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Patents Grants
last 30 patents
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Patent Grant
Charged-particle source
Patent number
11,735,391
Issue date
Aug 22, 2023
IMS Nanofabrication GmbH
Stefan Gerhold
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Charged-particle source and method for cleaning a charged-particle...
Patent number
10,840,054
Issue date
Nov 17, 2020
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Charged-Particle Source
Publication number
20210335573
Publication date
Oct 28, 2021
IMS Nanofabrication GmbH
Stefan Gerhold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged-Particle Source and Method for Cleaning a Charged-Particle...
Publication number
20190237288
Publication date
Aug 1, 2019
IMS Nanofabrication GmbH
Elmar Platzgummer
H01 - BASIC ELECTRIC ELEMENTS