Matthew Panzer

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
System and method for imaging a sample with an illumination source...
- Patent number 10,616,987
- Issue date Apr 7, 2020
- KLA-Tencor Corporation
- Wei Zhao
- G02 - OPTICS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 10,520,741
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Broadband light source including transparent portion with high hydr...
- Patent number 10,522,340
- Issue date Dec 31, 2019
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,381,216
- Issue date Aug 13, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser sustained plasma light source with graded absorption features
- Patent number 10,283,342
- Issue date May 7, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,217,625
- Issue date Feb 26, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continuous-wave laser-sustained plasma illumination source
- Patent number 10,163,620
- Issue date Dec 25, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Broadband light source including transparent portion with high hydr...
- Patent number 10,032,620
- Issue date Jul 24, 2018
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma cell for providing VUV filtering in a laser-sustained plasma...
- Patent number 9,927,094
- Issue date Mar 27, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for separation of pump light and collected light...
- Patent number 9,709,811
- Issue date Jul 18, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Grant
Laser sustained plasma bulb including water
- Patent number 8,796,652
- Issue date Aug 5, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20190115203
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broadband Light Source Including Transparent Portion with High Hydr...
- Publication number 20180330937
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Lauren Wilson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20180172240
- Publication date Jun 21, 2018
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20170315369
- Publication date Nov 2, 2017
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- G02 - OPTICS
Information Patent Application
Laser Sustained Plasma Light Source with Graded Absorption Features
- Publication number 20170164457
- Publication date Jun 8, 2017
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Imaging a Sample with an Illumination Source...
- Publication number 20170059490
- Publication date Mar 2, 2017
- KLA-Tencor Corporation
- Wei Zhao
- G01 - MEASURING TESTING
Information Patent Application
Continuous-Wave Laser-Sustained Plasma Illumination Source
- Publication number 20160268120
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Broadband Light Source Including Transparent Portion with High Hydr...
- Publication number 20150357179
- Publication date Dec 10, 2015
- KLA-Tencor Corporation
- Lauren Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Separation of Pump Light and Collected Light...
- Publication number 20150049778
- Publication date Feb 19, 2015
- KLA-Tencor Corporation
- Anatoly Shchemelinin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Sustained Plasma Bulb Including Water
- Publication number 20140042336
- Publication date Feb 13, 2014
- KLA-Tencor Corporation
- Ilya Bezel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...
- Publication number 20130181595
- Publication date Jul 18, 2013
- KLA-Tencor Corporation
- Ilya Bezel
- F21 - LIGHTING

Matthew Panzer

Person

Patents Grantslast 30 patents

System and method for imaging a sample with an illumination source...

System and method for separation of pump light and collected light...

Broadband light source including transparent portion with high hydr...

Continuous-wave laser-sustained plasma illumination source

Laser sustained plasma light source with graded absorption features

Continuous-wave laser-sustained plasma illumination source

Continuous-wave laser-sustained plasma illumination source

Broadband light source including transparent portion with high hydr...

Plasma cell for providing VUV filtering in a laser-sustained plasma...

System and method for separation of pump light and collected light...

Laser sustained plasma bulb including water

Patents Applicationslast 30 patents

Continuous-Wave Laser-Sustained Plasma Illumination Source

Broadband Light Source Including Transparent Portion with High Hydr...

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...

System and Method for Separation of Pump Light and Collected Light...

Laser Sustained Plasma Light Source with Graded Absorption Features

System and Method for Imaging a Sample with an Illumination Source...

Continuous-Wave Laser-Sustained Plasma Illumination Source

Broadband Light Source Including Transparent Portion with High Hydr...

System and Method for Separation of Pump Light and Collected Light...

Laser Sustained Plasma Bulb Including Water

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma...