring apparatus and excimer laser apparatus
- Patent number 11,841,267
- Issue date Dec 12, 2023
- Gigaphoton Inc.
- Yosuke Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor degradation evaluation method
- Patent number 11,808,629
- Issue date Nov 7, 2023
- Gigaphoton Inc.
- Masato Moriya
- G01 - MEASURING TESTING
Information Patent Grant
Screen device
- Patent number 11,384,598
- Issue date Jul 12, 2022
- Seiki Hanbai Co., Ltd.
- Hirotsugu Toda
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Grant
Excimer laser apparatus and electronic-device manufacturing method
- Patent number 11,079,686
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Keisuke Ishida
- G01 - MEASURING TESTING
Information Patent Grant
Roll screen device
- Patent number 10,920,488
- Issue date Feb 16, 2021
- Seiki Hanbai Co., Ltd.
- Hirotsugu Toda
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Grant
Wavelength measuring device
- Patent number 10,890,484
- Issue date Jan 12, 2021
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line-narrowed KrF excimer laser apparatus
- Patent number 10,502,623
- Issue date Dec 10, 2019
- Gigaphoton Inc.
- Masato Moriya
- G01 - MEASURING TESTING
Information Patent Grant
Light beam measurement device, laser apparatus, and light beam sepa...
- Patent number 10,151,640
- Issue date Dec 11, 2018
- Gigaphoton Inc.
- Masato Moriya
- G02 - OPTICS
Information Patent Grant
Alignment system and extreme ultraviolet light generation system
- Patent number 10,027,084
- Issue date Jul 17, 2018
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,894,743
- Issue date Feb 13, 2018
- Gigaphoton Inc.
- Yukio Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Narrow band laser apparatus
- Patent number 9,882,343
- Issue date Jan 30, 2018
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source apparatus and data processing method
- Patent number 9,841,684
- Issue date Dec 12, 2017
- Gigaphoton Inc.
- Hiroshi Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light beam measurement device, laser apparatus, and light beam sepa...
- Patent number 9,835,495
- Issue date Dec 5, 2017
- Gigaphoton Inc.
- Masato Moriya
- G02 - OPTICS
Information Patent Grant
Laser apparatus and extreme ultraviolet light generation system
- Patent number 9,667,019
- Issue date May 30, 2017
- Gigaphoton Inc.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for generating extreme ultra violet light
- Patent number 9,574,935
- Issue date Feb 21, 2017
- Gigaphoton Inc.
- Masato Moriya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,439,275
- Issue date Sep 6, 2016
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for controlling laser beam and apparatus for generating extr...
- Patent number 9,363,878
- Issue date Jun 7, 2016
- Gigaphoton Inc.
- Masato Moriya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Alignment system and extreme ultraviolet light generation system
- Patent number 9,325,150
- Issue date Apr 26, 2016
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 9,301,379
- Issue date Mar 29, 2016
- Gigaphoton Inc.
- Yukio Watanabe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for generating extreme ultraviolet light and device for gene...
- Patent number 9,277,635
- Issue date Mar 1, 2016
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus and extreme ultraviolet light generation apparatus
- Patent number 9,271,382
- Issue date Feb 23, 2016
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus and extreme ultraviolet light generation system
- Patent number 9,184,551
- Issue date Nov 10, 2015
- Gigaphoton Inc.
- Takashi Suganuma
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical device including wavefront correction parts and beam direct...
- Patent number 9,128,391
- Issue date Sep 8, 2015
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser beam amplifier and laser apparatus using the same
- Patent number 9,099,836
- Issue date Aug 4, 2015
- Gigaphoton Inc.
- Krzysztof Nowak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 8,957,356
- Issue date Feb 17, 2015
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 8,847,181
- Issue date Sep 30, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus and extreme ultraviolet light source apparatus
- Patent number 8,804,778
- Issue date Aug 12, 2014
- Gigaphoton Inc.
- Osamu Wakabayashi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Window unit, window device, laser apparatus, and extreme ultraviole...
- Patent number 8,742,379
- Issue date Jun 3, 2014
- Gigaphoton Inc.
- Hidenobu Kameda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light source device, laser light source device...
- Patent number 8,698,114
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,698,116
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
DETERIORATION EVALUATION METHOD OF LINE SENSOR, SPECTRUM MEASUREMEN...
- Publication number 20240044710
- Publication date Feb 8, 2024
