Michael Rivkin

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 9,873,946
- Issue date Jan 23, 2018
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition tile arrangement and physical vapor depos...
- Patent number 9,328,410
- Issue date May 3, 2016
- First Solar, Inc
- Bernd Teichert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,980,769
- Issue date Mar 17, 2015
- Novellus Systems, Inc.
- Jason Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,629,068
- Issue date Jan 14, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-station sequential curing of dielectric films
- Patent number 8,454,750
- Issue date Jun 4, 2013
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock design for rapid wafer heating
- Patent number 8,273,670
- Issue date Sep 25, 2012
- Novellus Systems, Inc.
- Michael Rivkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load lock design for rapid wafer heating
- Patent number 7,960,297
- Issue date Jun 14, 2011
- Novellus Systems, Inc.
- Michael Rivkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pedestal heat transfer and temperature control
- Patent number 7,941,039
- Issue date May 10, 2011
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Adhesion promotion for etch by-products
- Patent number 7,176,140
- Issue date Feb 13, 2007
- Novellus Systems, Inc.
- Michael Rivkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring and/or end point detecting a pr...
- Patent number 6,374,150
- Issue date Apr 16, 2002
- Applied Materials, Inc.
- Gregory F. Redinbo
- B24 - GRINDING POLISHING
Information Patent Grant
Single wafer load lock chamber for pre-processing and post-processi...
- Patent number 6,270,582
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Michael Rivkin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PHYSICAL VAPOR DEPOSITION TILE ARRANGEMENT AND PHYSICAL VAPOR DEPOS...
- Publication number 20150114824
- Publication date Apr 30, 2015
- First Solar, Inc.
- Bernd Teichert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20150114292
- Publication date Apr 30, 2015
- Novellus Systems, Inc.
- Jason Dirk Haverkamp
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS
- Publication number 20140080324
- Publication date Mar 20, 2014
- Novellus Systems, Inc.
- Krishnan Shrinivasan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION SOURCE INTEGRATION INTO COATER
- Publication number 20130078375
- Publication date Mar 28, 2013
- Peter Krotov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION SYSTEM
- Publication number 20120052189
- Publication date Mar 1, 2012
- Litian Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photoresist Stripping Method and Apparatus
- Publication number 20090277472
- Publication date Nov 12, 2009
- Novellus Systems, Inc.
- Michael Rivkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MONITORING AND/OR END POINT DETECTING A PR...
- Publication number 20020013637
- Publication date Jan 31, 2002
- GREGORY F. REDINBO
- B24 - GRINDING POLISHING

Michael Rivkin

Person

Patents Grantslast 30 patents

Multi-station sequential curing of dielectric films

Physical vapor deposition tile arrangement and physical vapor depos...

Multi-station sequential curing of dielectric films

Multi-station sequential curing of dielectric films

Multi-station sequential curing of dielectric films

Load lock design for rapid wafer heating

Load lock design for rapid wafer heating

Pedestal heat transfer and temperature control

Adhesion promotion for etch by-products

Method and apparatus for monitoring and/or end point detecting a pr...

Single wafer load lock chamber for pre-processing and post-processi...

Patents Applicationslast 30 patents

PHYSICAL VAPOR DEPOSITION TILE ARRANGEMENT AND PHYSICAL VAPOR DEPOS...

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS

DEPOSITION SOURCE INTEGRATION INTO COATER

VAPOR DEPOSITION SYSTEM

Photoresist Stripping Method and Apparatus

METHOD AND APPARATUS FOR MONITORING AND/OR END POINT DETECTING A PR...