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Patents Grants
last 30 patents
Information
Patent Grant
Carrying device and semiconductor processing apparatus
Patent number
12,252,776
Issue date
Mar 18, 2025
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Degassing chamber and semiconductor processing apparatus
Patent number
11,328,940
Issue date
May 10, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiang Jia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck and semiconductor equipment
Patent number
11,282,735
Issue date
Mar 22, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Quanyu Shi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetron drive mechanism, magnetron assembly and reaction chamber
Patent number
11,282,682
Issue date
Mar 22, 2022
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing She
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Feeding structure, upper electrode assembly, and physical vapor dep...
Patent number
11,107,665
Issue date
Aug 31, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Yuchun Deng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus
Patent number
10,984,993
Issue date
Apr 20, 2021
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Peng Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Precleaning chamber and plasma processing apparatus
Patent number
10,622,224
Issue date
Apr 14, 2020
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qing She
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process chamber and semiconductor processing apparatus
Patent number
10,347,470
Issue date
Jul 9, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Feng Lv
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Hot plate and substrate processing equipment using the same
Patent number
10,287,686
Issue date
May 14, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Mengxin Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heating chamber and semiconductor processing apparatus
Patent number
10,273,572
Issue date
Apr 30, 2019
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Qiang Jia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR EQUIPMENT
Publication number
20200312692
Publication date
Oct 1, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Quanyu SHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER
Publication number
20200203135
Publication date
Jun 25, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qing SHE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FEEDING STRUCTURE, UPPER ELECTRODE ASSEMBLY, AND PHYSICAL VAPOR DEP...
Publication number
20200135438
Publication date
Apr 30, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yuchun DENG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CARRYING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20200095671
Publication date
Mar 26, 2020
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qing CHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEGASSING METHOD, DEGASSING CHAMBER, AND SEMICONDUCTOR PROCESSING A...
Publication number
20190218660
Publication date
Jul 18, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Hua YE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEGASSING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20190221454
Publication date
Jul 18, 2019
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiang JIA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS
Publication number
20170330769
Publication date
Nov 16, 2017
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qing SHE
B08 - CLEANING
Information
Patent Application
HEATING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20170321319
Publication date
Nov 9, 2017
Beijing NAURA Microelectronics Equipment Co., Ltd.
Qiang JIA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20160329228
Publication date
Nov 10, 2016
Beijing NMC Co., Ltd.
Meng LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
Publication number
20160322206
Publication date
Nov 3, 2016
Beijing NMC Co., Ltd.
Feng LV
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...
Publication number
20160148789
Publication date
May 26, 2016
BEIJING NMC CO., LTD
PENG CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOUR CHAMBER AND SUBSTRATE PROCESSING EQUIPMENT USING SAME
Publication number
20130269614
Publication date
Oct 17, 2013
Beijing NMC Co., Ltd.
Mengxin Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20130256129
Publication date
Oct 3, 2013
Beijing NMC Co., Ltd.
Peng Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...