Matthew Derstine

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,921,297
- Issue date Mar 5, 2024
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source with collection...
- Patent number 11,778,720
- Issue date Oct 3, 2023
- KLA Corporation
- Matthew Derstine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for protecting optics from vacuum ultraviolet light
- Patent number 11,262,664
- Issue date Mar 1, 2022
- KLA Corporation
- Matthew Derstine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for pumping laser sustained plasma with an illumi...
- Patent number 11,262,591
- Issue date Mar 1, 2022
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for pumping laser sustained plasma with interlace...
- Patent number 11,121,521
- Issue date Sep 14, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 10,976,025
- Issue date Apr 13, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High efficiency laser-sustained plasma light source
- Patent number 10,887,974
- Issue date Jan 5, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for pumping laser sustained plasma and enhancing...
- Patent number 10,714,327
- Issue date Jul 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
System and method for pumping laser sustained plasma with a frequen...
- Patent number 10,568,195
- Issue date Feb 18, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- G02 - OPTICS
Information Patent Grant
Nanocrystal-based light source for sample characterization
- Patent number 10,495,287
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Grant
High power broadband light source
- Patent number 9,941,655
- Issue date Apr 10, 2018
- KLA-Tencor Corporation
- Anant Chimmalgi
- G02 - OPTICS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 9,927,094
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,887,076
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for generating a light-sustained plasma in a flan...
- Patent number 9,775,226
- Issue date Sep 26, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for transverse pumping of laser-sustained plasma
- Patent number 9,723,703
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open plasma lamp for forming a light-sustained plasma
- Patent number 9,721,761
- Issue date Aug 1, 2017
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convection within a plasma cell
- Patent number 9,655,225
- Issue date May 16, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for imaging a sample with a laser sustained plasm...
- Patent number 9,558,858
- Issue date Jan 31, 2017
- KLA-Tencor Corporation
- David W. Shortt
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method and apparatus to reduce thermal stress by regulation and con...
- Patent number 9,534,848
- Issue date Jan 3, 2017
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Light source with nanostructured antireflection layer
- Patent number 9,530,636
- Issue date Dec 27, 2016
- KLA-Tencor Corporation
- Sebaek Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convective flow in a light-sustai...
- Patent number 9,390,902
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open plasma lamp for forming a light-sustained plasma
- Patent number 9,263,238
- Issue date Feb 16, 2016
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling convection within a plasma cell
- Patent number 9,185,788
- Issue date Nov 10, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adaptive optics for compensating aberrations in light-sustained pla...
- Patent number 9,097,577
- Issue date Aug 4, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- G01 - MEASURING TESTING
Information Patent Grant
Multi-wavelength pumping to sustain hot plasma
- Patent number 8,698,399
- Issue date Apr 15, 2014
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Optically pumping to sustain plasma
- Patent number 8,658,967
- Issue date Feb 25, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Initiating laser-sustained plasma
- Patent number 8,259,771
- Issue date Sep 4, 2012
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image collection
- Patent number 8,178,860
- Issue date May 15, 2012
- KLA-Tencor Corporation
- Gregory L. Kirk
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...
- Publication number 20220187610
- Publication date Jun 16, 2022
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATIO...
- Publication number 20220066071
- Publication date Mar 3, 2022
- KLA Corporation
- Evgeniia Butaeva
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20210231292
- Publication date Jul 29, 2021
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PROTECTING OPTICS FROM VACUUM ULTRAVIOLET LIGHT
- Publication number 20210149315
- Publication date May 20, 2021
- KLA Corporation
- Matthew Derstine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20210022233
- Publication date Jan 21, 2021
- KLA Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with Interlace...
- Publication number 20200274314
- Publication date Aug 27, 2020
- KLA Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with an Illumi...
- Publication number 20200150445
- Publication date May 14, 2020
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Pumping Laser Sustained Plasma with a Frequen...
- Publication number 20190373709
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Pumping Laser Sustained Plasma and Enhancing...
- Publication number 20190287785
- Publication date Sep 19, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
High Efficiency Laser-Sustained Plasma Light Source
- Publication number 20160381776
- Publication date Dec 29, 2016
- KLA-Tencor Corporation
- Matthew Derstine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20160322211
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20160163516
- Publication date Jun 9, 2016
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Controlling Convection within a Plasma Cell
- Publication number 20160066402
- Publication date Mar 3, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Power Broadband Light Source
- Publication number 20150333471
- Publication date Nov 19, 2015
- KLA-Tencor Corporation
- Anant Chimmalgi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open Plasma Lamp for Forming a Light-Sustained Plasma
- Publication number 20150279628
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Transverse Pumping of Laser-Sustained Plasma
- Publication number 20150282288
- Publication date Oct 1, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Light Source with Nanostructured Antireflection Layer
- Publication number 20150271905
- Publication date Sep 24, 2015
- KLA-Tencor Corporation
- Sebaek Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Imaging a Sample with a Laser Sustained Plasm...
- Publication number 20150048741
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- David W. Shortt
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Controlling Convection within a Plasma Cell
- Publication number 20150034838
- Publication date Feb 5, 2015
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Controlling Convective Flow in a Light-Sustai...
- Publication number 20140291546
- Publication date Oct 2, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus to Reduce Thermal Stress by Regulation and Con...
- Publication number 20140060792
- Publication date Mar 6, 2014
- KLA-Tencor Corporation
- Jincheng Wang
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20130181595
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
OPTICALLY PUMPING TO SUSTAIN PLASMA
- Publication number 20130001438
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADAPTIVE OPTICS FOR COMPENSATING ABERRATIONS IN LIGHT-SUSTAINED PLA...
- Publication number 20130003384
- Publication date Jan 3, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- G02 - OPTICS
Information Patent Application
Multi-Wavelength Pumping to Sustain Hot Plasma
- Publication number 20110291566
- Publication date Dec 1, 2011
- KLA-Tencor Corporation
- Ilya V. Bezel
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Image Collection
- Publication number 20110043797
- Publication date Feb 24, 2011
- KLA-Tencor Corporation
- Gregory L. Kirk
- G01 - MEASURING TESTING

