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Matti LIUKKU

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  • Helsinki, FI
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    MEMS DEVICE
    • Publication number 20250206595
    • Publication date Jun 26, 2025
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    COMB STRUCTURE FOR MEMS ACCELEROMETER
    • Publication number 20250138044
    • Publication date May 1, 2025
    • Matti LIUKKU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    TWO-AXIS MEMS MIRROR
    • Publication number 20240345382
    • Publication date Oct 17, 2024
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G02 - OPTICS
  • Information Patent Application

    IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
    • Publication number 20240300805
    • Publication date Sep 12, 2024
    • Murata Manufacturing Co., Ltd.
    • Ville-Pekka RYTKÖNEN
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    CAPACITIVE MEMS DEVICE
    • Publication number 20240295582
    • Publication date Sep 5, 2024
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    DOUBLE LAYER MEMS DEVICES
    • Publication number 20240286890
    • Publication date Aug 29, 2024
    • Murata Manufacturing Co., Ltd.
    • Altti TORKKELI
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    STOPPER BUMP ON ROTOR
    • Publication number 20240190698
    • Publication date Jun 13, 2024
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    MOTION LIMITER WITH REDUCED STICTION
    • Publication number 20240051816
    • Publication date Feb 15, 2024
    • Murata Manufacturing Co., Ltd.
    • Pekka LEHTINEN
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS
    • Publication number 20230305036
    • Publication date Sep 28, 2023
    • Murata Manufacturing Co., Ltd.
    • Altti TORKKELI
    • G01 - MEASURING TESTING
  • Information Patent Application

    THREE-AXIS ACCELEROMETER WITH TWO MASSES
    • Publication number 20230228790
    • Publication date Jul 20, 2023
    • Murata Manufacturing Co., Ltd.
    • Ville-Pekka RYTKÖNEN
    • G01 - MEASURING TESTING
  • Information Patent Application

    SEESAW ACCELEROMETER
    • Publication number 20230003759
    • Publication date Jan 5, 2023
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    ACCELEROMETER WITH TWO SEESAWS
    • Publication number 20230003760
    • Publication date Jan 5, 2023
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    MEMS ACCELEROMETER WITH MECHANICALLY DECOUPLED PROOF MASS
    • Publication number 20210293847
    • Publication date Sep 23, 2021
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    VIBRATION DAMPING IN MEMS ACCELERATION SENSORS
    • Publication number 20210171337
    • Publication date Jun 10, 2021
    • MURATA MANUFACTURING CO., LTD.
    • Matti LIUKKU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    LOW-NOISE MULTI-AXIS MEMS ACCELEROMETER
    • Publication number 20210072280
    • Publication date Mar 11, 2021
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    TWO-AXIS MEMS MIRROR WITH SEPARATED DRIVES
    • Publication number 20200386985
    • Publication date Dec 10, 2020
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    ROBUST Z-AXIS ACCELERATION SENSOR
    • Publication number 20200363446
    • Publication date Nov 19, 2020
    • Murata Manufacturing Co., Ltd.
    • Hannu VESTERINEN
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    MEMS FREQUENCY-TUNING SPRINGS
    • Publication number 20200099357
    • Publication date Mar 26, 2020
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • H03 - BASIC ELECTRONIC CIRCUITRY
  • Information Patent Application

    MICROELECTROMECHANICAL DEVICE FOR OUT-OF-PLANE MOTION DETECTION
    • Publication number 20200018777
    • Publication date Jan 16, 2020
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    SCANNING OPTICAL DEVICE WITH BROADENED IMAGE AREA
    • Publication number 20190339514
    • Publication date Nov 7, 2019
    • Murata Manufacturing Co., Ltd.
    • Jouni ERKKILÄ
    • G02 - OPTICS
  • Information Patent Application

    MEMS REFLECTOR SYSTEM WITH TRAJECTORY CONTROL
    • Publication number 20190243126
    • Publication date Aug 8, 2019
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    MEMS REFLECTOR WITH CENTER SUPPORT
    • Publication number 20190146211
    • Publication date May 16, 2019
    • Murata Manufacturing Co., Ltd.
    • Altti TORKKELI
    • G02 - OPTICS
  • Information Patent Application

    A MEMS REFLECTOR SYSTEM
    • Publication number 20190064508
    • Publication date Feb 28, 2019
    • Murata Manufacturing Co., Ltd.
    • Altti TORKKELI
    • G02 - OPTICS
  • Information Patent Application

    CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER
    • Publication number 20180321038
    • Publication date Nov 8, 2018
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER
    • Publication number 20180321275
    • Publication date Nov 8, 2018
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    MICROELECTROMECHANICAL ACCELEROMETER DEVICE
    • Publication number 20170089946
    • Publication date Mar 30, 2017
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING
  • Information Patent Application

    MULTI-LEVEL MICROMECHANICAL STRUCTURE
    • Publication number 20160332864
    • Publication date Nov 17, 2016
    • Murata Manufacturing Co., Ltd.
    • Antti IIHOLA
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    MICROELECTROMECHANICAL STRUCTURE AND DEVICE
    • Publication number 20160264401
    • Publication date Sep 15, 2016
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    MEMS SENSOR AND A SEMICONDUCTOR PACKAGE
    • Publication number 20160152202
    • Publication date Jun 2, 2016
    • MURATA MANUFACTURING CO., LTD.
    • Ville-Pekka RYTKÖNEN
    • B60 - VEHICLES IN GENERAL
  • Information Patent Application

    CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACC...
    • Publication number 20150316581
    • Publication date Nov 5, 2015
    • Murata Manufacturing Co., Ltd.
    • Matti LIUKKU
    • G01 - MEASURING TESTING