Michael Heiden

Person

Woelfersheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Device for determining the position of at least one structure on an...
- Patent number 8,582,113
- Issue date Nov 12, 2013
- KLA-Tencor MIE GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Element for homogenizing the illumination with simultaneous setting...
- Patent number 8,390,927
- Issue date Mar 5, 2013
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G02 - OPTICS
Information Patent Grant
Apparatus for the optical inspection of wafers
- Patent number 8,305,587
- Issue date Nov 6, 2012
- KLA-Tencor MIE GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for automatic detection of incorrect measurements...
- Patent number 8,154,595
- Issue date Apr 10, 2012
- Vistec Semiconductor Systems Jena GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring structures on a mask and or for...
- Patent number 8,102,541
- Issue date Jan 24, 2012
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for determining the centrality of masks
- Patent number 7,986,409
- Issue date Jul 26, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
System and method for determining positions of structures on a subs...
- Patent number 7,978,340
- Issue date Jul 12, 2011
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Coordinate measuring machine for measuring structures on a substrate
- Patent number 7,961,334
- Issue date Jun 14, 2011
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Method for reproducibly determining geometrical and/or optical obje...
- Patent number 7,939,789
- Issue date May 10, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Coordinate measuring machine and a method for correcting non-linear...
- Patent number 7,929,149
- Issue date Apr 19, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Device for determining the position of at least one structure on an...
- Patent number 7,903,259
- Issue date Mar 8, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Coordinate measuring machine and method for structured illumination...
- Patent number 7,889,338
- Issue date Feb 15, 2011
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for determining an optical property of a mask
- Patent number 7,864,319
- Issue date Jan 4, 2011
- Vistec Semiconductor System GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Grant
Method for correcting measuring errors caused by the lens distortio...
- Patent number 7,769,556
- Issue date Aug 3, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for eliminating sources of error in the system correction of...
- Patent number 7,694,426
- Issue date Apr 13, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for correcting an error of the imaging system of a coordinat...
- Patent number 7,680,616
- Issue date Mar 16, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Method for improving the reproducibility of a coordinate measuring...
- Patent number 7,654,007
- Issue date Feb 2, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for supplying short-wavelength light
- Patent number 7,602,824
- Issue date Oct 13, 2009
- Leica Microsystems CMS GmbH
- Michael Heiden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for illuminating and inspecting a surface
- Patent number 7,561,263
- Issue date Jul 14, 2009
- Vistec Semiconductor Systems GmbH
- Lambert Danner
- G02 - OPTICS
Information Patent Grant
Apparatus and method of inspecting the surface of a wafer
- Patent number 7,545,489
- Issue date Jun 9, 2009
- Vistec Semiconductor Systems GmbH
- Wolfgang Sulik
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting an edge bead removal line on a wafer
- Patent number 7,382,450
- Issue date Jun 3, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Device for Determining the Position of at Least One Structure on an...
- Publication number 20120320382
- Publication date Dec 20, 2012
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining the Position of at Least One Structure on an...
- Publication number 20120033691
- Publication date Feb 9, 2012
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining the Position of at Least One Structure on an...
- Publication number 20120033230
- Publication date Feb 9, 2012
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for the optical inspection of wafers
- Publication number 20110090483
- Publication date Apr 21, 2011
- KLA-TENCOR MIE GMBH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining the Position of at Least One Structure on an...
- Publication number 20100110449
- Publication date May 6, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for determining the focus position
- Publication number 20100060883
- Publication date Mar 11, 2010
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION...
- Publication number 20090279080
- Publication date Nov 12, 2009
- Vistec Semiconductor Systems GmbH
- Lambert Danner
- G01 - MEASURING TESTING
Information Patent Application
Dark Field Objective for a Microscope
- Publication number 20090225414
- Publication date Sep 10, 2009
- Michael Heiden
- G02 - OPTICS
Information Patent Application
Method for determining the centrality of masks
- Publication number 20090097041
- Publication date Apr 16, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELE...
- Publication number 20090073458
- Publication date Mar 19, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device and method for determining an optical property of a mask
- Publication number 20090066955
- Publication date Mar 12, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Arrangement and method for improving the measurement accuracy in th...
- Publication number 20090066970
- Publication date Mar 12, 2009
- MueTec Automatisierte Mikroskopie und Messtechnik GmbH
- Gerd Scheuring
- G01 - MEASURING TESTING
Information Patent Application
Method for correcting measuring errors caused by the lens distortio...
- Publication number 20090070059
- Publication date Mar 12, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN T...
- Publication number 20090051932
- Publication date Feb 26, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Method for reproducibly determining object characteristics
- Publication number 20090045318
- Publication date Feb 19, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
COORDINATE MEASURING MACHINE AND A METHOD FOR CORRECTING NON-LINEAR...
- Publication number 20090040530
- Publication date Feb 12, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Coordinate measuring machine for measuring structures on a substrate
- Publication number 20090031572
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
System and method for determining positions of structures on a subs...
- Publication number 20090033508
- Publication date Feb 5, 2009
- Vistec Semiconductor Systems GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
Method for correcting an error of the imaging system of a coordinat...
- Publication number 20090024344
- Publication date Jan 22, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTI...
- Publication number 20090015833
- Publication date Jan 15, 2009
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Element for homogenizing the illumination with simultaneous setting...
- Publication number 20080304152
- Publication date Dec 11, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G02 - OPTICS
Information Patent Application
Coordinate measuring machine and method for structured illumination...
- Publication number 20080304058
- Publication date Dec 11, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Method for improving the reproducibility of a coordinate measuring...
- Publication number 20080295348
- Publication date Dec 4, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS...
- Publication number 20080202201
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems Jena GmbH
- Hans-Artur Boesser
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING STRUCTURES ON A MASK AND OR FOR...
- Publication number 20080204735
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR ELIMINATING SOURCES OF ERROR IN THE SYSTEM CORRECTION OF...
- Publication number 20080201971
- Publication date Aug 28, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Device for Determining the Position of at Least One Structure on an...
- Publication number 20080192264
- Publication date Aug 14, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for measuring the height profile of a structur...
- Publication number 20080031509
- Publication date Feb 7, 2008
- Vistec Semiconductor Systems GmbH
- Michael Heiden
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for illuminating and inspecting a surface
- Publication number 20070159700
- Publication date Jul 12, 2007
- Vistec Semiconductor Systems GmbH
- Lambart Danner
- G02 - OPTICS
Information Patent Application
APPARATUS AND METHOD OF INSPECTING THE SURFACE OF A WAFER
- Publication number 20070052954
- Publication date Mar 8, 2007
- Vistec Semiconductor Systems GmbH
- Wolfgang Sulik
- G01 - MEASURING TESTING

