Mehdi Vaez-Iravani

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Surface roughness and emissivity determination
- Patent number 12,098,914
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Eric Chin Hong Ng
- G01 - MEASURING TESTING
Information Patent Grant
Real-time detection of particulate matter during deposition chamber...
- Patent number 12,002,665
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image-based in-situ process monitoring
- Patent number 11,908,716
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Guoheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ, real-time detection of particulate defects in a fluid
- Patent number 11,442,000
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detection of particle size in a fluid
- Patent number 11,441,992
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Image based metrology of surface deformations
- Patent number 11,417,010
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for detection of particle size in a fluid
- Patent number 11,353,389
- Issue date Jun 7, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Multibeamlet charged particle device and method
- Patent number 11,309,163
- Issue date Apr 19, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for inspection of a specimen
- Patent number 11,204,330
- Issue date Dec 21, 2021
- KLA-Tencor Technologies Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Imaging reflectometer
- Patent number 11,187,654
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
High sensitivity image-based reflectometry
- Patent number 11,156,566
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High sensitivity image-based reflectometry
- Patent number 11,150,078
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Particle detection for substrate processing
- Patent number 11,119,051
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Todd Egan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology system for substrate deformation measurement
- Patent number 10,923,371
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Particle detection for substrate processing
- Patent number 10,845,317
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Todd Egan
- G01 - MEASURING TESTING
Information Patent Grant
Imaging reflectometer
- Patent number 10,816,464
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Quarter wave light splitting
- Patent number 10,705,431
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G02 - OPTICS
Information Patent Grant
Digital lithography with extended field size
- Patent number 10,599,044
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,527,407
- Issue date Jan 7, 2020
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Monitoring system for deposition and method of operation thereof
- Patent number 10,522,375
- Issue date Dec 31, 2019
- Applied Materials, Inc.
- Edward W. Budiarto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology systems with multiple derivative modules for substrate st...
- Patent number 10,510,624
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Digital lithography with extended depth of focus
- Patent number 10,474,041
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Guoheng Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Flexible mode scanning optical microscopy and inspection system
- Patent number 10,422,984
- Issue date Sep 24, 2019
- Applied Materials, Inc.
- Samer Banna
- G02 - OPTICS
Information Patent Grant
Quarter wave light splitting
- Patent number 10,394,130
- Issue date Aug 27, 2019
- Applied Materials, Inc.
- Christopher Dennis Bencher
- G02 - OPTICS
Information Patent Grant
In-situ metrology method for thickness measurement during PECVD pro...
- Patent number 10,281,261
- Issue date May 7, 2019
- Applied Materials, Inc.
- Khokan C. Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Simultaneous multi-spot inspection and imaging
- Patent number 9,989,477
- Issue date Jun 5, 2018
- KLA-Tencor Corporation
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for reducing radiation induced change in semic...
- Patent number 9,978,620
- Issue date May 22, 2018
- Applied Materials, Inc.
- Gary E. Dickerson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring system for deposition and method of operation thereof
- Patent number 9,870,935
- Issue date Jan 16, 2018
- Applied Materials, Inc.
- Edward W. Budiarto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SAMPLE THICKNESS METROLOGY USING FOCUSED BEAM INTERFERENCE
- Publication number 20250012560
- Publication date Jan 9, 2025
- Applied Materials, Inc.
- Venkatakaushik Voleti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Inspection for Enhanced Hybrid Bonding Yield in Advanced...
- Publication number 20240363446
- Publication date Oct 31, 2024
- Venkatakaushik VOLETI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...
- Publication number 20240304430
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metrology system for packaging applications
- Publication number 20240241456
- Publication date Jul 18, 2024
- Venkatakaushik VOLETI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Subsurface alignment metrology system for packaging applications
- Publication number 20240170317
- Publication date May 23, 2024
- Venkatakaushik VOLETI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE ROUGHNESS AND EMISSIVITY DETERMINATION
- Publication number 20240110782
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Eric Chin Hong Ng
- G01 - MEASURING TESTING
Information Patent Application
TIME DELAY INTEGRATION ACQUISITION FOR SPATIAL GENOMICS IMAGING
- Publication number 20240035967
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Joseph R. Johnson
- G01 - MEASURING TESTING
Information Patent Application
MONITORING OF DEPOSITED OR ETCHED FILM THICKNESS USING IMAGE-BASED...
- Publication number 20230169643
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID
- Publication number 20230060205
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...
- Publication number 20230011748
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
IMAGE-BASED IN-SITU PROCESS MONITORING
- Publication number 20220367217
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Guoheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS
- Publication number 20220327725
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SPATIAL PATTERN LOADING MEASUREMENT WITH IMAGING METROLOGY
- Publication number 20220310425
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Eric Chin Hong Ng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID
- Publication number 20220099546
- Publication date Mar 31, 2022
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID
- Publication number 20210372911
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS
- Publication number 20210366143
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY
- Publication number 20210302330
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-SITU, REAL-TIME DETECTION OF PARTICULATE DEFECTS IN A FLUID
- Publication number 20210181084
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD
- Publication number 20210142976
- Publication date May 13, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE DETECTION FOR SUBSTRATE PROCESSING
- Publication number 20210018449
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Todd EGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...
- Publication number 20210005436
- Publication date Jan 7, 2021
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING REFLECTOMETER
- Publication number 20200232916
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
QUARTER WAVE LIGHT SPLITTING
- Publication number 20190339622
- Publication date Nov 7, 2019
- Applied Materials, Inc.
- Christopher Dennis BENCHER
- G02 - OPTICS
Information Patent Application
IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...
- Publication number 20190212128
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Khokan C. PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METROLOGY SYSTEM FOR SUBSTRATE DEFORMATION MEASUREMENT
- Publication number 20190074201
- Publication date Mar 7, 2019
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARTICLE DETECTION FOR SUBSTRATE PROCESSING
- Publication number 20190072497
- Publication date Mar 7, 2019
- Applied Materials, Inc.
- Todd EGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METROLOGY SYSTEMS FOR SUBSTRATE STRESS AND DEFORMATION MEASUREMENT
- Publication number 20190057910
- Publication date Feb 21, 2019
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G02 - OPTICS
Information Patent Application
FLEXIBLE MODE SCANNING OPTICAL MICROSCOPY AND INSPECTION SYSTEM
- Publication number 20180329189
- Publication date Nov 15, 2018
- Applied Materials, Inc.
- Samer Banna
- G02 - OPTICS
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
ENHANCED ILLUMINATION EFFICIENCY IN MASKLESS, PROGRAMMABLE OPTICAL...
- Publication number 20180074311
- Publication date Mar 15, 2018
- Applied Materials, Inc.
- Edward BUDIARTO
- G02 - OPTICS

