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Michael Joseph Cooke
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Bristol, GB
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Patents Grants
last 30 patents
Information
Patent Grant
Cyclical plasma etching
Patent number
10,008,369
Issue date
Jun 26, 2018
Oxford Instruments Nanotechnology Tools Limited
Andrew L. Goodyear
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic clamping method and apparatus
Patent number
9,793,149
Issue date
Oct 17, 2017
Oxford Instruments Nanotechnology Tools Limited
Yiping Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for depositing and/or etching material on a s...
Patent number
9,412,566
Issue date
Aug 9, 2016
Oxford Instruments Nanotechnology Tools Limited
Mark Edward McNie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for plasma treating a substrate
Patent number
7,713,377
Issue date
May 11, 2010
Oxford Instruments Plasma Technology Limited
Michael Joseph Cooke
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRODE ARRAY
Publication number
20210358723
Publication date
Nov 18, 2021
Oxford Instruments Nanotechnology Tools Limited
Gary PROUDFOOT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE PROCESSING APPARATUS
Publication number
20200321192
Publication date
Oct 8, 2020
Oxford Instruments Nanotechnology Tools Limited
Michael Cooke
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CYCLICAL PLASMA ETCHING
Publication number
20170069469
Publication date
Mar 9, 2017
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
Andrew L. GOODYEAR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CLAMPING METHOD AND APPARATUS
Publication number
20150162234
Publication date
Jun 11, 2015
Oxford Instruments Nanotechnology Tools Limited
Yiping Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR DEPOSITING AND/OR ETCHING MATERIAL ON A S...
Publication number
20150011088
Publication date
Jan 8, 2015
OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
Mark Edward McNie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SURFACE PROCESSING APPARATUS
Publication number
20080035608
Publication date
Feb 14, 2008
Owain Peredur THOMAS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for plasma treating a substrate
Publication number
20070158305
Publication date
Jul 12, 2007
OXFORD INSTRUMENTS PLASMA TECHNOLOGY LIMITED
Michael Joseph Cooke
H01 - BASIC ELECTRIC ELEMENTS