Matthias Bauer

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Selective epitaxial formation of semiconductive films
- Patent number 9,312,131
- Issue date Apr 12, 2016
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure comprises an As-deposited doped single crystalline Si-con...
- Patent number 9,190,515
- Issue date Nov 17, 2015
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,834,955
- Issue date Sep 16, 2014
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput cyclical epitaxial deposition and etch process
- Patent number 8,809,170
- Issue date Aug 19, 2014
- ASM America Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for a gas panel with constant gas flow
- Patent number 8,728,239
- Issue date May 20, 2014
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical epitaxial deposition and etch
- Patent number 8,367,528
- Issue date Feb 5, 2013
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective epitaxial formation of semiconductor films
- Patent number 8,278,176
- Issue date Oct 2, 2012
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inhibitors for selective deposition of silicon containing films
- Patent number 7,939,447
- Issue date May 10, 2011
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Separate injection of reactive species in selective formation of films
- Patent number 7,897,491
- Issue date Mar 1, 2011
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial deposition of doped semiconductor materials
- Patent number 7,863,163
- Issue date Jan 4, 2011
- ASM America, Inc.
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Grant
Selective deposition of silicon-containing films
- Patent number 7,816,236
- Issue date Oct 19, 2010
- ASM America Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing electrically active doped crystalline Si-cont...
- Patent number 7,687,383
- Issue date Mar 30, 2010
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Epitaxial growth of relaxed silicon germanium layers
- Patent number 7,666,799
- Issue date Feb 23, 2010
- ASM America, Inc.
- Chantal Arena
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual channel heterostructure
- Patent number 7,648,853
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of making substitutionally carbon-doped crystalline Si-cont...
- Patent number 7,648,690
- Issue date Jan 19, 2010
- ASM America Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of making substitutionally carbon-doped crystalline Si-cont...
- Patent number 7,438,760
- Issue date Oct 21, 2008
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of silicon germanium on silicon-on-insulator structures...
- Patent number 7,208,354
- Issue date Apr 24, 2007
- ASM America, Inc.
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR A GAS PANEL WITH CONSTANT GAS FLOW
- Publication number 20140209177
- Publication date Jul 31, 2014
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods and Apparatus for a Gas Panel with Constant Gas Flow
- Publication number 20130029496
- Publication date Jan 31, 2013
- ASM America, Inc.
- Matthias Bauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH THROUGHPUT CYCLICAL EPITAXIAL DEPOSITION AND ETCH PROCESS
- Publication number 20120295427
- Publication date Nov 22, 2012
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTIVE FILMS
- Publication number 20120244688
- Publication date Sep 27, 2012
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CYCLICAL EPITAXIAL DEPOSITION AND ETCH
- Publication number 20110117732
- Publication date May 19, 2011
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DEPOSITING ELECTRICALLY ACTIVE DOPED CRYSTALLINE SI-CONT...
- Publication number 20100140744
- Publication date Jun 10, 2010
- ASM AMERICA, INC
- MATTHIAS BAUER
- C30 - CRYSTAL GROWTH
Information Patent Application
SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS
- Publication number 20100093159
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
EPITAXIAL GROWTH OF RELAXED SILICON GERMANIUM LAYERS
- Publication number 20090189185
- Publication date Jul 30, 2009
- ASM AMERICA, INC
- Chantal ARENA
- C30 - CRYSTAL GROWTH
Information Patent Application
SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS
- Publication number 20090163001
- Publication date Jun 25, 2009
- ASM AMERICA, INC
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
INHIBITORS FOR SELECTIVE DEPOSITION OF SILICON CONTAINING FILMS
- Publication number 20090111246
- Publication date Apr 30, 2009
- ASM AMERICA, INC
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS OF MAKING SUBSTITUTIONALLY CARBON-DOPED CRYSTALLINE SI-CONT...
- Publication number 20090026496
- Publication date Jan 29, 2009
- ASM AMERICA, INC
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND SYSTEMS FOR SELECTIVELY DEPOSITING SI-CONTAINING FILMS...
- Publication number 20080026149
- Publication date Jan 31, 2008
- ASM AMERICA, INC
- Pierre Tomasini
- C30 - CRYSTAL GROWTH
Information Patent Application
Dual channel heterostructure
- Publication number 20080014721
- Publication date Jan 17, 2008
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTOR FILMS
- Publication number 20070287272
- Publication date Dec 13, 2007
- ASM AMERICA, INC
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photodetectors employing germanium layers
- Publication number 20070262296
- Publication date Nov 15, 2007
- Matthias Bauer
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Epitaxial deposition of doped semiconductor materials
- Publication number 20070161216
- Publication date Jul 12, 2007
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
Apparatus and method for depositing silicon germanium films
- Publication number 20070155138
- Publication date Jul 5, 2007
- Pierre Tomasini
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition of silicon germanium on silicon-on-insulator structures...
- Publication number 20070042572
- Publication date Feb 22, 2007
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of making substitutionally carbon-doped crystalline Si-cont...
- Publication number 20060240630
- Publication date Oct 26, 2006
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
Selective deposition of silicon-containing films
- Publication number 20060234504
- Publication date Oct 19, 2006
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods of depositing electrically active doped crystalline Si-cont...
- Publication number 20060205194
- Publication date Sep 14, 2006
- Matthias Bauer
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition of silicon germanium on silicon-on-insulator structures...
- Publication number 20050054175
- Publication date Mar 10, 2005
- Matthias Bauer
- H01 - BASIC ELECTRIC ELEMENTS