- Gigaphoton Inc.
- Natsuhiko KOUNO
- G01 - MEASURING TESTING
Information Patent Application
LASER SYSTEM, SPECTRUM WAVEFORM CALCULATION METHOD, AND ELECTRONIC...
- Publication number 20230349762
- Publication date Nov 2, 2023
- Gigaphoton Inc.
- Natsuhiko KOUNO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTUR...
- Publication number 20220393422
- Publication date Dec 8, 2022
- Gigaphoton Inc.
- Natsuhiko KOUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR DEGRADATION EVALUATION METHOD
- Publication number 20220381608
- Publication date Dec 1, 2022
- Gigaphoton Inc.
- Masato MORIYA
- G01 - MEASURING TESTING
Information Patent Application
ENERGY MEASURING APPARATUS AND EXCIMER LASER APPARATUS
- Publication number 20210116294
- Publication date Apr 22, 2021
- Gigaphoton Inc.
- Yosuke WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD
- Publication number 20200274315
- Publication date Aug 27, 2020
- Gigaphoton Inc.
- Keisuke ISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROLL SCREEN DEVICE
- Publication number 20190119979
- Publication date Apr 25, 2019
- Seiki Hanbai CO., LTD.
- Hirotsugu TODA
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
LINE-NARROWED KrF EXCIMER LASER APPARATUS
- Publication number 20190107438
- Publication date Apr 11, 2019
- Gigaphoton Inc.
- Masato MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCREEN DEVICE
- Publication number 20190048659
- Publication date Feb 14, 2019
- Seiki Hanbai CO., LTD.
- Hirotsugu TODA
- E06 - DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL LADDERS
Information Patent Application
WAVELENGTH MEASURING DEVICE
- Publication number 20190033133
- Publication date Jan 31, 2019
- Gigaphoton Inc.
- Masato MORIYA
- G01 - MEASURING TESTING
Information Patent Application
LIGHT BEAM MEASUREMENT DEVICE, LASER APPARATUS, AND LIGHT BEAM SEPA...
- Publication number 20180052059
- Publication date Feb 22, 2018
- Gigaphoton Inc.
- Masato MORIYA
- G02 - OPTICS
Information Patent Application
NARROW BAND LASER APPARATUS
- Publication number 20170222391
- Publication date Aug 3, 2017
- Gigaphoton Inc.
- Masato MORIYA
- G02 - OPTICS
Information Patent Application
SYSTEM FOR GENERATING EXTREME ULTRA VIOLET LIGHT
- Publication number 20160341601
- Publication date Nov 24, 2016
- Gigaphoton Inc.
- Masato MORIYA
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20160204567
- Publication date Jul 14, 2016
- GIGAPHOTON INC.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20160192469
- Publication date Jun 30, 2016
- GIGAPHOTON INC.
- Yukio WATANABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LIGHT BEAM MEASUREMENT DEVICE, LASER APPARATUS, AND LIGHT BEAM SEPA...
- Publication number 20160076944
- Publication date Mar 17, 2016
- GIGAPHOTON INC.
- Masato MORIYA
- G02 - OPTICS
Information Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150340838
- Publication date Nov 26, 2015
- Gigaphoton Inc.
- Masato MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR CONTROLLING LASER BEAM AND APPARATUS FOR GENERATING EXTR...
- Publication number 20150334814
- Publication date Nov 19, 2015
- Gigaphoton Inc.
- Masato MORIYA
- G02 - OPTICS
Information Patent Application
METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENE...
- Publication number 20150189730
- Publication date Jul 2, 2015
- Gigaphoton Inc.
- Masato MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT SOURCE APPARATUS AND DATA PROCESSING METHOD
- Publication number 20150168848
- Publication date Jun 18, 2015
- GIGAPHOTON INC.
- Hiroshi TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20150123018
- Publication date May 7, 2015
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140348188
- Publication date Nov 27, 2014
- Takashi SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140319388
- Publication date Oct 30, 2014
- GIGAPHOTON INC.
- Masato MORIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20140191108
- Publication date Jul 10, 2014
- GIGAPHOTON INC.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20140166046
- Publication date Jun 19, 2014
- GIGAPHOTON INC.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
LASER BEAM AMPLIFIER AND LASER APPARATUS USING THE SAME
- Publication number 20130250402
- Publication date Sep 26, 2013
- GIGAPHOTON INC.
- Krzysztof NOWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20130240762
- Publication date Sep 19, 2013
- GIGAPHOTON INC.
- Masato MORIYA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND CONTROL METHOD FOR EXTR...
- Publication number 20130187065
- Publication date Jul 25, 2013
- GIGAPHOTON INC.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...
- Publication number 20130148677
- Publication date Jun 13, 2013
- GIGAPHOTON INC.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20130126762
- Publication date May 23, 2013
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Masato Moriya

