Masayuki TANABE

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Pattern forming method as well as production methods for processed...
- Patent number 10,754,244
- Issue date Aug 25, 2020
- Canon Kabushiki Kaisha
- Toshiki Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining pattern of mold for imprint, imprint method,...
- Patent number 9,829,789
- Issue date Nov 28, 2017
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,636,851
- Issue date May 2, 2017
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 8,672,663
- Issue date Mar 18, 2014
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, control method for the same, and device manufac...
- Patent number 8,004,657
- Issue date Aug 23, 2011
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Exposure apparatus, and device manufacturing method
- Patent number 6,819,396
- Issue date Nov 16, 2004
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical instrument, and device manufacturing method
- Patent number 6,740,893
- Issue date May 25, 2004
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
MOLDING APPARATUS, METHOD OF MOLDING, AND METHOD OF PLANARIZATION
- Publication number 20220317566
- Publication date Oct 6, 2022
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ADHESION LAYER-FORMING COMPOSITION AND METHOD FOR PRODUCING ARTICLE
- Publication number 20190264076
- Publication date Aug 29, 2019
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED...
- Publication number 20170285463
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Toshiki Ito
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160031131
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Masayuki TANABE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR DETERMINING PATTERN OF MOLD FOR IMPRINT, IMPRINT METHOD,...
- Publication number 20150123300
- Publication date May 7, 2015
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20140145370
- Publication date May 29, 2014
- Canon Kabushiki Kaisha
- Masayuki TANABE
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF CLEANING PIPE OF IMMERSION EXPOSURE APPARATUS, AND METHOD...
- Publication number 20120257180
- Publication date Oct 11, 2012
- Canon Kabushiki Kaisha
- Masayuki TANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20120199997
- Publication date Aug 9, 2012
- Canon Kabushiki Kaisha
- Masayuki TANABE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
EXPOSURE APPARATUS, CONTROL METHOD FOR THE SAME, AND DEVICE MANUFAC...
- Publication number 20070202423
- Publication date Aug 30, 2007
- Canon Kabushiki Kaisha
- Masayuki Tanabe
- B82 - NANO-TECHNOLOGY

Masayuki TANABE

Person

Patents Grantslast 30 patents

Pattern forming method as well as production methods for processed...

Method for determining pattern of mold for imprint, imprint method,...

Imprint apparatus and article manufacturing method

Imprint apparatus and article manufacturing method

Exposure apparatus, control method for the same, and device manufac...

Exposure apparatus, and device manufacturing method

Optical instrument, and device manufacturing method

Patents Applicationslast 30 patents

MOLDING APPARATUS, METHOD OF MOLDING, AND METHOD OF PLANARIZATION

ADHESION LAYER-FORMING COMPOSITION AND METHOD FOR PRODUCING ARTICLE

PATTERN FORMING METHOD AS WELL AS PRODUCTION METHODS FOR PROCESSED...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

METHOD FOR DETERMINING PATTERN OF MOLD FOR IMPRINT, IMPRINT METHOD,...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

METHOD OF CLEANING PIPE OF IMMERSION EXPOSURE APPARATUS, AND METHOD...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

EXPOSURE APPARATUS, CONTROL METHOD FOR THE SAME, AND DEVICE MANUFAC...