Michael R. Rice

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Zone-controlled rare-earth oxide ALD and CVD coatings
- Patent number 12,209,307
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ground electrode formed in an electrostatic chuck for a plasma proc...
- Patent number 12,205,843
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for integrating load locks into a factory inter...
- Patent number 12,159,796
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Factory interface robots usable with integrated load locks
- Patent number 12,142,508
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge ring lifting solution
- Patent number 12,094,752
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for epitaxially depositing a material on a substrate by flow...
- Patent number 12,091,749
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,077,861
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber architecture for epitaxial deposition and advanced epitaxia...
- Patent number 12,060,651
- Issue date Aug 13, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma resistant process chamber lid
- Patent number 12,049,696
- Issue date Jul 30, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injector for epitaxy and CVD chamber
- Patent number 12,018,372
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for environmental control of dies and substrates for hybr...
- Patent number 12,001,193
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Ying Wang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Mainframe of dual-robot substrate processing system
- Patent number D1029066
- Issue date May 28, 2024
- Applied Materials, Inc.
- Michael R. Rice
- D15 - Machines not elsewhere specified
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,990,358
- Issue date May 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing systems, apparatus, and methods with substrate...
- Patent number 11,782,404
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mainframe of substrate processing system
- Patent number D992611
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Michael R. Rice
- D15 - Machines not elsewhere specified
Information Patent Grant
Mainframe of substrate processing system
- Patent number D991994
- Issue date Jul 11, 2023
- Applied Materials, Inc.
- Michael R. Rice
- D15 - Machines not elsewhere specified
Information Patent Grant
Erosion resistant metal oxide coatings
- Patent number 11,667,575
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ground electrode formed in an electrostatic chuck for a plasma proc...
- Patent number 11,640,917
- Issue date May 2, 2023
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,631,605
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-blade robot apparatus, electronic device manufacturing appara...
- Patent number 11,621,182
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution plate for thermal deposition
- Patent number 11,583,816
- Issue date Feb 21, 2023
- Applied Materials, Inc.
- Jared Ahmad Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Systems for integrating load locks into a factory interface footpri...
- Patent number 11,581,203
- Issue date Feb 14, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device manufacturing system
- Patent number 11,576,264
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mainframe of substrate processing system
- Patent number D973737
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Michael R. Rice
- D15 - Machines not elsewhere specified
Information Patent Grant
Mainframe of substrate processing system
- Patent number D973116
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Michael R. Rice
- D15 - Machines not elsewhere specified
Information Patent Grant
Gas-pulsing-based shared precursor distribution system and methods...
- Patent number 11,520,358
- Issue date Dec 6, 2022
- Applied Materials, Inc.
- Michael Rice
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF FORMING SILICON NITRIDE FILMS
- Publication number 20250087477
- Publication date Mar 13, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS
- Publication number 20250027195
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Yogesh Tomar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER EDGE RING LIFTING SOLUTION
- Publication number 20240429088
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSED PLASMA SOURCE AND PROCESS CHAMBER FOR LARGE AREA SUBSTRATES
- Publication number 20240420921
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Kenneth S. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...
- Publication number 20240401197
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Xiaowei Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH GAS RECYCLING
- Publication number 20240368764
- Publication date Nov 7, 2024
- APPLIED MATERIALS,INC.
- Michael Robert Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY
- Publication number 20240352586
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTOR FOR EPITAXY AND CVD CHAMBER
- Publication number 20240337020
- Publication date Oct 10, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...
- Publication number 20240254655
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
- Publication number 20240209544
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
- Publication number 20240117491
- Publication date Apr 11, 2024
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING SYSTEM
- Publication number 20230413448
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20230352322
- Publication date Nov 2, 2023
- Applied Materials, Inc.
- Tetsuya Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EROSION RESISTANT METAL OXIDE COATINGS DEPOSITED BY ATOMIC LAYER DE...
- Publication number 20230286867
- Publication date Sep 14, 2023
- Applied Materials, Inc.
- Xiaowei Wu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
APPARATUS FOR ENVIRONMENTAL CONTROL OF DIES AND SUBSTRATES FOR HYBR...
- Publication number 20230288916
- Publication date Sep 14, 2023
- Ying WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...
- Publication number 20230268218
- Publication date Aug 24, 2023
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20230253228
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
- Publication number 20230197495
- Publication date Jun 22, 2023
- James David CARDUCCI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...
- Publication number 20230187239
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER WITH A MULTIPHASE ROTATING GAS CROSS-FLOW AND PERIPH...
- Publication number 20230162950
- Publication date May 25, 2023
- Applied Materials, Inc.
- Rajinder Dhindsa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS
- Publication number 20230113673
- Publication date Apr 13, 2023
- Applied Materials, Inc.
- Sushant S. Koshti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20230074149
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Michael R. RICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMIT...
- Publication number 20230057145
- Publication date Feb 23, 2023
- Applied Materials, Inc.
- DAISUKE SHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION PLATE WITH HIGH ASPECT RATIO HOLES AND A HIGH HOLE...
- Publication number 20220380898
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Sumit AGARWAL
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...
- Publication number 20220367216
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-PORT EXHAUST SYSTEM FOR EPITAXIAL DEPOSITION CHAMBER
- Publication number 20220364229
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Tetsuya ISHIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michael R. Rice