Mehdi Vaez-Iravani

Person

Patents Grantslast 30 patents

Surface roughness and emissivity determination

Real-time detection of particulate matter during deposition chamber...

Image-based in-situ process monitoring

In-situ, real-time detection of particulate defects in a fluid

Method and apparatus for detection of particle size in a fluid

Image based metrology of surface deformations

Method and apparatus for detection of particle size in a fluid

Multibeamlet charged particle device and method

Systems and methods for inspection of a specimen

Imaging reflectometer

High sensitivity image-based reflectometry

High sensitivity image-based reflectometry

Particle detection for substrate processing

Metrology system for substrate deformation measurement

Particle detection for substrate processing

Imaging reflectometer

Quarter wave light splitting

Digital lithography with extended field size

In-situ metrology method for thickness measurement during PECVD pro...

Monitoring system for deposition and method of operation thereof

Metrology systems with multiple derivative modules for substrate st...

Wafer inspection

Digital lithography with extended depth of focus

Flexible mode scanning optical microscopy and inspection system

Quarter wave light splitting

In-situ metrology method for thickness measurement during PECVD pro...

Simultaneous multi-spot inspection and imaging

Method and apparatus for reducing radiation induced change in semic...

Wafer inspection

Monitoring system for deposition and method of operation thereof

Patents Applicationslast 30 patents

SAMPLE THICKNESS METROLOGY USING FOCUSED BEAM INTERFERENCE

Integrated Inspection for Enhanced Hybrid Bonding Yield in Advanced...

REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...

Metrology system for packaging applications

Subsurface alignment metrology system for packaging applications

SURFACE ROUGHNESS AND EMISSIVITY DETERMINATION

TIME DELAY INTEGRATION ACQUISITION FOR SPATIAL GENOMICS IMAGING

MONITORING OF DEPOSITED OR ETCHED FILM THICKNESS USING IMAGE-BASED...

METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...

IMAGE-BASED IN-SITU PROCESS MONITORING

IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS

SPATIAL PATTERN LOADING MEASUREMENT WITH IMAGING METROLOGY

METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID

METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID

IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS

HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY

IN-SITU, REAL-TIME DETECTION OF PARTICULATE DEFECTS IN A FLUID

MULTIBEAMLET CHARGED PARTICLE DEVICE AND METHOD

PARTICLE DETECTION FOR SUBSTRATE PROCESSING

REAL-TIME DETECTION OF PARTICULATE MATTER DURING DEPOSITION CHAMBER...

IMAGING REFLECTOMETER

QUARTER WAVE LIGHT SPLITTING

IN-SITU METROLOGY METHOD FOR THICKNESS MEASUREMENT DURING PECVD PRO...

METROLOGY SYSTEM FOR SUBSTRATE DEFORMATION MEASUREMENT

PARTICLE DETECTION FOR SUBSTRATE PROCESSING

METROLOGY SYSTEMS FOR SUBSTRATE STRESS AND DEFORMATION MEASUREMENT

FLEXIBLE MODE SCANNING OPTICAL MICROSCOPY AND INSPECTION SYSTEM

Wafer Inspection

ENHANCED ILLUMINATION EFFICIENCY IN MASKLESS, PROGRAMMABLE OPTICAL...