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Matthew J. Rutten
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Milton, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sputtered tungsten diffusion barrier for improved interconnect robu...
Patent number
6,838,364
Issue date
Jan 4, 2005
International Business Machines Corporation
Stephen B. Brodsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of reducing planarization defects
Patent number
6,503,827
Issue date
Jan 7, 2003
International Business Machines Corporation
Susan G. Bombardier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and structure of column interconnect
Patent number
6,495,917
Issue date
Dec 17, 2002
International Business Machines Corporation
John J. Ellis-Monaghan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtered tungsten diffusion barrier for improved interconnect robu...
Patent number
6,245,668
Issue date
Jun 12, 2001
International Business Machines Corporation
Stephen B. Brodsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for removing slurry particles
Patent number
6,171,436
Issue date
Jan 9, 2001
International Business Machines Corporation
Cuc K. Huynh
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for slurry polishing
Patent number
6,110,832
Issue date
Aug 29, 2000
International Business Machines Corporation
Clifford O. Morgan
B24 - GRINDING POLISHING
Information
Patent Grant
Electrical contact to buried SOI structures
Patent number
6,071,803
Issue date
Jun 6, 2000
International Business Machines Corporation
Matthew J. Rutten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Precision analog metal-metal capacitor
Patent number
6,008,083
Issue date
Dec 28, 1999
International Business Machines Corporation
Terry J. Brabazon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical polishing device and method
Patent number
5,928,062
Issue date
Jul 27, 1999
International Business Machines Corporation
Matthew Kilpatrick Miller
B24 - GRINDING POLISHING
Information
Patent Grant
CMP polishing pad backside modifications for advantageous polishing...
Patent number
5,913,713
Issue date
Jun 22, 1999
International Business Machines Corporation
Roger W. Cheek
B24 - GRINDING POLISHING
Information
Patent Grant
Method of removing slurry particles
Patent number
5,896,870
Issue date
Apr 27, 1999
International Business Machines Corporation
Cuc K. Huynh
B24 - GRINDING POLISHING
Information
Patent Grant
Electrical contact to buried SOI structures
Patent number
5,889,293
Issue date
Mar 30, 1999
International Business Machines Corporation
Matthew J. Rutten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polishing pad with controlled release of desired micro-encapsulated...
Patent number
5,876,266
Issue date
Mar 2, 1999
International Business Machines Corporation
Matthew Kilpatrick Miller
B24 - GRINDING POLISHING
Information
Patent Grant
Gas discharge devices including matrix materials with ionizable gas...
Patent number
5,877,589
Issue date
Mar 2, 1999
International Business Machines Corporation
Clifford O. Morgan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable travel carrier device and method for planarizing semicondu...
Patent number
5,722,879
Issue date
Mar 3, 1998
International Business Machines Corporation
John Edward Cronin
B24 - GRINDING POLISHING
Information
Patent Grant
Precision analog metal-metal capacitor
Patent number
5,708,559
Issue date
Jan 13, 1998
International Business Machines Corporation
Terry J. Brabazon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for removing residue from a semiconductor wafer after chemi...
Patent number
5,704,987
Issue date
Jan 6, 1998
International Business Machines Corporation
Cuc Kim Huynh
B08 - CLEANING
Information
Patent Grant
Selective polish process for titanium, titanium nitride, tantalum a...
Patent number
5,676,587
Issue date
Oct 14, 1997
International Business Machines Corporation
William Francis Landers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transverse diffusion barrier interconnect structure
Patent number
5,585,674
Issue date
Dec 17, 1996
International Business Machines Corporation
Robert M. Geffken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Variable travel carrier device and method for planarizing semicondu...
Patent number
5,549,511
Issue date
Aug 27, 1996
International Business Machines Corporation
John E. Cronin
B24 - GRINDING POLISHING
Information
Patent Grant
Bidirectional field emission devices, storage structures and fabric...
Patent number
5,530,262
Issue date
Jun 25, 1996
International Business Machines Corporation
John E. Cronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming transverse diffusion barrier interconnect structure
Patent number
5,488,013
Issue date
Jan 30, 1996
International Business Machines Corporation
Robert M. Geffken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication methods for bidirectional field emission devices and st...
Patent number
5,312,777
Issue date
May 17, 1994
International Business Machines Corporation
John E. Cronin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Version with markings to show changes made
Publication number
20010029096
Publication date
Oct 11, 2001
International Business Machines Corporation
Stephen B. Brodsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...