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Masayuki Harashima

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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 12,065,732
    • Issue date Aug 20, 2024
    • Tokyo Electron Limited
    • Masayuki Harashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming device and method for cleaning same
    • Patent number 11,390,944
    • Issue date Jul 19, 2022
    • Tokyo Electron Limited
    • Masayuki Harashima
    • B08 - CLEANING
  • Information Patent Grant

    Film forming apparatus
    • Patent number 10,689,759
    • Issue date Jun 23, 2020
    • Tokyo Electron Limited
    • Masayuki Harashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 10,550,491
    • Issue date Feb 4, 2020
    • Tokyo Electron Limited
    • Masayuki Harashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Wafer holder for manufacturing semiconductor
    • Patent number D766850
    • Issue date Sep 20, 2016
    • TOKYO ELECTRON LIMITED
    • Eisuke Morisaki
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Film forming apparatus and method
    • Patent number 8,328,943
    • Issue date Dec 11, 2012
    • Tokyo Electron Limited
    • Eisuke Morisaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20220098726
    • Publication date Mar 31, 2022
    • Tokyo Electron Limited
    • Masayuki HARASHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20210166964
    • Publication date Jun 3, 2021
    • TOKYO ELECTRON LIMITED
    • Masayuki HARASHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210108331
    • Publication date Apr 15, 2021
    • TOKYO ELECTRON LIMITED
    • Masayuki HARASHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING DEVICE AND METHOD FOR CLEANING SAME
    • Publication number 20200157677
    • Publication date May 21, 2020
    • TOKYO ELECTRON LIMITED
    • Masayuki HARASHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20190071773
    • Publication date Mar 7, 2019
    • TOKYO ELECTRON LIMITED
    • Masayuki Harashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film-Forming Apparatus
    • Publication number 20170321346
    • Publication date Nov 9, 2017
    • TOKYO ELECTRON LIMITED
    • Masayuki HARASHIMA
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    SURFACE PROCESSING METHOD AND SURFACE PROCESSING APPARATUS
    • Publication number 20120128892
    • Publication date May 24, 2012
    • TOKYO ELECTRON LIMITED
    • Noriaki TOYODA
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    FILM FORMING APPARATUS AND METHOD
    • Publication number 20100047448
    • Publication date Feb 25, 2010
    • Tokyo Electron Limited
    • Eisuke Morisaki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...