Michael B. Binnard

Person

Balmont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system with curved 1d-patterned mask for use in EUV-ex...
- Patent number 11,300,884
- Issue date Apr 12, 2022
- Nikon Corporation
- Daniel Gene Smith
- G02 - OPTICS
Information Patent Grant
Euv lithography system for dense line patterning
- Patent number 11,099,483
- Issue date Aug 24, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Power minimizing controller for a stage assembly
- Patent number 11,075,573
- Issue date Jul 27, 2021
- Nikon Research Corporation of America
- Neyram Hemati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dense line extreme ultraviolet lithography system with distortion m...
- Patent number 11,067,900
- Issue date Jul 20, 2021
- NIKON CORPORATION
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High-resolution position encoder with image sensor and encoded targ...
- Patent number 11,061,338
- Issue date Jul 13, 2021
- NIKON CORPORATION
- Jonathan Kyle Wells
- G01 - MEASURING TESTING
Information Patent Grant
EUV lithography system for dense line patterning
- Patent number 10,890,849
- Issue date Jan 12, 2021
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system using surface pattern recognition and interpolation
- Patent number 10,884,344
- Issue date Jan 5, 2021
- NIKON CORPORATION
- Paul Derek Coon
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Extreme ultraviolet lithography system that utilizes pattern stitching
- Patent number 10,747,117
- Issue date Aug 18, 2020
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dense line extreme ultraviolet lithography system with distortion m...
- Patent number 10,712,671
- Issue date Jul 14, 2020
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for control of a workpiece and a chuck
- Patent number 10,394,138
- Issue date Aug 27, 2019
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet lithography system that utilizes pattern stitching
- Patent number 10,295,911
- Issue date May 21, 2019
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microelectromechanical mirror assembly
- Patent number 10,254,654
- Issue date Apr 9, 2019
- Nikon Corporation
- Shane R. Palmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Power minimizing controller for a stage assembly
- Patent number 10,084,364
- Issue date Sep 25, 2018
- Nikon Research Corporation of America
- Neyram Hemati
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Array of encoders for alignment measurement
- Patent number 10,078,269
- Issue date Sep 18, 2018
- Nikon Corporation
- Eric Peter Goodwin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 9,946,163
- Issue date Apr 17, 2018
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic sensor calibration and servo for planar motor stage
- Patent number 9,921,495
- Issue date Mar 20, 2018
- Nikon Corporation
- Pai-Hsueh Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microelectromechanical mirror assembly
- Patent number 9,874,817
- Issue date Jan 23, 2018
- Nikon Corporation
- Shane R. Palmer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for controlling a temperature of a reaction assembly
- Patent number 9,778,579
- Issue date Oct 3, 2017
- Nikon Corporation
- Michel Pharand
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system using surface pattern recognition and interpolation
- Patent number 9,726,987
- Issue date Aug 8, 2017
- Nikon Corporation
- Paul Derek Coon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods for limiting counter-mass trim-motor force and stage assemb...
- Patent number 9,529,353
- Issue date Dec 27, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 9,500,960
- Issue date Nov 22, 2016
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a commutation offset and for determining a c...
- Patent number 9,465,305
- Issue date Oct 11, 2016
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 9,329,493
- Issue date May 3, 2016
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for maintaining immersion fluid in the gap under the proj...
- Patent number 9,081,298
- Issue date Jul 14, 2015
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determing a commutation offset and for determining a com...
- Patent number 9,013,134
- Issue date Apr 21, 2015
- Nikon Corporation
- Pai-Hsueh Yang
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 8,879,047
- Issue date Nov 4, 2014
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control systems and methods for compensating for effects of a stage...
- Patent number 8,853,988
- Issue date Oct 7, 2014
- Nikon Corporation
- Michael B. Binnard
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 8,848,166
- Issue date Sep 30, 2014
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for maintaining immersion fluid in the gap und...
- Patent number 8,848,168
- Issue date Sep 30, 2014
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High NA catadioptric imaging optics for imaging A reticle to a pair...
- Patent number 8,705,170
- Issue date Apr 22, 2014
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING MACHINE WITH ACTIVE VIBRATION REDUCTION
- Publication number 20230381978
- Publication date Nov 30, 2023
- Nikon Corporation
- Michael Birk BINNARD
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROCESSING SYSTEM
- Publication number 20230264266
- Publication date Aug 24, 2023
- Nikon Corporation
- Toshimitsu KURAMI
