Michael J. Kuhlman

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Low cost high throughput processing platform
- Patent number 8,668,422
- Issue date Mar 11, 2014
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Advanced low cost high throughput processing platform
- Patent number 7,658,586
- Issue date Feb 9, 2010
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Low cost high throughput processing platform
- Patent number 7,563,068
- Issue date Jul 21, 2009
- Mattson Technology, Inc.
- Leszek Niewmierzycki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Door systems for low contamination, high throughput handling of wor...
- Patent number 6,647,665
- Issue date Nov 18, 2003
- Mattson Technology, Inc.
- Farzad Tabrizi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for low contamination, high throughput handling...
- Patent number 6,568,552
- Issue date May 27, 2003
- Mattson Technology, Inc.
- Farzad Tabrizi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for robotic transfer of workpieces between a st...
- Patent number 6,315,512
- Issue date Nov 13, 2001
- Mattson Technology, Inc.
- Farzad Tabrizi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for measuring the position of a wafer in a cassette
- Patent number 4,713,551
- Issue date Dec 15, 1987
- Varian Associates, Inc.
- Frederick P. Layman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing system
- Patent number 4,705,951
- Issue date Nov 10, 1987
- Varian Associates, Inc.
- Frederick P. Layman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Low Cost High Throughput Processing Platform
- Publication number 20070175864
- Publication date Aug 2, 2007
- Leszek Niewmierzycki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low cost high throughput processing platform
- Publication number 20060045664
- Publication date Mar 2, 2006
- Leszek Niewmierzycki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Advanced low cost high throughput processing platform
- Publication number 20060039781
- Publication date Feb 23, 2006
- Leszek Niewmierzycki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for transporting wafers for vacuum processing
- Publication number 20040091349
- Publication date May 13, 2004
- Farzad Tabrizi
- H01 - BASIC ELECTRIC ELEMENTS

Michael J. Kuhlman

Person

Patents Grantslast 30 patents

Low cost high throughput processing platform

Advanced low cost high throughput processing platform

Low cost high throughput processing platform

Door systems for low contamination, high throughput handling of wor...

Systems and methods for low contamination, high throughput handling...

Systems and methods for robotic transfer of workpieces between a st...

System for measuring the position of a wafer in a cassette

Wafer processing system

Patents Applicationslast 30 patents

Low Cost High Throughput Processing Platform

Low cost high throughput processing platform

Advanced low cost high throughput processing platform

Methods for transporting wafers for vacuum processing