Person

Patents Grantslast 30 patents

Energy measuring apparatus and excimer laser apparatus

Sensor degradation evaluation method

Screen device

Excimer laser apparatus and electronic-device manufacturing method

Roll screen device

Wavelength measuring device

Line-narrowed KrF excimer laser apparatus

Light beam measurement device, laser apparatus, and light beam sepa...

Alignment system and extreme ultraviolet light generation system

Extreme ultraviolet light generation apparatus

Narrow band laser apparatus

Light source apparatus and data processing method

Light beam measurement device, laser apparatus, and light beam sepa...

Laser apparatus and extreme ultraviolet light generation system

System for generating extreme ultra violet light

System and method for generating extreme ultraviolet light

Device for controlling laser beam and apparatus for generating extr...

Alignment system and extreme ultraviolet light generation system

Extreme ultraviolet light generation apparatus

Method for generating extreme ultraviolet light and device for gene...

Laser apparatus and extreme ultraviolet light generation apparatus

Laser apparatus and extreme ultraviolet light generation system

Optical device including wavefront correction parts and beam direct...

Laser beam amplifier and laser apparatus using the same

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

Laser apparatus and extreme ultraviolet light source apparatus

Window unit, window device, laser apparatus, and extreme ultraviole...

Extreme ultraviolet light source device, laser light source device...

Extreme ultra violet light source apparatus

Patents Applicationslast 30 patents

DETERIORATION EVALUATION METHOD OF LINE SENSOR, SPECTRUM MEASUREMEN...

LASER SYSTEM, SPECTRUM WAVEFORM CALCULATION METHOD, AND ELECTRONIC...

LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTUR...

SENSOR DEGRADATION EVALUATION METHOD

ENERGY MEASURING APPARATUS AND EXCIMER LASER APPARATUS

EXCIMER LASER APPARATUS AND ELECTRONIC-DEVICE MANUFACTURING METHOD

ROLL SCREEN DEVICE

LINE-NARROWED KrF EXCIMER LASER APPARATUS

SCREEN DEVICE

WAVELENGTH MEASURING DEVICE

LIGHT BEAM MEASUREMENT DEVICE, LASER APPARATUS, AND LIGHT BEAM SEPA...

NARROW BAND LASER APPARATUS

SYSTEM FOR GENERATING EXTREME ULTRA VIOLET LIGHT

ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

LIGHT BEAM MEASUREMENT DEVICE, LASER APPARATUS, AND LIGHT BEAM SEPA...

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

DEVICE FOR CONTROLLING LASER BEAM AND APPARATUS FOR GENERATING EXTR...

METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT AND DEVICE FOR GENE...

LIGHT SOURCE APPARATUS AND DATA PROCESSING METHOD

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

ALIGNMENT SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

LASER BEAM AMPLIFIER AND LASER APPARATUS USING THE SAME

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND CONTROL METHOD FOR EXTR...

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS