Michael Sugarman

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,980,255
- Issue date Jul 19, 2011
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 7,513,062
- Issue date Apr 7, 2009
- Applied Materials, Inc.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 7,507,296
- Issue date Mar 24, 2009
- Applied Materials, Inc.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Grant
Electro-chemical deposition system
- Patent number 7,497,932
- Issue date Mar 3, 2009
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 7,229,504
- Issue date Jun 12, 2007
- Applied Materials, Inc.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Grant
Spin-rinse-dryer
- Patent number 7,226,514
- Issue date Jun 5, 2007
- Applied Materials, Inc.
- Anwar Husain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubber with sonic nozzle
- Patent number 7,063,749
- Issue date Jun 20, 2006
- Applied Materials
- Michael Sugarman
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for determining scrubber brush pressure
- Patent number 6,986,185
- Issue date Jan 17, 2006
- Applied Materials Inc.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Grant
Single wafer dryer and drying methods
- Patent number 6,955,516
- Issue date Oct 18, 2005
- Applied Materials, Inc.
- Younes Achkire
- B08 - CLEANING
Information Patent Grant
Backside etching in a scrubber
- Patent number 6,921,494
- Issue date Jul 26, 2005
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Roller that avoids substrate slippage
- Patent number 6,918,864
- Issue date Jul 19, 2005
- Applied Materials, Inc.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scrubber with sonic nozzle
- Patent number 6,904,637
- Issue date Jun 14, 2005
- Applied Materials, Inc.
- Michael Sugarman
- B08 - CLEANING
Information Patent Grant
Wafer scrubbing device having brush assembly and mounting assembly...
- Patent number 6,820,298
- Issue date Nov 23, 2004
- Applied Materials, Inc.
- John M White
- B08 - CLEANING
Information Patent Grant
Wafer edge cleaning method and apparatus
- Patent number 6,797,074
- Issue date Sep 28, 2004
- Applied Materials, Inc.
- Fred C. Redeker
- B08 - CLEANING
Information Patent Grant
Labyrinth seal for bearing in brush mounting assembly for semicondu...
- Patent number 6,728,989
- Issue date May 4, 2004
- Applied Materials Inc.
- Alexander Lerner
- B08 - CLEANING
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,635,157
- Issue date Oct 21, 2003
- Applied Materials, Inc.
- Yezdi Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electro-chemical deposition cell for face-up processing of single s...
- Patent number 6,599,402
- Issue date Jul 29, 2003
- Applied Materials, Inc.
- Yezdi Dordi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and associated apparatus for tilting a substrate upon entry...
- Patent number 6,582,578
- Issue date Jun 24, 2003
- Applied Materials, Inc.
- Yezdi N. Dordi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Segmenting of processing system into wet and dry areas
- Patent number 6,551,488
- Issue date Apr 22, 2003
- Applied Materials, Inc.
- H. Peter W. Hey
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer edge cleaning method and apparatus
- Patent number 6,523,553
- Issue date Feb 25, 2003
- Applied Materials, Inc.
- Fred C. Redeker
- B08 - CLEANING
Information Patent Grant
Gripper assembly
- Patent number 6,520,315
- Issue date Feb 18, 2003
- Applied Materials, Inc.
- Michael Sugarman
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Spin-rinse-dryer
- Patent number 6,516,816
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Anwar Husain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gripper for supporting substrate in a vertical orientation
- Patent number 6,474,712
- Issue date Nov 5, 2002
- Applied Materials, Inc.
- Boris I. Govzman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for reducing thermal gradients within a substr...
- Patent number 6,469,283
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Vincent E. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process sequence for improved seed layer productivity and achieving...
- Patent number 6,423,636
- Issue date Jul 23, 2002
- Applied Materials, Inc.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electro-chemical deposition cell for face-up processing of single s...
- Patent number 6,416,647
- Issue date Jul 9, 2002
- Applied Materials, Inc.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus for transferring semiconductor substrates using an input...
- Patent number 6,406,359
- Issue date Jun 18, 2002
- Applied Materials, Inc.
- Manoocher Birang
- B24 - GRINDING POLISHING
Information Patent Grant
Spin-rinse-drying process for electroplated semiconductor wafers
- Patent number 6,290,865
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Mark Lloyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conductive feed-through for creating a surface electrode connection...
- Patent number 6,291,777
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Vincent E. Burkhart
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electro-chemical deposition system
- Patent number 6,258,220
- Issue date Jul 10, 2001
- Applied Materials, Inc.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20100006124
- Publication date Jan 14, 2010
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20090241996
- Publication date Oct 1, 2009
- Younes Achkire
- B08 - CLEANING
Information Patent Application
SINGLE WAFER DRYER AND DRYING METHODS
- Publication number 20070295371
- Publication date Dec 27, 2007
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR DETERMINING SCRUBBER BRUSH PRESSURE
- Publication number 20070221249
- Publication date Sep 27, 2007
- APPLIED MATERIALS, INC.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Electro-chemical deposition system
- Publication number 20060246690
- Publication date Nov 2, 2006
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Roller that avoids substrate slippage
- Publication number 20060189465
- Publication date Aug 24, 2006
- APPLIED MATERIALS, INC.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20060174921
- Publication date Aug 10, 2006
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Methods and apparatus for determining scrubber brush pressure
- Publication number 20060090774
- Publication date May 4, 2006
- APPLIED MATERIALS, INC.
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Scrubber with sonic nozzle
- Publication number 20050268937
- Publication date Dec 8, 2005
- APPLIED MATERIALS, INC.
- Michael Sugarman
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050241684
- Publication date Nov 3, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20050229426
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Younes Achkire
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Roller that avoids substrate slippage
- Publication number 20050109373
- Publication date May 26, 2005
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electro-chemical deposition system
- Publication number 20040084301
- Publication date May 6, 2004
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Electro-chemical deposition cell for face-up processing of single s...
- Publication number 20040020781
- Publication date Feb 5, 2004
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Backside etching in a scrubber
- Publication number 20030209255
- Publication date Nov 13, 2003
- APPLIED MATERIALS, INC.
- Brian J. Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and associated apparatus for tilting a substrate upon entry...
- Publication number 20030201184
- Publication date Oct 30, 2003
- APPLIED MATERIALS, INC.
- Yezdi N. Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Segmenting of processing system into wet and dry areas
- Publication number 20030168346
- Publication date Sep 11, 2003
- APPLIED MATERIALS, INC.
- H. Peter W. Hey
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Single wafer dryer and drying methods
- Publication number 20030121170
- Publication date Jul 3, 2003
- APPLIED MATERIALS, INC.
- Younes Achkire
- B08 - CLEANING
Information Patent Application
Methods and apparatus for determining scrubber brush pressure
- Publication number 20030111095
- Publication date Jun 19, 2003
- Michael N. Sugarman
- B08 - CLEANING
Information Patent Application
Spin-rinse-dryer
- Publication number 20030079762
- Publication date May 1, 2003
- Anwar Husain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scrubber with sonic nozzle
- Publication number 20030061675
- Publication date Apr 3, 2003
- Applied Materials Inc.
- Michael Sugarman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer edge cleaning method and apparatus
- Publication number 20030041879
- Publication date Mar 6, 2003
- Fred C. Redeker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gripper for supporting substrate in a vertical orientation
- Publication number 20030026683
- Publication date Feb 6, 2003
- Boris I. Govzman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electro-chemical deposition cell for face-up processing of single s...
- Publication number 20020157960
- Publication date Oct 31, 2002
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Wafer scrubbing device having brush assembly and mounting assembly...
- Publication number 20020152567
- Publication date Oct 24, 2002
- APPLIED MATERIALS, INC.
- John M. White
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer presence sensor for detecting quartz wafers
- Publication number 20020117188
- Publication date Aug 29, 2002
- Vladimir Galburt
- G01 - MEASURING TESTING
Information Patent Application
Labyrinth seal for bearing in brush mounting assembly for semicondu...
- Publication number 20020100131
- Publication date Aug 1, 2002
- Alexander Lerner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electro-chemical deposition system
- Publication number 20020029961
- Publication date Mar 14, 2002
- APPLIED MATERIALS, INC.
- Yezdi Dordi
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Michael Sugarman

Person

Patents Grantslast 30 patents

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Methods and apparatus for determining scrubber brush pressure

Electro-chemical deposition system

Methods and apparatus for determining scrubber brush pressure

Spin-rinse-dryer

Scrubber with sonic nozzle

Methods and apparatus for determining scrubber brush pressure

Single wafer dryer and drying methods

Backside etching in a scrubber

Roller that avoids substrate slippage

Scrubber with sonic nozzle

Wafer scrubbing device having brush assembly and mounting assembly...

Wafer edge cleaning method and apparatus

Labyrinth seal for bearing in brush mounting assembly for semicondu...

Electro-chemical deposition system

Electro-chemical deposition cell for face-up processing of single s...

Method and associated apparatus for tilting a substrate upon entry...

Segmenting of processing system into wet and dry areas

Wafer edge cleaning method and apparatus

Gripper assembly

Spin-rinse-dryer

Gripper for supporting substrate in a vertical orientation

Method and apparatus for reducing thermal gradients within a substr...

Process sequence for improved seed layer productivity and achieving...

Electro-chemical deposition cell for face-up processing of single s...

Apparatus for transferring semiconductor substrates using an input...

Spin-rinse-drying process for electroplated semiconductor wafers

Conductive feed-through for creating a surface electrode connection...

Electro-chemical deposition system

Patents Applicationslast 30 patents

SINGLE WAFER DRYER AND DRYING METHODS

SINGLE WAFER DRYER AND DRYING METHODS

SINGLE WAFER DRYER AND DRYING METHODS

METHODS AND APPARATUS FOR DETERMINING SCRUBBER BRUSH PRESSURE

Electro-chemical deposition system

Roller that avoids substrate slippage

Single wafer dryer and drying methods

Methods and apparatus for determining scrubber brush pressure

Scrubber with sonic nozzle

Single wafer dryer and drying methods

Single wafer dryer and drying methods

Roller that avoids substrate slippage

Electro-chemical deposition system

Electro-chemical deposition cell for face-up processing of single s...

Backside etching in a scrubber

Method and associated apparatus for tilting a substrate upon entry...

Segmenting of processing system into wet and dry areas

Single wafer dryer and drying methods

Methods and apparatus for determining scrubber brush pressure

Spin-rinse-dryer

Scrubber with sonic nozzle

Wafer edge cleaning method and apparatus

Gripper for supporting substrate in a vertical orientation

Electro-chemical deposition cell for face-up processing of single s...

Wafer scrubbing device having brush assembly and mounting assembly...

Wafer presence sensor for detecting quartz wafers

Labyrinth seal for bearing in brush mounting assembly for semicondu...

Electro-chemical deposition system