Matthias Illing

Person

Wannweil, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition strengthening members and method of manufac...
- Patent number 8,900,906
- Issue date Dec 2, 2014
- Robert Bosch GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing chips
- Patent number 8,389,327
- Issue date Mar 5, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical diaphragm sensor having a double diaphragm
- Patent number 7,863,072
- Issue date Jan 4, 2011
- Robert Bosch GmbH
- Matthias Illing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor element
- Patent number 7,572,661
- Issue date Aug 11, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element with trenched cavity
- Patent number 7,354,786
- Issue date Apr 8, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for supplying energy to sensors
- Patent number 6,989,609
- Issue date Jan 24, 2006
- Robert Bosch GmbH
- Jiri Marek
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Micromechanical structure, in particular for an acceleration sensor...
- Patent number 6,739,193
- Issue date May 25, 2004
- Robert Bosch GmbH
- Jochen Franz
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical device
- Patent number 6,360,605
- Issue date Mar 26, 2002
- Robert Bosch GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Atomic Layer Deposition Strengthening Members and Method of Manufac...
- Publication number 20130234270
- Publication date Sep 12, 2013
- ROBERT BOSCH GmbH
- Gary Yama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a component, method for manufacturing a co...
- Publication number 20110169107
- Publication date Jul 14, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CHIPS
- Publication number 20110151620
- Publication date Jun 23, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical diaphragm sensor having a double diaphragm
- Publication number 20090206422
- Publication date Aug 20, 2009
- Matthias Illing
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for controlling an air circulation part and/or an air supply...
- Publication number 20060229009
- Publication date Oct 12, 2006
- Matthias Illing
- B60 - VEHICLES IN GENERAL
Information Patent Application
Micromechanical sensor element
- Publication number 20060063293
- Publication date Mar 23, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensor element with trenched cavity
- Publication number 20060057816
- Publication date Mar 16, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for supplying energy to sensors
- Publication number 20040212195
- Publication date Oct 28, 2004
- Jiri Marek
- B60 - VEHICLES IN GENERAL
Information Patent Application
Micromechanical structure, in particular for an acceleration sensor...
- Publication number 20030115960
- Publication date Jun 26, 2003
- Jochen Franz
- G01 - MEASURING TESTING

Matthias Illing

Person

Patents Grantslast 30 patents

Atomic layer deposition strengthening members and method of manufac...

Method for manufacturing chips

Micromechanical diaphragm sensor having a double diaphragm

Method for manufacturing a micromechanical sensor element

Sensor element with trenched cavity

Method and apparatus for supplying energy to sensors

Micromechanical structure, in particular for an acceleration sensor...

Micromechanical device

Patents Applicationslast 30 patents

Atomic Layer Deposition Strengthening Members and Method of Manufac...

Method for manufacturing a component, method for manufacturing a co...

METHOD FOR MANUFACTURING CHIPS

Micromechanical diaphragm sensor having a double diaphragm

Method for controlling an air circulation part and/or an air supply...

Micromechanical sensor element

Sensor element with trenched cavity

Method and apparatus for supplying energy to sensors

Micromechanical structure, in particular for an acceleration sensor...