Masato OBARA

Follow

Person

Miyagi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
MOUNTING PAD, MOUNTING MECHANISM, AND SUBSTRATE TRANSFER MECHANISM
- Publication number 20230395421
- Publication date Dec 7, 2023
- TOKYO ELECTRON LIMITED
- Masato OBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND PARTICLE REMOVAL METHOD
- Publication number 20230245871
- Publication date Aug 3, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi NAGAIKE
- B08 - CLEANING