Mengxin Zhao

Person

Beijing, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Carrying device and semiconductor processing apparatus
- Patent number 12,252,776
- Issue date Mar 18, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Degassing chamber and semiconductor processing apparatus
- Patent number 11,328,940
- Issue date May 10, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qiang Jia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor equipment
- Patent number 11,282,735
- Issue date Mar 22, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Quanyu Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron drive mechanism, magnetron assembly and reaction chamber
- Patent number 11,282,682
- Issue date Mar 22, 2022
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Feeding structure, upper electrode assembly, and physical vapor dep...
- Patent number 11,107,665
- Issue date Aug 31, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yuchun Deng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 10,984,993
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Peng Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Precleaning chamber and plasma processing apparatus
- Patent number 10,622,224
- Issue date Apr 14, 2020
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing She
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and semiconductor processing apparatus
- Patent number 10,347,470
- Issue date Jul 9, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Feng Lv
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hot plate and substrate processing equipment using the same
- Patent number 10,287,686
- Issue date May 14, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Mengxin Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating chamber and semiconductor processing apparatus
- Patent number 10,273,572
- Issue date Apr 30, 2019
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qiang Jia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR EQUIPMENT
- Publication number 20200312692
- Publication date Oct 1, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Quanyu SHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER
- Publication number 20200203135
- Publication date Jun 25, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing SHE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FEEDING STRUCTURE, UPPER ELECTRODE ASSEMBLY, AND PHYSICAL VAPOR DEP...
- Publication number 20200135438
- Publication date Apr 30, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yuchun DENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRYING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20200095671
- Publication date Mar 26, 2020
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEGASSING METHOD, DEGASSING CHAMBER, AND SEMICONDUCTOR PROCESSING A...
- Publication number 20190218660
- Publication date Jul 18, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hua YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEGASSING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20190221454
- Publication date Jul 18, 2019
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qiang JIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS
- Publication number 20170330769
- Publication date Nov 16, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qing SHE
- B08 - CLEANING
Information Patent Application
HEATING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20170321319
- Publication date Nov 9, 2017
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Qiang JIA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20160329228
- Publication date Nov 10, 2016
- Beijing NMC Co., Ltd.
- Meng LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20160322206
- Publication date Nov 3, 2016
- Beijing NMC Co., Ltd.
- Feng LV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...
- Publication number 20160148789
- Publication date May 26, 2016
- BEIJING NMC CO., LTD
- PENG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOUR CHAMBER AND SUBSTRATE PROCESSING EQUIPMENT USING SAME
- Publication number 20130269614
- Publication date Oct 17, 2013
- Beijing NMC Co., Ltd.
- Mengxin Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20130256129
- Publication date Oct 3, 2013
- Beijing NMC Co., Ltd.
- Peng Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mengxin Zhao

Person

Patents Grantslast 30 patents

Carrying device and semiconductor processing apparatus

Degassing chamber and semiconductor processing apparatus

Electrostatic chuck and semiconductor equipment

Magnetron drive mechanism, magnetron assembly and reaction chamber

Feeding structure, upper electrode assembly, and physical vapor dep...

Plasma processing apparatus

Precleaning chamber and plasma processing apparatus

Process chamber and semiconductor processing apparatus

Hot plate and substrate processing equipment using the same

Heating chamber and semiconductor processing apparatus

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK AND SEMICONDUCTOR EQUIPMENT

MAGNETRON DRIVE MECHANISM, MAGNETRON ASSEMBLY AND REACTION CHAMBER

FEEDING STRUCTURE, UPPER ELECTRODE ASSEMBLY, AND PHYSICAL VAPOR DEP...

CARRYING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS

DEGASSING METHOD, DEGASSING CHAMBER, AND SEMICONDUCTOR PROCESSING A...

DEGASSING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS

PRECLEANING CHAMBER AND PLASMA PROCESSING APPARATUS

HEATING CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS

CASSETTE POSITIONING DEVICE AND SEMICONDUCTOR PROCESSING APPARATUS

PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING APPARATUS

PRE-CLEANING CHAMBER AND A SEMICONDUCTOR PROCESSING APPARATUS CONTA...

VAPOUR CHAMBER AND SUBSTRATE PROCESSING EQUIPMENT USING SAME

PLASMA PROCESSING APPARATUS