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REACTION CHAMBER
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Publication number 20100116207
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Publication date May 13, 2010
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ASM AMERICA, INC
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Michael Givens
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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THERMOCOUPLE
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Publication number 20090052498
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Publication date Feb 26, 2009
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ASM AMERICA, INC
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Mike Halpin
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G05 - CONTROLLING REGULATING
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WAFER SUPPORT SYSTEM
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Publication number 20070131173
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Publication date Jun 14, 2007
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ASM AMERICA, INC
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Low-mass susceptor improvements
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Publication number 20050183829
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Publication date Aug 25, 2005
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Matthew G. Goodman
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer holder with peripheral lift ring
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Publication number 20050011458
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Publication date Jan 20, 2005
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Ravinder K. Aggarwal
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Publication number 20040198153
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Publication date Oct 7, 2004
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer holder with stiffening rib
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Publication number 20030205324
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Publication date Nov 6, 2003
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Tony J. Keeton
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer holder with peripheral lift ring
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Publication number 20030173031
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Publication date Sep 18, 2003
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Ravinder K. Aggarwal
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Publication number 20030075274
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Publication date Apr 24, 2003
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...