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ANALYZER SYSTEM FOR ALIGNING AND FOCUSING AN ENERGY BEAM IN A THREE...
- Publication number 20230081971
- Publication date Mar 16, 2023
- Nikon Corporation
- Michael Birk Binnard
- B22 - CASTING POWDER METALLURGY
Information Patent Application
ADDITIVE MANUFACTURING SYSTEM WITH LOCALIZED CONTROLLED ENVIRONMENT
- Publication number 20220288855
- Publication date Sep 15, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
VARIABLE MATERIAL DEPOSITION AREA FOR MATERIAL SUPPLY DEVICE WITHIN...
- Publication number 20220288694
- Publication date Sep 15, 2022
- Nikon Corporation
- Michael Birk Binnard
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METROLOGY FOR ADDITIVE MANUFACTURING
- Publication number 20220252392
- Publication date Aug 11, 2022
- Nikon Corporation
- Eric Peter Goodwin
- B22 - CASTING POWDER METALLURGY
Information Patent Application
NON-COAXIAL ROTATING TURNTABLES FOR ADDITIVE MANUFACTURING
- Publication number 20220212263
- Publication date Jul 7, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B22 - CASTING POWDER METALLURGY
Information Patent Application
VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS
- Publication number 20220112934
- Publication date Apr 14, 2022
- Nikon Corporation
- Alton Hugh Phillips
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VIBRATION REDUCTION ASSEMBLY WITH A GRAVITY ALIGNED REDUCTION SYSTEM
- Publication number 20220111540
- Publication date Apr 14, 2022
- Nikon Corporation
- Michael Birk Binnard
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
BALANCED ACTIVE STABILIZERS
- Publication number 20220113487
- Publication date Apr 14, 2022
- Nikon Corporation
- Yoon Jung Jeong
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
VIBRATION REDUCTION SYSTEM FOR PRECISION ROBOTICS APPLICATIONS
- Publication number 20220111521
- Publication date Apr 14, 2022
- Nikon Corporation
- Michael Birk Binnard
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXPANDABLE BARRIER ACTUATED VALVE
- Publication number 20220057017
- Publication date Feb 24, 2022
- Alex Ka Tim Poon
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
ROTATING ENERGY BEAM FOR THREE-DIMENSIONAL PRINTER
- Publication number 20200361142
- Publication date Nov 19, 2020
- Nikon Corporation
- Michael Birk Binnard
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
ADDITIVE MANUFACTURING SYSTEM WITH ROTARY POWDER BED
- Publication number 20200346407
- Publication date Nov 5, 2020
- Nikon Corporation
- Eric Peter Goodwin
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...
- Publication number 20200326633
- Publication date Oct 15, 2020
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT OF A CHANGE IN A GEOMETRICAL CHARACTERISTIC AND/OR POSI...
- Publication number 20200232786
- Publication date Jul 23, 2020
- Nikon Corporation
- Daniel Gene Smith
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EX...
- Publication number 20200073251
- Publication date Mar 5, 2020
- Nikon Corporation
- Daniel Gene Smith
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING
- Publication number 20190235393
- Publication date Aug 1, 2019
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...
- Publication number 20190212663
- Publication date Jul 11, 2019
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POWER MINIMIZING CONTROLLER FOR A STAGE ASSEMBLY
- Publication number 20190020257
- Publication date Jan 17, 2019
- Nikon Research Corporation of America
- Neyram Hemati
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UND...
- Publication number 20180231898
- Publication date Aug 16, 2018
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH-RESOLUTION POSITION ENCODER WITH IMAGE SENSOR AND ENCODED TARG...
- Publication number 20180217510
- Publication date Aug 2, 2018
- Nikon Corporation
- J. Kyle Wells
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROELECTROMECHANICAL MIRROR ASSEMBLY
- Publication number 20180107121
- Publication date Apr 19, 2018
- NIKON CORPORATION
- Shane R. Palmer
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR CONTROL OF A WORKPIECE AND A CHUCK
- Publication number 20180074417
- Publication date Mar 15, 2018
- NIKON CORPORATION
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING
- Publication number 20170336715
- Publication date Nov 23, 2017
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING
- Publication number 20170336716
- Publication date Nov 23, 2017
- Nikon Corporation
- Donis G. Flagello
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING
- Publication number 20170336720
- Publication date Nov 23, 2017
- Nikon Corporation
- Michael B. Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POSITIONING SYSTEM USING SURFACE PATTERN RECOGNITION AND INTERPOLATION
- Publication number 20170329236
- Publication date Nov 16, 2017
- Nikon Corporation
- Paul Derek Coon
- G01 - MEASURING TESTING
Information Patent Application
ARRAY OF ENCODERS FOR ALIGNMENT MEASUREMENT
- Publication number 20170097574
- Publication date Apr 6, 2017
- Nikon Corporation
- ERIC PETER GOODWIN
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UND...
- Publication number 20160238948
- Publication date Aug 18, 2016
- Nikon Corporation
- Michael Binnard
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michael B. Binnard

Person

Patents Grantslast 30 patents

Illumination system with curved 1d-patterned mask for use in EUV-ex...