Matthew Derstine

Person

Patents Grantslast 30 patents

System and method for pumping laser sustained plasma with an illumi...

High efficiency laser-sustained plasma light source with collection...

System and method for protecting optics from vacuum ultraviolet light

System and method for pumping laser sustained plasma with an illumi...

System and method for pumping laser sustained plasma with interlace...

Plasma cell for providing VUV filtering in a laser-sustained plasma...

High efficiency laser-sustained plasma light source

System and method for pumping laser sustained plasma and enhancing...

System and method for pumping laser sustained plasma with a frequen...

Nanocrystal-based light source for sample characterization

High power broadband light source

Plasma cell for providing VUV filtering in a laser-sustained plasma...

Method and system for controlling convective flow in a light-sustai...

Method and system for generating a light-sustained plasma in a flan...

System and method for transverse pumping of laser-sustained plasma

Open plasma lamp for forming a light-sustained plasma

Method and system for controlling convection within a plasma cell

System and method for imaging a sample with a laser sustained plasm...

Method and apparatus to reduce thermal stress by regulation and con...

Light source with nanostructured antireflection layer

Method and system for controlling convective flow in a light-sustai...

Open plasma lamp for forming a light-sustained plasma

Method and system for controlling convection within a plasma cell

Adaptive optics for compensating aberrations in light-sustained pla...

Multi-wavelength pumping to sustain hot plasma

Optically pumping to sustain plasma

Initiating laser-sustained plasma

Image collection

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR PUMPING LASER SUSTAINED PLASMA WITH AN ILLUMI...

PROTECTION OF OPTICAL MATERIALS OF OPTICAL COMPONENTS FROM RADIATIO...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

SYSTEM AND METHOD FOR PROTECTING OPTICS FROM VACUUM ULTRAVIOLET LIGHT

High Efficiency Laser-Sustained Plasma Light Source

System and Method for Pumping Laser Sustained Plasma with Interlace...

System and Method for Pumping Laser Sustained Plasma with an Illumi...

System and Method for Pumping Laser Sustained Plasma with a Frequen...

System and Method for Pumping Laser Sustained Plasma and Enhancing...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

High Efficiency Laser-Sustained Plasma Light Source

Method and System for Controlling Convective Flow in a Light-Sustai...

Open Plasma Lamp for Forming a Light-Sustained Plasma

Method and System for Controlling Convection within a Plasma Cell

High Power Broadband Light Source

Open Plasma Lamp for Forming a Light-Sustained Plasma

System and Method for Transverse Pumping of Laser-Sustained Plasma

Light Source with Nanostructured Antireflection Layer

System and Method for Imaging a Sample with a Laser Sustained Plasm...

Method and System for Controlling Convection within a Plasma Cell

Method and System for Controlling Convective Flow in a Light-Sustai...

Method and Apparatus to Reduce Thermal Stress by Regulation and Con...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

OPTICALLY PUMPING TO SUSTAIN PLASMA

ADAPTIVE OPTICS FOR COMPENSATING ABERRATIONS IN LIGHT-SUSTAINED PLA...

Multi-Wavelength Pumping to Sustain Hot Plasma

Image Collection