Mei Chang

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,946,135
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 11,887,855
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatuses and methods of protecting nickel and nickel containing...
- Patent number 11,658,014
- Issue date May 23, 2023
- Applied Materials, Inc.
- Pingyan Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature deposition of iridium containing films
- Patent number 11,643,721
- Issue date May 9, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for increasing flux from an ampoule
- Patent number 11,628,456
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Kenric Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a hydrophobic and icephobic coating
- Patent number 11,530,478
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Rajeev Bajaj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for enhancing selectivity of titanium and tit...
- Patent number 11,430,661
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Takashi Kuratomi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a metal gapfill
- Patent number 11,355,391
- Issue date Jun 7, 2022
- Applied Materials, Inc.
- Xi Cen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water assisted highly pure ruthenium thin film deposition
- Patent number 11,293,093
- Issue date Apr 5, 2022
- Applied Materials Inc.
- Feng Q. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for providing uniform flow of gas
- Patent number RE48994
- Issue date Mar 29, 2022
- Applied Materials, Inc.
- Joseph Yudovsky
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 11,133,155
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for increasing flux from an ampoule
- Patent number 11,059,061
- Issue date Jul 13, 2021
- Applied Materials, Inc.
- Kenric Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Methods and apparatus for cryogenic gas stream assisted SAM-based s...
- Patent number 11,033,930
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Chang Ke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tuning work function of p-metal work function films through vapor d...
- Patent number 11,018,009
- Issue date May 25, 2021
- Applied Materials, Inc.
- Guoqiang Jian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
- Patent number 10,985,023
- Issue date Apr 20, 2021
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integration of ALD copper with high temperature PVD copper depositi...
- Patent number 10,892,186
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Ben-Li Sheu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of reducing or eliminating defects in tungsten film
- Patent number 10,879,081
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Guoqiang Jian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature process chamber lid
- Patent number 10,879,090
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Doped tantalum nitride for copper barrier applications
- Patent number 10,784,157
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Annamalai Lakshmanan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure RF-DC sputtering and methods to improve film uniformi...
- Patent number 10,763,090
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Adolph Miller Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods to remove residual precursor inside gas lines...
- Patent number 10,752,990
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alcohol assisted ALD film deposition
- Patent number 10,724,135
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas feedthrough assembly
- Patent number 10,640,870
- Issue date May 5, 2020
- Applied Materials, Inc.
- Daping Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to fill high aspect ratio features on semiconductor substra...
- Patent number 10,600,685
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support assembly
- Patent number 10,593,539
- Issue date Mar 17, 2020
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of cobalt films with high deposition rate
- Patent number 10,559,578
- Issue date Feb 11, 2020
- Applied Materials, Inc.
- Jacqueline S. Wrench
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-limiting and saturating chemical vapor deposition of a silicon...
- Patent number 10,553,425
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Jessica S. Kachian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing semiconductor films
- Patent number 10,535,527
- Issue date Jan 14, 2020
- Applied Materials, Inc.
- Yi Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing metal films using metal oxyhalide precursors
- Patent number 10,483,116
- Issue date Nov 19, 2019
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for depositing metal films with plasma treatment
- Patent number 10,453,657
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Daping Yao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20240200188
- Publication date Jun 20, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS
- Publication number 20230227968
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYDROPHOBIC AND ICEPHOBIC COATING
- Publication number 20230063929
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Rajeev BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...
- Publication number 20220359209
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...
- Publication number 20210319983
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Pingyan LEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR INCREASING FLUX FROM AN AMPOULE
- Publication number 20210308703
- Publication date Oct 7, 2021
- Applied Materials, Inc.
- Kenric Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based S...
- Publication number 20210283650
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Chang Ke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20210225640
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten
- Publication number 20210225655
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Xinyu Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods To Grow Low Resistivity Metal Containing Films
- Publication number 20210123136
- Publication date Apr 29, 2021
- Applied Materials, Inc.
- Lakmal C. Kalutarage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS
- Publication number 20210032753
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Jallepally RAVI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...
- Publication number 20200357616
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Adolph Miller ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING A METAL GAPFILL
- Publication number 20200303250
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Xi CEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROPHOBIC AND ICEPHOBIC COATING
- Publication number 20200299834
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Rajeev BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...
- Publication number 20200211852
- Publication date Jul 2, 2020
- Applied Materials, Inc.
- TAKASHI KURATOMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT
- Publication number 20200020509
- Publication date Jan 16, 2020
- Applied Materials, Inc.
- DAPING YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20200006054
- Publication date Jan 2, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Situ Pre-Clean For Selectivity Improvement For Selective Deposition
- Publication number 20190385838
- Publication date Dec 19, 2019
- Applied Materials, Inc.
- Kai Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Alcohol Assisted ALD Film Deposition
- Publication number 20190368034
- Publication date Dec 5, 2019
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNING WORK FUNCTION OF P-METAL WORK FUNCTION FILMS THROUGH VAPOR D...
- Publication number 20190326120
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Guoqiang JIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based S...
- Publication number 20190210061
- Publication date Jul 11, 2019
- Applied Materials, Inc.
- Chang Ke
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHODS OF REDUCING OR ELIMINATING DEFECTS IN TUNGSTEN FILM
- Publication number 20190157102
- Publication date May 23, 2019
- Applied Materials, Inc.
- GUOQIANG JIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integration Of ALD Copper With High Temperature PVD Copper Depositi...
- Publication number 20190115254
- Publication date Apr 18, 2019
- Applied Materials, Inc.
- Ben-Li Sheu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Depositing Metal Films Using Metal Oxyhalide Precursors
- Publication number 20190088489
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Xinyu Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Temperature Deposition Of Iridium Containing Films
- Publication number 20190078203
- Publication date Mar 14, 2019
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING SEMICONDUCTOR FILMS
- Publication number 20190019684
- Publication date Jan 17, 2019
- Applied Materials, Inc.
- Yi Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition Of Cobalt Films With High Deposition Rate
- Publication number 20180350826
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Jacqueline S. Wrench
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cobalt Oxide Film Deposition
- Publication number 20180340255
- Publication date Nov 29, 2018
- Applied Materials, Inc.
- Jing Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for Increasing Flux from an Ampoule
- Publication number 20180250695
- Publication date Sep 6, 2018
- Applied Materials, Inc.
- Kenric Choi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Person

