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Michael P. Kanouff
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Livermore, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and methods for optics protection from debris in plasma-b...
Patent number
10,101,664
Issue date
Oct 16, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Plasma-based light source
Patent number
10,034,362
Issue date
Jul 24, 2018
KLA-Tencor Corporation
Alexey Kuritsyn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coaxial microreactor for particle synthesis
Patent number
8,563,325
Issue date
Oct 22, 2013
Sandia Corporation
Michael Bartsch
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Discharge source with gas curtain for protecting optics from particles
Patent number
6,714,624
Issue date
Mar 30, 2004
EUV LLC
Neal R. Fornaciari
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Surface figure control for coated optics
Patent number
6,206,528
Issue date
Mar 27, 2001
EUV LLC
Avijit K. Ray-Chaudhuri
G02 - OPTICS
Information
Patent Grant
Wafer chamber having a gas curtain for extreme-UV lithography
Patent number
6,198,792
Issue date
Mar 6, 2001
EUV LLC
Michael P. Kanouff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Plasma-Based Light Source
Publication number
20160249442
Publication date
Aug 25, 2016
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS AND METHODS FOR OPTICS PROTECTION FROM DEBRIS IN PLASMA-B...
Publication number
20160128171
Publication date
May 5, 2016
KLA-Tencor Corporation
Alexey Kuritsyn
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR SEPARATING GASES AND MITIGATING D...
Publication number
20140166051
Publication date
Jun 19, 2014
KLA-Tencor Corporation
Karl R. Umstadter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HEATING SYSTEMS FOR HYDROGEN STORAGE MATERIALS
Publication number
20100061926
Publication date
Mar 11, 2010
GM Global Technology Operations, Inc.
TERRY A. JOHNSON
F23 - COMBUSTION APPARATUS COMBUSTION PROCESSES
Information
Patent Application
Coated metal structures and methods of making and using thereof
Publication number
20070080062
Publication date
Apr 12, 2007
Cindy K. Harnett
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
Discharge source with gas curtain for protecting optics from particles
Publication number
20030053594
Publication date
Mar 20, 2003
Neal R. Fornaciari
B82 - NANO-TECHNOLOGY