Euv lithography system for dense line patterning

Power minimizing controller for a stage assembly

Dense line extreme ultraviolet lithography system with distortion m...

High-resolution position encoder with image sensor and encoded targ...

EUV lithography system for dense line patterning

Positioning system using surface pattern recognition and interpolation

Extreme ultraviolet lithography system that utilizes pattern stitching

Dense line extreme ultraviolet lithography system with distortion m...

System and method for control of a workpiece and a chuck

Extreme ultraviolet lithography system that utilizes pattern stitching

Microelectromechanical mirror assembly

Power minimizing controller for a stage assembly

Array of encoders for alignment measurement

Apparatus and method for maintaining immersion fluid in the gap und...

Magnetic sensor calibration and servo for planar motor stage

Microelectromechanical mirror assembly

System and method for controlling a temperature of a reaction assembly

Positioning system using surface pattern recognition and interpolation

Methods for limiting counter-mass trim-motor force and stage assemb...

Apparatus and method for maintaining immersion fluid in the gap und...

Method for determining a commutation offset and for determining a c...

Apparatus and method for maintaining immersion fluid in the gap und...

Apparatus for maintaining immersion fluid in the gap under the proj...

Method for determing a commutation offset and for determining a com...

Apparatus and method for maintaining immersion fluid in the gap und...

Control systems and methods for compensating for effects of a stage...

Apparatus and method for maintaining immersion fluid in the gap und...

Apparatus and method for maintaining immersion fluid in the gap und...

High NA catadioptric imaging optics for imaging A reticle to a pair...

Patents Applicationslast 30 patents

PROCESSING MACHINE WITH ACTIVE VIBRATION REDUCTION

PROCESSING SYSTEM

ANALYZER SYSTEM FOR ALIGNING AND FOCUSING AN ENERGY BEAM IN A THREE...

ADDITIVE MANUFACTURING SYSTEM WITH LOCALIZED CONTROLLED ENVIRONMENT

VARIABLE MATERIAL DEPOSITION AREA FOR MATERIAL SUPPLY DEVICE WITHIN...

METROLOGY FOR ADDITIVE MANUFACTURING

NON-COAXIAL ROTATING TURNTABLES FOR ADDITIVE MANUFACTURING

VIBRATION ISOLATION SYSTEMS WITH REACTION MASSES AND ACTUATORS

VIBRATION REDUCTION ASSEMBLY WITH A GRAVITY ALIGNED REDUCTION SYSTEM

BALANCED ACTIVE STABILIZERS

VIBRATION REDUCTION SYSTEM FOR PRECISION ROBOTICS APPLICATIONS

EXPANDABLE BARRIER ACTUATED VALVE

ROTATING ENERGY BEAM FOR THREE-DIMENSIONAL PRINTER

ADDITIVE MANUFACTURING SYSTEM WITH ROTARY POWDER BED

DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...

MEASUREMENT OF A CHANGE IN A GEOMETRICAL CHARACTERISTIC AND/OR POSI...

ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EX...

EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING

DENSE LINE EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM WITH DISTORTION M...

POWER MINIMIZING CONTROLLER FOR A STAGE ASSEMBLY

APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UND...

HIGH-RESOLUTION POSITION ENCODER WITH IMAGE SENSOR AND ENCODED TARG...

MICROELECTROMECHANICAL MIRROR ASSEMBLY

SYSTEM AND METHOD FOR CONTROL OF A WORKPIECE AND A CHUCK

EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING

EUV LITHOGRAPHY SYSTEM FOR DENSE LINE PATTERNING

EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEM THAT UTILIZES PATTERN STITCHING

POSITIONING SYSTEM USING SURFACE PATTERN RECOGNITION AND INTERPOLATION

ARRAY OF ENCODERS FOR ALIGNMENT MEASUREMENT

APPARATUS AND METHOD FOR MAINTAINING IMMERSION FLUID IN THE GAP UND...