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Michael C. Sarin
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Phoenix, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for mass flow controller verification
Patent number
9,169,975
Issue date
Oct 27, 2015
ASM IP Holding B.V.
Michael Christopher Sarin
F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
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Patent Grant
Closed loop method and apparatus for preventing exhausted reactant...
Patent number
5,118,286
Issue date
Jun 2, 1992
Amtech Systems
Michael C. Sarin
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD RELATED TO REACTION CHAMBER WITH SHUTTER SYSTEM
Publication number
20160340780
Publication date
Nov 24, 2016
ASM IP HOLDING B.V.
Paul Swan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SYSTEMS AND METHODS FOR MASS FLOW CONTROLLER VERIFICATION
Publication number
20140060147
Publication date
Mar 6, 2014
ASM IP HOLDING B.V.
Michael Christopher Sarin
G01 - MEASURING TESTING