Michel Fransois Hubert Klaassen

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Illuminator for a lithographic apparatus and method
- Patent number 7,952,685
- Issue date May 31, 2011
- Carl Zeiss SMT AG
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,872,731
- Issue date Jan 18, 2011
- ASML Netherlands B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and methods for use thereof
- Patent number 7,538,875
- Issue date May 26, 2009
- ASML Netherlands B.V.
- Remco Marcel Van Dijk
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus
- Patent number 7,375,799
- Issue date May 20, 2008
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radially polarized light in lithographic apparatus
- Patent number 7,352,443
- Issue date Apr 1, 2008
- ASML Netherlands B.V.
- Laurentius Cornelius De Winter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Alignment of Collector Device in Lithographic Apparatus
- Publication number 20110188018
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20110122389
- Publication date May 26, 2011
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Passive reticle tool, a lithographic apparatus and a method of patt...
- Publication number 20100182582
- Publication date Jul 22, 2010
- ASML NETHERLANDS B.V,
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic projection system and projection lens polarization sensor
- Publication number 20100118288
- Publication date May 13, 2010
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic Apparatus, Method for Determining at Least One Polariz...
- Publication number 20100045956
- Publication date Feb 25, 2010
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080259300
- Publication date Oct 23, 2008
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illuminator for a lithographic apparatus and method
- Publication number 20080225260
- Publication date Sep 18, 2008
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of monitoring polarization performance, polarization measure...
- Publication number 20080062385
- Publication date Mar 13, 2008
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus
- Publication number 20060192937
- Publication date Aug 31, 2006
- ASML NETHERLANDS B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radially polarized light in lithographic apparatus
- Publication number 20060098182
- Publication date May 11, 2006
- ASML NETHERLANDS B.V.
- Laurentius Cornelius De Winter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device manufacturing method
- Publication number 20050007573
- Publication date Jan 13, 2005
- ASML NETHERLANDS B.V.
- Steven George Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michel Fransois Hubert Klaassen

Person

Patents Grantslast 30 patents

Illuminator for a lithographic apparatus and method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and methods for use thereof

Lithographic apparatus

Radially polarized light in lithographic apparatus

Patents Applicationslast 30 patents

Alignment of Collector Device in Lithographic Apparatus

RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...

Passive reticle tool, a lithographic apparatus and a method of patt...

Lithographic projection system and projection lens polarization sensor

Lithographic Apparatus, Method for Determining at Least One Polariz...

Lithographic apparatus and device manufacturing method

Illuminator for a lithographic apparatus and method

Method of monitoring polarization performance, polarization measure...

Lithographic apparatus

Radially polarized light in lithographic apparatus

Device manufacturing method