Michael D. Robbins

Person

Round Rock, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Automatic wafer edge inspection and review system
- Patent number 7,508,504
- Issue date Mar 24, 2009
- Accretech USA, Inc.
- Ju Jin
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for shaping thin films in the near-edge regions of in-pro...
- Patent number 6,936,546
- Issue date Aug 30, 2005
- Accretech USA, Inc.
- Michael D. Robbins
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Method for Wafer Edge Exclusion Measurement
- Publication number 20090122304
- Publication date May 14, 2009
- Accretech USA, Inc.
- Ju Jin
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Method for Wafer Edge Defects Detection
- Publication number 20090116727
- Publication date May 7, 2009
- Accretech USA, Inc.
- Ju Jin
- G01 - MEASURING TESTING
Information Patent Application
Wafer processing apparatus and method
- Publication number 20080190558
- Publication date Aug 14, 2008
- Accretech USA, Inc.
- Joel Brad Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Automatic wafer edge inspection and review system
- Publication number 20080030731
- Publication date Feb 7, 2008
- Accretech USA, Inc.
- Ju Jin
- G01 - MEASURING TESTING
Information Patent Application
Clean ignition system for wafer substrate processing
- Publication number 20080017316
- Publication date Jan 24, 2008
- Accretech USA, Inc.
- Joel Brad Bailey
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for cleaning a wafer substrate
- Publication number 20080010845
- Publication date Jan 17, 2008
- Accretech USA, Inc.
- Joel Brad Bailey
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for cleaning a wafer substrate
- Publication number 20080011332
- Publication date Jan 17, 2008
- Accretech USA, Inc.
- Joel Brad Bailey
- G01 - MEASURING TESTING
Information Patent Application
Processing chamber having labyrinth seal
- Publication number 20080011421
- Publication date Jan 17, 2008
- Accretech USA, Inc.
- Joel Brad Bailey
- G01 - MEASURING TESTING
Information Patent Application
Substrate illumination and inspection system
- Publication number 20070258085
- Publication date Nov 8, 2007
- Michael D. Robbins
- G01 - MEASURING TESTING
Information Patent Application
Substrate processing method and apparatus using a combustion flame
- Publication number 20070066076
- Publication date Mar 22, 2007
- Joel B. Bailey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for isolative substrate edge area processing
- Publication number 20070062647
- Publication date Mar 22, 2007
- Joel B. Bailey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for shaping thin films in the near-edge regions of in-proces...
- Publication number 20050205518
- Publication date Sep 22, 2005
- Michael D. Robbins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for shaping thin films in the near-edge region...
- Publication number 20030203650
- Publication date Oct 30, 2003
- Michael D. Robbins
- H01 - BASIC ELECTRIC ELEMENTS

Michael D. Robbins

Person

Patents Grantslast 30 patents

Automatic wafer edge inspection and review system

Apparatus for shaping thin films in the near-edge regions of in-pro...

Patents Applicationslast 30 patents

Apparatus and Method for Wafer Edge Exclusion Measurement

Apparatus and Method for Wafer Edge Defects Detection

Wafer processing apparatus and method

Automatic wafer edge inspection and review system

Clean ignition system for wafer substrate processing

Apparatus for cleaning a wafer substrate

Method and apparatus for cleaning a wafer substrate

Processing chamber having labyrinth seal

Substrate illumination and inspection system

Substrate processing method and apparatus using a combustion flame

Method and apparatus for isolative substrate edge area processing

Method for shaping thin films in the near-edge regions of in-proces...

Method and apparatus for shaping thin films in the near-edge region...