Michael J. Berman

Person

Tucson, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integration of distributed thermoelectric heating and cooling
- Patent number 10,571,162
- Issue date Feb 25, 2020
- Tempronics, Inc.
- Tarek Makansi
- A41 - WEARING APPAREL
Information Patent Grant
Medical, topper, pet wireless, and automated manufacturing of distr...
- Patent number 9,638,442
- Issue date May 2, 2017
- Tempronics, Inc.
- Tarek Makansi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Integration of distributed thermoelectric heating and cooling
- Patent number 9,596,944
- Issue date Mar 21, 2017
- Tempronics, Inc.
- Tarek Makansi
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Method for heat dissipation on semiconductor device
- Patent number 8,653,357
- Issue date Feb 18, 2014
- LSI Corporation
- Zachary A. Prather
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for heat dissipation on semiconductor device
- Patent number 8,404,960
- Issue date Mar 26, 2013
- LSI Corporation
- Zachary A. Prather
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determination of film thickness during chemical mechanical polishing
- Patent number 7,751,609
- Issue date Jul 6, 2010
- LSI Logic Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Visual wear confirmation polishing pad
- Patent number 7,442,113
- Issue date Oct 28, 2008
- LSI Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method to improve the resolution of photolithography...
- Patent number 7,381,502
- Issue date Jun 3, 2008
- LSI Logic Corporation
- Michael Jay Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electroplating tool for semiconductor manufacture having electric f...
- Patent number 7,332,062
- Issue date Feb 19, 2008
- LSI Logic Corporation
- Steven E. Reder
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Optical error minimization in a semiconductor manufacturing apparatus
- Patent number 7,298,458
- Issue date Nov 20, 2007
- LSI Corporation
- Michael J. Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to monitor pad wear in CMP processing
- Patent number 7,198,546
- Issue date Apr 3, 2007
- LSI Logic Corporation
- Michael Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Contact resistance device for improved process control
- Patent number 7,183,787
- Issue date Feb 27, 2007
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical error minimization in a semiconductor manufacturing apparatus
- Patent number 7,098,996
- Issue date Aug 29, 2006
- LSI Logic Corporation
- Michael J. Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pad conditioner setup
- Patent number 7,081,037
- Issue date Jul 25, 2006
- LSI Logic Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Method to improve the control of electro-polishing by use of a plat...
- Patent number 7,067,048
- Issue date Jun 27, 2006
- LSI Logic Corporation
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Dual source lithography for direct write application
- Patent number 7,023,530
- Issue date Apr 4, 2006
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanism for improving the structural integrity of low-k films
- Patent number 6,982,206
- Issue date Jan 3, 2006
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus to add slurry to a polishing system
- Patent number 6,979,251
- Issue date Dec 27, 2005
- LSI Logic Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Method and control system for improving CMP process by detecting an...
- Patent number 6,971,944
- Issue date Dec 6, 2005
- LSI Logic Corporation
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for detecting backside contamination during fa...
- Patent number 6,943,055
- Issue date Sep 13, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical electropolishing system
- Patent number 6,927,177
- Issue date Aug 9, 2005
- LSI Logic Corporation
- Steven E. Reder
- B24 - GRINDING POLISHING
Information Patent Grant
Method to improve the control of source chemicals delivery by a car...
- Patent number 6,917,430
- Issue date Jul 12, 2005
- LSI Logic Corporation
- Michael Berman
- G01 - MEASURING TESTING
Information Patent Grant
Dual source lithography for direct write application
- Patent number 6,894,762
- Issue date May 17, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical error minimization in a semiconductor manufacturing apparatus
- Patent number 6,885,436
- Issue date Apr 26, 2005
- LSI Logic Corporation
- Michael J. Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to use a laser to perform the edge clean operation on a semi...
- Patent number 6,874,510
- Issue date Apr 5, 2005
- LSI Logic Corporation
- Steven Reder
- B08 - CLEANING
Information Patent Grant
Laminate low K film
- Patent number 6,869,893
- Issue date Mar 22, 2005
- LSI Logic Corporation
- Steven Reder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method to improve the resolution of photolithography...
- Patent number 6,866,970
- Issue date Mar 15, 2005
- LSI Logic Corporation
- Michael Jay Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for using film deposition techniques to provide a...
- Patent number 6,849,936
- Issue date Feb 1, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning deposited films from the edge of...
- Patent number 6,837,967
- Issue date Jan 4, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing water vapor as a byproduct of che...
- Patent number 6,831,022
- Issue date Dec 14, 2004
- LSI Logic Corporation
- Robert D. Broyles
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING
- Publication number 20220128276