Michael Heiden

Person

Patents Grantslast 30 patents

Device for determining the position of at least one structure on an...

Element for homogenizing the illumination with simultaneous setting...

Apparatus for the optical inspection of wafers

Device and method for automatic detection of incorrect measurements...

Apparatus and method for measuring structures on a mask and or for...

Method for determining the centrality of masks

System and method for determining positions of structures on a subs...

Coordinate measuring machine for measuring structures on a substrate

Method for reproducibly determining geometrical and/or optical obje...

Coordinate measuring machine and a method for correcting non-linear...

Device for determining the position of at least one structure on an...

Coordinate measuring machine and method for structured illumination...

Device and method for determining an optical property of a mask

Method for correcting measuring errors caused by the lens distortio...

Method for eliminating sources of error in the system correction of...

Method for correcting an error of the imaging system of a coordinat...

Method for improving the reproducibility of a coordinate measuring...

Device and method for supplying short-wavelength light

Apparatus for illuminating and inspecting a surface

Apparatus and method of inspecting the surface of a wafer

Method of detecting an edge bead removal line on a wafer

Patents Applicationslast 30 patents

Device for Determining the Position of at Least One Structure on an...

Device for Determining the Position of at Least One Structure on an...

Device for Determining the Position of at Least One Structure on an...

Apparatus for the optical inspection of wafers

Device for Determining the Position of at Least One Structure on an...

Apparatus and method for determining the focus position

DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION...

Dark Field Objective for a Microscope

Method for determining the centrality of masks

MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELE...

Device and method for determining an optical property of a mask

Arrangement and method for improving the measurement accuracy in th...

Method for correcting measuring errors caused by the lens distortio...

METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN T...

Method for reproducibly determining object characteristics

COORDINATE MEASURING MACHINE AND A METHOD FOR CORRECTING NON-LINEAR...

Coordinate measuring machine for measuring structures on a substrate

System and method for determining positions of structures on a subs...

Method for correcting an error of the imaging system of a coordinat...

DEVICE AND METHOD FOR IMPROVING THE MEASUREMENT ACCURACY IN AN OPTI...

Element for homogenizing the illumination with simultaneous setting...

Coordinate measuring machine and method for structured illumination...

Method for improving the reproducibility of a coordinate measuring...

DEVICE AND METHOD FOR AUTOMATIC DETECTION OF INCORRECT MEASUREMENTS...

APPARATUS AND METHOD FOR MEASURING STRUCTURES ON A MASK AND OR FOR...

METHOD FOR ELIMINATING SOURCES OF ERROR IN THE SYSTEM CORRECTION OF...

Device for Determining the Position of at Least One Structure on an...

Apparatus and method for measuring the height profile of a structur...

Apparatus for illuminating and inspecting a surface

APPARATUS AND METHOD OF INSPECTING THE SURFACE OF A WAFER