This is a continuation-in-part of U.S. Ser. No. 08/783,021 filed Jan. 14, 1997, now U.S. Pat. No. 6,029,337; which is a continuation of U.S. Ser. No. 08/259,079 filed on Jun. 10, 1994, now abandoned; which is a continuation-in-part of U.S. Ser. No. 08/254,920 filed on Jun. 6, 1994, now U.S. Pat. No. 5,705,318 which is hereby incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
4528071 | Glashauser | Jul 1985 | A |
4579616 | Windischmann et al. | Apr 1986 | A |
4677042 | Kato et al. | Jun 1987 | A |
4708919 | Shimkunas et al. | Nov 1987 | A |
4738010 | Ehrfeld et al. | Apr 1988 | A |
4797211 | Ehrfeld et al. | Jan 1989 | A |
4821997 | Zdeblick | Apr 1989 | A |
4824073 | Zdeblick | Apr 1989 | A |
4897360 | Guckel et al. | Jan 1990 | A |
4923772 | Kirch et al. | May 1990 | A |
4943032 | Zdeblick | Jul 1990 | A |
4943750 | Howe et al. | Jul 1990 | A |
4966646 | Zdeblick | Oct 1990 | A |
4996082 | Guckel et al. | Feb 1991 | A |
5013693 | Guckel et al. | May 1991 | A |
5043043 | Howe et al. | Aug 1991 | A |
5045439 | Maner et al. | Sep 1991 | A |
5066533 | America et al. | Nov 1991 | A |
5069419 | Jerman | Dec 1991 | A |
5093594 | Mehregany | Mar 1992 | A |
5162078 | Bley et al. | Nov 1992 | A |
5185056 | Fuentes et al. | Feb 1993 | A |
5189777 | Guckel et al. | Mar 1993 | A |
5190637 | Guckel | Mar 1993 | A |
5206983 | Guckel et al. | May 1993 | A |
5260175 | Kowanz et al. | Nov 1993 | A |
5270125 | America et al. | Dec 1993 | A |
5296775 | Cronin et al. | Mar 1994 | A |
5298367 | Hoessel et al. | Mar 1994 | A |
5334467 | Cronin et al. | Aug 1994 | A |
5342737 | Georger, Jr. et al. | Aug 1994 | A |
5350499 | Shibaike et al. | Sep 1994 | A |
5376506 | Ehrfeld et al. | Dec 1994 | A |
5378583 | Guckel et al. | Jan 1995 | A |
Number | Date | Country |
---|---|---|
510629 | Oct 1992 | EP |
592094 | Apr 1994 | EP |
41-56508 | May 1992 | JP |
43-28715 | Nov 1992 | JP |
51-42405 | Jun 1993 | JP |
60-5455 | Feb 1994 | JP |
Entry |
---|
“Electrically-Activated, Normally-Closed Diaphragm Valves”; Transducers '91, Digest of Technical Papers; Jerman; 1991 International Conference on Solid-State Sensors and Actuators; pp. 1045-1048. |
“Electrically-Activated, Micromachines Diaphragm Valves”; Technical Digest; Jerman; IEEE Solid-State Sensor Workshop, 1990, pp. 65-69. |
“Integrated Movable Micromechanical Structure for Sensors and Actuators”; IEEE Transactions on Electron Devices; Long-Sheng Fan et al.; vol. 35, No. 6; Jun., 1988; pp. 724-730. |
“Micromachines on the March”; IEEE Spectrum; Bryzek et al.; May, 1994; pp. 20-31. |
“Outer Rotor Surface-Micromachines Wobble Micromotor”; IEEE Micro Electro Mechanical Systems; Furuhata et al.; Feb., 1993; pp. 161-1666. |
“Design, Fabrication, and Testing of a Miniature Peristaltic Membrane Pump”; IEEE; Folta et al.; 1992; pp. 186-189. |
“A Simple Fabrication Process for Side-Drive Micromotors”; Digest of Technical Papers; Deng et al.; 7th International Conference of Solid-State Sensors and Actuators; Jun., 1993; pp. 756-759. |
“A Microminiature Electric-to-Fluidic Valve”; Wescon '87 Proceedings; Zdeblick et al.; Nov. 18, 1987; p. 24/4/1-2. |
“A Thermopneumatic Micropump Based on Micro-Engineering Techniques”; Elsevier Sequoia; Van De Pol et al.; Printed in The Netherlands; 1990; pp. 198-202. |
“Outer-rotor Polysilicon Wobble Micromotors”; Proceeding IEEE Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines, and Robotic Systems; Deng et al.; Jan. 25-28, 1994; pp. 269-272. |
Number | Date | Country | |
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Parent | 08/259079 | Jun 1994 | US |
Child | 08/783021 | US |
Number | Date | Country | |
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Parent | 08/783021 | Jan 1997 | US |
Child | 09/333554 | US | |
Parent | 08/254920 | Jun 1994 | US |
Child | 08/259079 | US |