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Max Christian SCHUERMANN
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Luebbecke, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing mirror shells of a nested shells grazing in...
Patent number
9,421,647
Issue date
Aug 23, 2016
Ushio Denki Kabushiki Kaisha
Christof Metzmacher
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for the spatially resolved measurement of parameters in a cr...
Patent number
8,686,372
Issue date
Apr 1, 2014
Ushio Denki Kabushiki Kaisha
Thomas Missalla
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for the generation of short-wavelength radiati...
Patent number
8,610,354
Issue date
Dec 17, 2013
XTREME technologies GmbH
Max Christian Schuermann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and arrangement for the adjustment of characteristics of a b...
Patent number
8,410,422
Issue date
Apr 2, 2013
XTREME technologies GmbH
Denis Bolshukhin
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Plasma radiation source and device for creating a gas curtain for p...
Patent number
7,328,885
Issue date
Feb 12, 2008
Xtreme technologies GmbH
Max C. Schuermann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Narrow-band transmission filter for EUV radiation
Patent number
7,329,876
Issue date
Feb 12, 2008
Xtreme technologies GmbH
Max Christian Schuermann
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF MANUFACTURING MIRROR SHELLS OF A NESTED SHELLS GRAZING IN...
Publication number
20140173875
Publication date
Jun 26, 2014
Ushio Denki Kabushiki Kaisha
CHRISTOF METZMACHER
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and Arrangement for the Adjustment of Characteristics of a B...
Publication number
20120248327
Publication date
Oct 4, 2012
XTREME TECHNOLOGIES GMBH
Denis Bolshukhin
G01 - MEASURING TESTING
Information
Patent Application
Method and Apparatus for the Generation of Short-Wavelength Radiati...
Publication number
20120153829
Publication date
Jun 21, 2012
XTREME TECHNOLOGIES GMBH
Max Christian SCHUERMANN
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for the Spatially Resolved Measurement of Parameters in a Cr...
Publication number
20120138805
Publication date
Jun 7, 2012
XTREME TECHNOLOGIES GMBH
Thomas Missalla
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND ARRANGEMENT FOR THE OPERATION OF PLASMA-BASED SHORT-WAVE...
Publication number
20100078578
Publication date
Apr 1, 2010
XTREME TECHNOLOGIES GMBH
Max Christian Schuermann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NARROW-BAND TRANSMISSION FILTER FOR EUV RADIATION
Publication number
20070170367
Publication date
Jul 26, 2007
XTREME technologies GmbH;
Max Christian Schuermann
G02 - OPTICS
Information
Patent Application
Plasma radiation source and device for creating a gas curtain for p...
Publication number
20060158126
Publication date
Jul 20, 2006
Max C. Schuermann
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Arrangement for determining the spectral reflectivity of a measurem...
Publication number
20040062350
Publication date
Apr 1, 2004
JENOPTIK Mikrotechnik GmbH
Max Christian Schuermann
G01 - MEASURING TESTING