- Publication date Apr 28, 2022
- TEMPRONICS, INC.
- Tarek Makansi
- A41 - WEARING APPAREL
Information Patent Application
INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING
- Publication number 20200326107
- Publication date Oct 15, 2020
- TEMPRONICS, INC.
- Tarek Makansi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
METHODS AND SYSTEMS FOR DISTRIBUTED THERMOELECTRIC HEATING AND COOLING
- Publication number 20170261241
- Publication date Sep 14, 2017
- TEMPRONICS, INC.
- Tarek Makansi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING
- Publication number 20170159980
- Publication date Jun 8, 2017
- TEMPRONICS, INC.
- Tarek Makansi
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
MEDICAL, TOPPER, PET WIRELESS, AND AUTOMATED MANUFACTURING OF DISTR...
- Publication number 20140041396
- Publication date Feb 13, 2014
- TAREK MAKANSI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR HEAT DISSIPATION ON SEMICONDUCTOR DEVICE
- Publication number 20130167895
- Publication date Jul 4, 2013
- LSI Corporation
- Zachary Prather
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING
- Publication number 20130008181
- Publication date Jan 10, 2013
- Tarek Makansi
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Application
DISTRIBUTED THERMOELECTRIC STRING AND INSULATING PANEL AND APPLICAT...
- Publication number 20120198616
- Publication date Aug 9, 2012
- Tarek Makansi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical error minimization in a semiconductor manufacturing apparatus
- Publication number 20060238728
- Publication date Oct 26, 2006
- Michael J. Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Abrasive Electrolyte
- Publication number 20060219572
- Publication date Oct 5, 2006
- LSI Logic Corporation
- Michael J. Berman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method to improve the control of electro-polishing by use of a plat...
- Publication number 20060185986
- Publication date Aug 24, 2006
- LSI Logic Corporation
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Process method for achieving uniform stress free electro-polishing...
- Publication number 20060137993
- Publication date Jun 29, 2006
- LSI Logic Corporation
- Steven Reder
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Substrate edge scribe
- Publication number 20060065985
- Publication date Mar 30, 2006
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for heat dissipation on semiconductor device
- Publication number 20060043582
- Publication date Mar 2, 2006
- Zachary A. Prather
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to monitor pad wear in CMP processing
- Publication number 20050287927
- Publication date Dec 29, 2005
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Application
Magnetic focus rings for improved copper plating
- Publication number 20050258044
- Publication date Nov 24, 2005
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND CONTROL SYSTEM FOR IMPROVING CMP PROCESS BY DETECTING AN...
- Publication number 20050181706
- Publication date Aug 18, 2005
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Application
Contact resistance device for improved process control
- Publication number 20050110512
- Publication date May 26, 2005
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method to use a laser to perform the edge clean operation on a semi...
- Publication number 20050109369
- Publication date May 26, 2005
- LSI Logic Corporation
- Steven Reder
- B08 - CLEANING
Information Patent Application
System and method for using film deposition techniques to provide a...
- Publication number 20050093111
- Publication date May 5, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical mechanical electropolishing system
- Publication number 20050090121
- Publication date Apr 28, 2005
- Steven E. Reder
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electropolishing pad
- Publication number 20050087450
- Publication date Apr 28, 2005
- Steven E. Reder
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Abrasive electrolyte
- Publication number 20050087451
- Publication date Apr 28, 2005
- Michael J. Berman
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Pad conditioner setup
- Publication number 20050064792
- Publication date Mar 24, 2005
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus and method to improve the resolution of photolithography...
- Publication number 20050053851
- Publication date Mar 10, 2005
- LSI Logic Corporation
- Michael Jay Berman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for achieving wafer contact for electro-processing
- Publication number 20050037620
- Publication date Feb 17, 2005
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method to improve the control of electro-polishing by use of a plat...
- Publication number 20050029122
- Publication date Feb 10, 2005
- Michael J. Berman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method to improve control in CMP processing
- Publication number 20050026551
- Publication date Feb 3, 2005
- Michael J> Berman
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus to add slurry to a polishing system
- Publication number 20040266321
- Publication date Dec 30, 2004
- Michael J. Berman
- B24 - GRINDING POLISHING
Information Patent Application
Process method for achieving uniform stress free electro-polishing...
- Publication number 20040245119
- Publication date Dec 9, 2004
- Steven Reder
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Michael J. Berman