Patents Grantslast 30 patents

Low temperature deposition of iridium containing films

Methods for depositing fluorine/carbon-free conformal tungsten

Apparatuses and methods of protecting nickel and nickel containing...

Low temperature deposition of iridium containing films

Apparatus for increasing flux from an ampoule

Method for forming a hydrophobic and icephobic coating

Methods and apparatus for enhancing selectivity of titanium and tit...

Method for forming a metal gapfill

Water assisted highly pure ruthenium thin film deposition

Apparatus and method for providing uniform flow of gas

Apparatus for depositing metal films with plasma treatment

Apparatus for increasing flux from an ampoule

Methods and apparatus for cryogenic gas stream assisted SAM-based s...

Tuning work function of p-metal work function films through vapor d...

Methods for depositing fluorine/carbon-free conformal tungsten

Integration of ALD copper with high temperature PVD copper depositi...

Methods of reducing or eliminating defects in tungsten film

High temperature process chamber lid

Doped tantalum nitride for copper barrier applications

High pressure RF-DC sputtering and methods to improve film uniformi...

Apparatus and methods to remove residual precursor inside gas lines...

Alcohol assisted ALD film deposition

Gas feedthrough assembly

Methods to fill high aspect ratio features on semiconductor substra...

Support assembly

Deposition of cobalt films with high deposition rate

Self-limiting and saturating chemical vapor deposition of a silicon...

Methods for depositing semiconductor films

Methods of depositing metal films using metal oxyhalide precursors

Apparatus for depositing metal films with plasma treatment

Patents Applicationslast 30 patents

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

LOW TEMPERATURE DEPOSITION OF IRIDIUM CONTAINING FILMS

HYDROPHOBIC AND ICEPHOBIC COATING

METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...

APPARATUSES AND METHODS OF PROTECTING NICKEL AND NICKEL CONTAINING...

APPARATUS FOR INCREASING FLUX FROM AN AMPOULE

Methods and Apparatus for Cryogenic Gas Stream Assisted SAM-based S...

SUPPORT ASSEMBLY

Methods For Depositing Fluorine/Carbon-Free Conformal Tungsten

Methods To Grow Low Resistivity Metal Containing Films

METHODS AND APPARATUS FOR DUAL CHANNEL SHOWERHEADS

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...

METHOD FOR FORMING A METAL GAPFILL

HYDROPHOBIC AND ICEPHOBIC COATING

METHODS AND APPARATUS FOR ENHANCING SELECTIVITY OF TITANIUM AND TIT...

APPARATUS FOR DEPOSITING METAL FILMS WITH PLASMA TREATMENT

SUPPORT ASSEMBLY

In-Situ Pre-Clean For Selectivity Improvement For Selective Deposition

Alcohol Assisted ALD Film Deposition

TUNING WORK FUNCTION OF P-METAL WORK FUNCTION FILMS THROUGH VAPOR D...

Methods And Apparatus For Cryogenic Gas Stream Assisted SAM-Based S...

METHODS OF REDUCING OR ELIMINATING DEFECTS IN TUNGSTEN FILM

Integration Of ALD Copper With High Temperature PVD Copper Depositi...

Methods of Depositing Metal Films Using Metal Oxyhalide Precursors

Low Temperature Deposition Of Iridium Containing Films

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

METHODS FOR DEPOSITING SEMICONDUCTOR FILMS

Deposition Of Cobalt Films With High Deposition Rate

Cobalt Oxide Film Deposition

Apparatus for Increasing Flux from an Ampoule