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Epitaxial growth method
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Patent number 9,518,339
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Issue date Dec 13, 2016
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Sumco Corporation
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Masayuki Ishibashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Epitaxial growth method
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Patent number 9,127,374
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Issue date Sep 8, 2015
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Sumco Corporation
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Masayuki Ishibashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Epitaxial growth susceptor
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Patent number 8,926,754
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Issue date Jan 6, 2015
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Sumitomo Mitsubishi Silicon Corporation
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Masayuki Ishibashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vapor-phase epitaxial growth method
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Patent number 6,971,835
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Issue date Dec 6, 2005
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Sumitomo Mitsubishi Silicon Corporation
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Masayuki Ishibashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...