-
-
-
-
-
Three-axis accelerometers
-
Patent number 7,578,189
-
Issue date Aug 25, 2009
-
Qualtre, Inc.
-
Mehran Mehregany
-
B81 - MICRO-STRUCTURAL TECHNOLOGY
-
-
-
-
-
-
-
Micromechanical memory sensor
-
Patent number 5,966,066
-
Issue date Oct 12, 1999
-
Case Western Reserve University
-
Mehran Mehregany
-
G01 - MEASURING TESTING
-
Micromechanical memory sensor
-
Patent number 5,712,609
-
Issue date Jan 27, 1998
-
Case Western Reserve University
-
Mehran Mehregany
-
G01 - MEASURING TESTING
-