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Plasma processing method and apparatus
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Patent number 7,289,866
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Issue date Oct 30, 2007
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Tokyo Electron Limited
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Masayuki Tomoyasu
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Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
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Plasma treatment method and apparatus
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Patent number 6,544,380
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Issue date Apr 8, 2003
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Tokyo Electron Limited
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Masayuki Tomoyasu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Etching method
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Patent number 6,423,242
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Issue date Jul 23, 2002
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Tokyo Electron Limited
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Masayuki Kojima
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C03 - GLASS MINERAL OR SLAG WOOL
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Plasma treatment method and apparatus
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Patent number 6,264,788
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Issue date Jul 24, 2001
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Tokyo Electron Limited
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Masayuki Tomoyasu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing apparatus
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Patent number 6,074,518
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Issue date Jun 13, 2000
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Tokyo Electron Limited
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Kosuke Imafuku
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 5,904,780
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Issue date May 18, 1999
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Tokyo Electron Limited
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Masayuki Tomoyasu
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma treatment method and apparatus
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Patent number 5,900,103
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Issue date May 4, 1999
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Tokyo Electron Limited
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Masayuki Tomoyasu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing method
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Patent number 5,888,907
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Issue date Mar 30, 1999
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Tokyo Electron Limited
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Masayuki Tomoyasu
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H01 - BASIC ELECTRIC ELEMENTS
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Ion implantation system
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Patent number 5,343,047
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Issue date Aug 30, 1994
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Tokyo Electron Limited
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Hiroo Ono
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H01 - BASIC ELECTRIC ELEMENTS
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Laser beam scanning system
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Patent number 5,067,798
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Issue date Nov 26, 1991
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Tokyo Electron Limited
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Masayuki Tomoyasu
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY