Number | Date | Country | Kind |
---|---|---|---|
6-106045 | Apr 1994 | JPX | |
6-113587 | Apr 1994 | JPX | |
6-133638 | May 1994 | JPX | |
6-142409 | Jun 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4863549 | Grunwald | Sep 1989 | |
5057185 | Thomas, III et al. | Oct 1991 | |
5110438 | Ohmi et al. | May 1992 | |
5116482 | Setoyama et al. | May 1992 | |
5272417 | Ohmi | Dec 1993 | |
5330606 | Kubota et al. | Jul 1994 | |
5332880 | Kubota et al. | Jul 1994 |
Number | Date | Country |
---|---|---|
0 309 648 | Apr 1989 | EPX |
0 359 966 | Mar 1990 | EPX |
57-131373 | Aug 1982 | JPX |
57-131374 | Aug 1982 | JPX |
60-86831 | May 1985 | JPX |
2-177429 | Jul 1990 | JPX |
Entry |
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Journal of Vaccum Science and Technology: Part A, vol. 4, No. 3, pp. 729-738, May/June 1986, D.L. Flamm, "Frequency Effects in Plasma Etching". |