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Michel Pharand
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Chelmsford, MA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Combination load lock for handling workpieces
Patent number
7,828,504
Issue date
Nov 9, 2010
Axcellis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece handling scan arm for ion implantation system
Patent number
7,560,705
Issue date
Jul 14, 2009
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-performance electrostatic clamp comprising a resistive layer,...
Patent number
7,151,658
Issue date
Dec 19, 2006
Axcelis Technologies, Inc.
Peter L. Kellerman
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Magnetic support structure for an elevator tube of a vertical rapid...
Patent number
7,100,759
Issue date
Sep 5, 2006
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform gas cushion wafer support
Patent number
7,070,661
Issue date
Jul 4, 2006
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for positioning an elevator tube
Patent number
7,026,581
Issue date
Apr 11, 2006
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer pedestal tilt mechanism
Patent number
6,727,509
Issue date
Apr 27, 2004
Michel Pharand
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
Publication number
20080105836
Publication date
May 8, 2008
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Combination load lock for handling workpieces
Publication number
20070264105
Publication date
Nov 15, 2007
Axcelis Technologies Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetic support structure for an elevator tube of a vertical rapid...
Publication number
20060027440
Publication date
Feb 9, 2006
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ceramic end effector for micro circuit manufacturing
Publication number
20050110292
Publication date
May 26, 2005
Axcelis Technologies, Inc.
Paul W. Baumann
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Method of positioning an elevator tube
Publication number
20050042807
Publication date
Feb 24, 2005
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Uniform gas cushion wafer support
Publication number
20050039685
Publication date
Feb 24, 2005
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-performance electrostatic clamp comprising a resistive layer,...
Publication number
20040212946
Publication date
Oct 28, 2004
Peter L. Kellerman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ceramic end effector for micro circuit manufacturing
Publication number
20040100110
Publication date
May 27, 2004
Axcelis Technologies, Inc.
Paul W. Baumann
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Wafer pedestal tilt mechanism
Publication number
20030111617
Publication date
Jun 19, 2003
Michel Pharand
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING