Matti LIUKKU

Person

Helsinki, FI

People

Patents Grantslast 30 patents

Information Patent Grant
Seesaw accelerometer
- Patent number 11,977,094
- Issue date May 7, 2024
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometer with two seesaws
- Patent number 11,867,714
- Issue date Jan 9, 2024
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Vibration damping in MEMS acceleration sensors
- Patent number 11,820,648
- Issue date Nov 21, 2023
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS accelerometer with mechanically decoupled proof mass
- Patent number 11,796,560
- Issue date Oct 24, 2023
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Two-axis MEMS mirror with separated drives
- Patent number 11,526,000
- Issue date Dec 13, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G02 - OPTICS
Information Patent Grant
Low-noise multi-axis MEMS accelerometer
- Patent number 11,467,181
- Issue date Oct 11, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
MEMS frequency-tuning springs
- Patent number 11,296,671
- Issue date Apr 5, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Robust z-axis acceleration sensor
- Patent number 11,131,688
- Issue date Sep 28, 2021
- Murata Manufacturing Co., Ltd.
- Hannu Vesterinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device for out-of-plane motion detection
- Patent number 11,105,828
- Issue date Aug 31, 2021
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Mems reflector system with trajectory control
- Patent number 11,067,793
- Issue date Jul 20, 2021
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Scanning optical device with broadened image area
- Patent number 11,002,957
- Issue date May 11, 2021
- Murata Manufacturing Co., Ltd.
- Jouni Erkkilä
- G01 - MEASURING TESTING
Information Patent Grant
MEMS reflector with center support
- Patent number 10,969,575
- Issue date Apr 6, 2021
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- G02 - OPTICS
Information Patent Grant
MEMS reflector system
- Patent number 10,914,939
- Issue date Feb 9, 2021
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Capacitive microelectromechanical accelerometer
- Patent number 10,823,568
- Issue date Nov 3, 2020
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive microelectromechanical accelerometer
- Patent number 10,809,279
- Issue date Oct 20, 2020
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical accelerometer device
- Patent number 10,281,486
- Issue date May 7, 2019
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor and a semiconductor package
- Patent number 10,137,851
- Issue date Nov 27, 2018
- Murata Manufacturing Co., Ltd.
- Ville-Pekka Rytkönen
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Microelectromechanical structure and device
- Patent number 9,969,606
- Issue date May 15, 2018
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level micromechanical structure
- Patent number 9,764,942
- Issue date Sep 19, 2017
- Murata Manufacturing Co., Ltd.
- Antti Iihola
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromechanical acceleration sensor
- Patent number 9,575,088
- Issue date Feb 21, 2017
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- G01 - MEASURING TESTING
Information Patent Grant
Capacitive micromechanical sensor structure and micromechanical acc...
- Patent number 9,547,020
- Issue date Jan 17, 2017
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
TWO-AXIS MEMS MIRROR
- Publication number 20240345382
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G02 - OPTICS
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS DEVICE
- Publication number 20240295582
- Publication date Sep 5, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
DOUBLE LAYER MEMS DEVICES
- Publication number 20240286890
- Publication date Aug 29, 2024
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP ON ROTOR
- Publication number 20240190698
- Publication date Jun 13, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOTION LIMITER WITH REDUCED STICTION
- Publication number 20240051816
- Publication date Feb 15, 2024
- Murata Manufacturing Co., Ltd.
- Pekka LEHTINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS
- Publication number 20230305036
- Publication date Sep 28, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G01 - MEASURING TESTING
Information Patent Application
THREE-AXIS ACCELEROMETER WITH TWO MASSES
- Publication number 20230228790
- Publication date Jul 20, 2023
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- G01 - MEASURING TESTING
Information Patent Application
SEESAW ACCELEROMETER
- Publication number 20230003759
- Publication date Jan 5, 2023
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETER WITH TWO SEESAWS
- Publication number 20230003760
- Publication date Jan 5, 2023
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
MEMS ACCELEROMETER WITH MECHANICALLY DECOUPLED PROOF MASS
- Publication number 20210293847
- Publication date Sep 23, 2021
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
VIBRATION DAMPING IN MEMS ACCELERATION SENSORS
- Publication number 20210171337
- Publication date Jun 10, 2021
- MURATA MANUFACTURING CO., LTD.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-NOISE MULTI-AXIS MEMS ACCELEROMETER
- Publication number 20210072280
- Publication date Mar 11, 2021
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
TWO-AXIS MEMS MIRROR WITH SEPARATED DRIVES
- Publication number 20200386985
- Publication date Dec 10, 2020
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
ROBUST Z-AXIS ACCELERATION SENSOR
- Publication number 20200363446
- Publication date Nov 19, 2020
- Murata Manufacturing Co., Ltd.
- Hannu VESTERINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS FREQUENCY-TUNING SPRINGS
- Publication number 20200099357
- Publication date Mar 26, 2020
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROELECTROMECHANICAL DEVICE FOR OUT-OF-PLANE MOTION DETECTION
- Publication number 20200018777
- Publication date Jan 16, 2020
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
SCANNING OPTICAL DEVICE WITH BROADENED IMAGE AREA
- Publication number 20190339514
- Publication date Nov 7, 2019
- Murata Manufacturing Co., Ltd.
- Jouni ERKKILÄ
- G02 - OPTICS
Information Patent Application
MEMS REFLECTOR SYSTEM WITH TRAJECTORY CONTROL
- Publication number 20190243126
- Publication date Aug 8, 2019
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
MEMS REFLECTOR WITH CENTER SUPPORT
- Publication number 20190146211
- Publication date May 16, 2019
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G02 - OPTICS
Information Patent Application
A MEMS REFLECTOR SYSTEM
- Publication number 20190064508
- Publication date Feb 28, 2019
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- G02 - OPTICS
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER
- Publication number 20180321038
- Publication date Nov 8, 2018
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER
- Publication number 20180321275
- Publication date Nov 8, 2018
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
MICROELECTROMECHANICAL ACCELEROMETER DEVICE
- Publication number 20170089946
- Publication date Mar 30, 2017
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
MULTI-LEVEL MICROMECHANICAL STRUCTURE
- Publication number 20160332864
- Publication date Nov 17, 2016
- Murata Manufacturing Co., Ltd.
- Antti IIHOLA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL STRUCTURE AND DEVICE
- Publication number 20160264401
- Publication date Sep 15, 2016
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND A SEMICONDUCTOR PACKAGE
- Publication number 20160152202
- Publication date Jun 2, 2016
- MURATA MANUFACTURING CO., LTD.
- Ville-Pekka RYTKÖNEN
- B60 - VEHICLES IN GENERAL
Information Patent Application
CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACC...
- Publication number 20150316581
- Publication date Nov 5, 2015
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- G01 - MEASURING TESTING
Information Patent Application
CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR
- Publication number 20150000403
- Publication date Jan 1, 2015
- MURATA MANUFACTURING CO., LTD.
- Matti LIUKKU
- G01 - MEASURING TESTING

Matti LIUKKU

Person

Patents Grantslast 30 patents

Seesaw accelerometer

Accelerometer with two seesaws

Vibration damping in MEMS acceleration sensors

MEMS accelerometer with mechanically decoupled proof mass

Two-axis MEMS mirror with separated drives

Low-noise multi-axis MEMS accelerometer

MEMS frequency-tuning springs

Robust z-axis acceleration sensor

Microelectromechanical device for out-of-plane motion detection

Mems reflector system with trajectory control

Scanning optical device with broadened image area

MEMS reflector with center support

MEMS reflector system

Capacitive microelectromechanical accelerometer

Capacitive microelectromechanical accelerometer

Microelectromechanical accelerometer device

MEMS sensor and a semiconductor package

Microelectromechanical structure and device

Multi-level micromechanical structure

Capacitive micromechanical acceleration sensor

Capacitive micromechanical sensor structure and micromechanical acc...

Patents Applicationslast 30 patents

TWO-AXIS MEMS MIRROR

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

CAPACITIVE MEMS DEVICE

DOUBLE LAYER MEMS DEVICES

STOPPER BUMP ON ROTOR

MOTION LIMITER WITH REDUCED STICTION

ACCELEROMETER ELEMENT FOR DETECTING OUT-OF-PLANE ACCELERATIONS

THREE-AXIS ACCELEROMETER WITH TWO MASSES

SEESAW ACCELEROMETER

ACCELEROMETER WITH TWO SEESAWS

MEMS ACCELEROMETER WITH MECHANICALLY DECOUPLED PROOF MASS

VIBRATION DAMPING IN MEMS ACCELERATION SENSORS

LOW-NOISE MULTI-AXIS MEMS ACCELEROMETER

TWO-AXIS MEMS MIRROR WITH SEPARATED DRIVES

ROBUST Z-AXIS ACCELERATION SENSOR

MEMS FREQUENCY-TUNING SPRINGS

MICROELECTROMECHANICAL DEVICE FOR OUT-OF-PLANE MOTION DETECTION

SCANNING OPTICAL DEVICE WITH BROADENED IMAGE AREA

MEMS REFLECTOR SYSTEM WITH TRAJECTORY CONTROL

MEMS REFLECTOR WITH CENTER SUPPORT

A MEMS REFLECTOR SYSTEM

CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER

CAPACITIVE MICROELECTROMECHANICAL ACCELEROMETER

MICROELECTROMECHANICAL ACCELEROMETER DEVICE

MULTI-LEVEL MICROMECHANICAL STRUCTURE

MICROELECTROMECHANICAL STRUCTURE AND DEVICE

MEMS SENSOR AND A SEMICONDUCTOR PACKAGE

CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACC...

CAPACITIVE MICROMECHANICAL ACCELERATION SENSOR