Person

Patents Grantslast 30 patents

Reconfigurable mainframe with replaceable interface plate

Zone-controlled rare-earth oxide ALD and CVD coatings

Ground electrode formed in an electrostatic chuck for a plasma proc...

Systems and methods for integrating load locks into a factory inter...

Side storage pods, equipment front end modules, and methods for pro...

Factory interface robots usable with integrated load locks

Wafer edge ring lifting solution

Method for epitaxially depositing a material on a substrate by flow...

Dithering or dynamic offsets for improved uniformity

Atomic layer deposition part coating chamber

Chamber architecture for epitaxial deposition and advanced epitaxia...

Plasma resistant process chamber lid

Gas injector for epitaxy and CVD chamber

Apparatus for environmental control of dies and substrates for hybr...

Mainframe of dual-robot substrate processing system

Sealed substrate carriers and systems and methods for transporting...

Single wafer processing environments with spatial separation

Substrate processing systems, apparatus, and methods with substrate...

Mainframe of substrate processing system

Mainframe of substrate processing system

Erosion resistant metal oxide coatings

Ground electrode formed in an electrostatic chuck for a plasma proc...

Sealed substrate carriers and systems and methods for transporting...

Multi-blade robot apparatus, electronic device manufacturing appara...

Gas distribution plate for thermal deposition

Systems for integrating load locks into a factory interface footpri...

Electronic device manufacturing system

Mainframe of substrate processing system

Mainframe of substrate processing system

Gas-pulsing-based shared precursor distribution system and methods...

Patents Applicationslast 30 patents

METHODS OF FORMING SILICON NITRIDE FILMS

PARALLEL ATOMIC LAYER DEPOSITION OF TARGET ELEMENT INTERIORS

WAFER EDGE RING LIFTING SOLUTION

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

IMMERSED PLASMA SOURCE AND PROCESS CHAMBER FOR LARGE AREA SUBSTRATES

EROSION RESISTANT METAL FLUORIDE COATINGS DEPOSITED BY ATOMIC LAYER...

PROCESSING CHAMBER WITH GAS RECYCLING

DITHERING OR DYNAMIC OFFSETS FOR IMPROVED UNIFORMITY

GAS INJECTOR FOR EPITAXY AND CVD CHAMBER

EPI ISOLATION PLATE AND PARALLEL BLOCK PURGE FLOW TUNING FOR GROWTH...

CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...

ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

ELECTRONIC DEVICE MANUFACTURING SYSTEM

MULTI-ZONE LAMP HEATING FOR CHEMICAL VAPOR DEPOSITION

EROSION RESISTANT METAL OXIDE COATINGS DEPOSITED BY ATOMIC LAYER DE...

APPARATUS FOR ENVIRONMENTAL CONTROL OF DIES AND SUBSTRATES FOR HYBR...

GROUND ELECTRODE FORMED IN AN ELECTROSTATIC CHUCK FOR A PLASMA PROC...

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP

SYSTEMS AND METHODS FOR INTEGRATING LOAD LOCKS INTO A FACTORY INTER...

PLASMA CHAMBER WITH A MULTIPHASE ROTATING GAS CROSS-FLOW AND PERIPH...

FACTORY INTERFACE ROBOTS USABLE WITH INTEGRATED LOAD LOCKS

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

PLASMA CHAMBER WITH A MULTIPHASE ROTATING CROSS-FLOW WITH UNIFORMIT...

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

GAS DISTRIBUTION PLATE WITH HIGH ASPECT RATIO HOLES AND A HIGH HOLE...

MULTI-ZONE LAMP HEATING AND TEMPERATURE MONITORING IN EPITAXY PROCE...

MULTI-PORT EXHAUST SYSTEM FOR EPITAXIAL DEPOSITION CHAMBER