Michael J. Berg

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Mechanicsville, VA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for high-resolution in-situ plasma etching of...
- Patent number 6,798,065
- Issue date Sep 28, 2004
- Newport Fab, LLC
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for high-resolution in-situ plasma etching of inorganic a...
- Patent number 6,328,848
- Issue date Dec 11, 2001
- Conexant Systems, Inc.
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for high-resolution in-situ plasma etching of...
- Patent number 6,291,361
- Issue date Sep 18, 2001
- Conexant Systems, Inc.
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for high-resolution in-situ plasma etching of...
- Publication number 20020016071
- Publication date Feb 7, 2002
- Shao-Wen Hsia
- H01 - BASIC ELECTRIC ELEMENTS