Meir Aloni

Person

Herzliya, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Symmetric target design in scatterometry overlay metrology
- Patent number 10,591,406
- Issue date Mar 17, 2020
- KLA-Tencor Corporation
- Barak Bringoltz
- G01 - MEASURING TESTING
Information Patent Grant
Symmetric target design in scatterometry overlay metrology
- Patent number 9,739,702
- Issue date Aug 22, 2017
- KLA-Tencor Corporation
- Barak Bringoltz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase characterization of targets
- Patent number 9,581,430
- Issue date Feb 28, 2017
- KLA-Tencor Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for microscopic inspection of articles
- Patent number 6,360,005
- Issue date Mar 19, 2002
- Applied Materials, Inc.
- Meir Aloni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for comparing and aligning two digital represe...
- Patent number 5,907,628
- Issue date May 25, 1999
- Orbot Instruments Ltd.
- Joel Yolles
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for comparing and aligning two digital represe...
- Patent number 5,619,588
- Issue date Apr 8, 1997
- Orbot Instruments Ltd.
- Joel Yolles
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for inspection of a patterned object by compar...
- Patent number 5,619,429
- Issue date Apr 8, 1997
- Orbot Instruments Ltd.
- Meir Aloni
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for inspection of a patterned object by compar...
- Patent number 5,586,058
- Issue date Dec 17, 1996
- Orbot Instruments Ltd.
- Meir Aloni
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20160216197
- Publication date Jul 28, 2016
- KLA-Tencor Corporation
- Barak Bringoltz
- G02 - OPTICS
Information Patent Application
SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20150204664
- Publication date Jul 23, 2015
- KLA-Tencor Corporation
- Barak Bringoltz
- G01 - MEASURING TESTING
Information Patent Application
PHASE CHARACTERIZATION OF TARGETS
- Publication number 20140111791
- Publication date Apr 24, 2014
- Amnon Manassen
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Symmetric target design in scatterometry overlay metrology

Symmetric target design in scatterometry overlay metrology

Phase characterization of targets

Apparatus and method for microscopic inspection of articles

Apparatus and method for comparing and aligning two digital represe...

Apparatus and method for comparing and aligning two digital represe...

Apparatus and method for inspection of a patterned object by compar...

Apparatus and method for inspection of a patterned object by compar...

Patents Applicationslast 30 patents

SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY

SYMMETRIC TARGET DESIGN IN SCATTEROMETRY OVERLAY METROLOGY

PHASE CHARACTERIZATION OF TARGETS