Person

Patents Grantslast 30 patents

Integration of distributed thermoelectric heating and cooling

Medical, topper, pet wireless, and automated manufacturing of distr...

Integration of distributed thermoelectric heating and cooling

Method for heat dissipation on semiconductor device

Method for heat dissipation on semiconductor device

Determination of film thickness during chemical mechanical polishing

Visual wear confirmation polishing pad

Apparatus and method to improve the resolution of photolithography...

Electroplating tool for semiconductor manufacture having electric f...

Optical error minimization in a semiconductor manufacturing apparatus

Method to monitor pad wear in CMP processing

Contact resistance device for improved process control

Optical error minimization in a semiconductor manufacturing apparatus

Pad conditioner setup

Method to improve the control of electro-polishing by use of a plat...

Dual source lithography for direct write application

Mechanism for improving the structural integrity of low-k films

Method and apparatus to add slurry to a polishing system

Method and control system for improving CMP process by detecting an...

Method and apparatus for detecting backside contamination during fa...

Chemical mechanical electropolishing system

Method to improve the control of source chemicals delivery by a car...

Dual source lithography for direct write application

Optical error minimization in a semiconductor manufacturing apparatus

Method to use a laser to perform the edge clean operation on a semi...

Laminate low K film

Apparatus and method to improve the resolution of photolithography...

System and method for using film deposition techniques to provide a...

Method and apparatus for cleaning deposited films from the edge of...

Method and apparatus for removing water vapor as a byproduct of che...

Patents Applicationslast 30 patents

INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING

INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING

METHODS AND SYSTEMS FOR DISTRIBUTED THERMOELECTRIC HEATING AND COOLING

INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING

MEDICAL, TOPPER, PET WIRELESS, AND AUTOMATED MANUFACTURING OF DISTR...

METHOD FOR HEAT DISSIPATION ON SEMICONDUCTOR DEVICE

INTEGRATION OF DISTRIBUTED THERMOELECTRIC HEATING AND COOLING

DISTRIBUTED THERMOELECTRIC STRING AND INSULATING PANEL AND APPLICAT...

Optical error minimization in a semiconductor manufacturing apparatus

Abrasive Electrolyte

Method to improve the control of electro-polishing by use of a plat...

Process method for achieving uniform stress free electro-polishing...

Substrate edge scribe

Method for heat dissipation on semiconductor device

Method to monitor pad wear in CMP processing

Magnetic focus rings for improved copper plating

METHOD AND CONTROL SYSTEM FOR IMPROVING CMP PROCESS BY DETECTING AN...

Contact resistance device for improved process control

Method to use a laser to perform the edge clean operation on a semi...

System and method for using film deposition techniques to provide a...

Chemical mechanical electropolishing system

Electropolishing pad

Abrasive electrolyte

Pad conditioner setup

Apparatus and method to improve the resolution of photolithography...

Method for achieving wafer contact for electro-processing

Method to improve the control of electro-polishing by use of a plat...

Method to improve control in CMP processing

Method and apparatus to add slurry to a polishing system

Process method for achieving uniform stress free electro-polishing...