NARROW-BAND TRANSMISSION FILTER FOR EUV RADIATION

Abstract

The object of the invention is to provide a transmission filter for EUV radiation which has a sufficiently narrow transmission window to characterize EUV radiation in a narrowly defined spectral region. This object is met by providing a transmission layer system having at least one uranium-containing layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings:

FIG. 1 shows the transmission of a uranium layer with a thickness of 100 nm in the wavelength region from 0.5 nm to 120 nm (a) and from 5 nm to 20 nm (b);

FIG. 2 shows the transmission of a uranium layer with a thickness of 300 nm in the wavelength region from 0.5 nm to 120 nm (a) and from 5 nm to 20 nm (b);

FIG. 3 shows the transmission of a layer system comprising a uranium layer, a silicon layer and a ruthenium layer in the wavelength region from 0.5 nm to 120 nm (a) and from 5 nm to 20 nm (b);

FIG. 4 shows a reception device comprising a foil-like transmission filter and a radiation detector which is sensitive to EUV radiation;

FIG. 5 shows a reception device with a radiation detector which is sensitive to EUV radiation and on which a transmission layer system according to the invention is arranged;

FIG. 6 shows a reception device comprising a receiver which is sensitive to VIS radiation and a self-supporting fluorescing material which is coated with a transmission layer system according to the invention;

FIG. 7 shows a reception device comprising a receiver which is sensitive to VIS radiation and a carrier which is transparent for VIS radiation and with a transmission layer system according to the invention and a layer of fluorescing material arranged thereon; and

FIG. 8 shows a reception device comprising a receiver which is sensitive to VIS radiation and a coating comprising a transmission layer system according to the invention and a layer of fluorescing material.

Claims

1. A narrow-band transmission filter for EUV radiation comprising a transmission layer system having at least one uranium-containing layer.

2. The transmission filter according to claim 1, wherein the transmission layer system has at least one additional layer containing at least one element which suppresses the transmission window of the uranium outside a region from 13.365 nm to 13.635 nm.

3. The transmission filter according to claim 2, wherein one of the additional layers contains silicon.

4. The transmission filter according to claim 2, wherein one of the additional layers contains ruthenium.

5. The transmission filter according to claim 2, wherein the transmission layer system comprises a silicon layer with a thickness in the range from 280 nm to 520 nm, a uranium layer with a thickness in the range from 100 nm to 200 nm, and a ruthenium layer with a thickness in the range from 70 nm to 130 nm.

6. The transmission filter according to claim 1, wherein at least one layer of fluorescing material which emits fluorescent radiation in the visible spectral region when irradiated with transmitted EUV radiation is arranged on the transmission layer system.

7. The transmission filter according to claim 6, wherein the layer which emits fluorescent radiation comprises self-supporting fluorescing material.

8. The transmission filter according to claim 6, wherein the transmission layer system and the layer of fluorescing material are arranged on a carrier which is transparent for the visible spectral region.

9. A reception device for characterizing EUV radiation in which a transmission layer system according to claim 1 is arranged on the beam inlet side of a radiation detector.

10. The reception device according to claim 9, wherein the transmission layer system is constructed as a foil.

11. The reception device according to claim 9, wherein the transmission layer system is arranged on the active surface of the radiation detector.

12. The reception device according to claim 9, wherein the radiation detector is an EUV-sensitive photodiode.

13. The reception device according to claim 9, wherein the radiation detector is an EUV-sensitive CCD array.

14. The reception device for characterizing EUV radiation in which a receiver working in the visible spectral region is arranged downstream of a transmission filter according to claim 6.

15. The reception device according to claim 14, wherein the receiver working in the visible spectral region is a camera.

16. The reception device according to claim 14, wherein the camera is constructed as a digital camera.