Matthias Bauer

Person

Patents Grantslast 30 patents

Selective epitaxial formation of semiconductive films

Structure comprises an As-deposited doped single crystalline Si-con...

Methods and apparatus for a gas panel with constant gas flow

High throughput cyclical epitaxial deposition and etch process

Methods and apparatus for a gas panel with constant gas flow

Cyclical epitaxial deposition and etch

Selective epitaxial formation of semiconductor films

Inhibitors for selective deposition of silicon containing films

Separate injection of reactive species in selective formation of films

Epitaxial deposition of doped semiconductor materials

Selective deposition of silicon-containing films

Methods of depositing electrically active doped crystalline Si-cont...

Epitaxial growth of relaxed silicon germanium layers

Dual channel heterostructure

Methods of making substitutionally carbon-doped crystalline Si-cont...

Methods of making substitutionally carbon-doped crystalline Si-cont...

Deposition of silicon germanium on silicon-on-insulator structures...

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR A GAS PANEL WITH CONSTANT GAS FLOW

Methods and Apparatus for a Gas Panel with Constant Gas Flow

HIGH THROUGHPUT CYCLICAL EPITAXIAL DEPOSITION AND ETCH PROCESS

SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTIVE FILMS

CYCLICAL EPITAXIAL DEPOSITION AND ETCH

METHODS OF DEPOSITING ELECTRICALLY ACTIVE DOPED CRYSTALLINE SI-CONT...

SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS

EPITAXIAL GROWTH OF RELAXED SILICON GERMANIUM LAYERS

SEPARATE INJECTION OF REACTIVE SPECIES IN SELECTIVE FORMATION OF FILMS

INHIBITORS FOR SELECTIVE DEPOSITION OF SILICON CONTAINING FILMS

METHODS OF MAKING SUBSTITUTIONALLY CARBON-DOPED CRYSTALLINE SI-CONT...

METHODS AND SYSTEMS FOR SELECTIVELY DEPOSITING SI-CONTAINING FILMS...

Dual channel heterostructure

SELECTIVE EPITAXIAL FORMATION OF SEMICONDUCTOR FILMS

Photodetectors employing germanium layers

Epitaxial deposition of doped semiconductor materials

Apparatus and method for depositing silicon germanium films

Deposition of silicon germanium on silicon-on-insulator structures...

Methods of making substitutionally carbon-doped crystalline Si-cont...

Selective deposition of silicon-containing films

Methods of depositing electrically active doped crystalline Si-cont...

Deposition of silicon germanium on silicon-on-insulator structures...