Michio Ishikawa

Person

Yachimata, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Radical etching apparatus and method
- Patent number 9,216,609
- Issue date Dec 22, 2015
- ULVAC, Inc.
- Hiroaki Inoue
- B44 - DECORATIVE ARTS
Information Patent Grant
Ashing apparatus
- Patent number 9,059,105
- Issue date Jun 16, 2015
- ULVAC, Inc.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming Ni film
- Patent number 8,669,191
- Issue date Mar 11, 2014
- ULVAC, Inc.
- Toshimitsu Uehigashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus
- Patent number 8,419,854
- Issue date Apr 16, 2013
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,367,542
- Issue date Feb 5, 2013
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing component for vacuum apparatus, resin coating...
- Patent number 8,252,113
- Issue date Aug 28, 2012
- ULVAC, Inc.
- Masanobu Hatanaka
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,183,153
- Issue date May 22, 2012
- ULVAC, Inc.
- Hideaki Zama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming barrier film
- Patent number 8,084,368
- Issue date Dec 27, 2011
- ULVAC, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device...
- Patent number 8,043,963
- Issue date Oct 25, 2011
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum film-forming apparatus
- Patent number 7,828,900
- Issue date Nov 9, 2010
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum film-forming apparatus
- Patent number 7,763,115
- Issue date Jul 27, 2010
- ULVAC, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming a SiO.sub.2 passivation film on a plastic substrate
- Patent number 5,840,374
- Issue date Nov 24, 1998
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kazuyuki Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming passivation film
- Patent number 5,554,418
- Issue date Sep 10, 1996
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kazuyuki Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus of in-line type
- Patent number 5,288,329
- Issue date Feb 22, 1994
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic recording medium
- Patent number 5,250,339
- Issue date Oct 5, 1993
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Noriaki Tani
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetic recording member
- Patent number 5,198,309
- Issue date Mar 30, 1993
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetic recording media manufactured by a process in which a negat...
- Patent number 5,147,734
- Issue date Sep 15, 1992
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- G11 - INFORMATION STORAGE
Information Patent Grant
Magnetic recording member
- Patent number 5,069,983
- Issue date Dec 3, 1991
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- G11 - INFORMATION STORAGE
Information Patent Grant
Co-based alloy sputter target and process of manufacturing the same
- Patent number 4,832,810
- Issue date May 23, 1989
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Abrasion resistant magnetic recording member
- Patent number 4,804,590
- Issue date Feb 14, 1989
- Nihon Shinku Gijutsu Kabushiki Kaisha
- Kyuzo Nakamura
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
RADICAL ETCHING APPARATUS AND METHOD
- Publication number 20130306599
- Publication date Nov 21, 2013
- Ulvac, Inc.
- Hiroaki Inoue
- B44 - DECORATIVE ARTS
Information Patent Application
METHOD FOR FORMING NI FILM
- Publication number 20120264310
- Publication date Oct 18, 2012
- Ulvac, Inc.
- Toshimitsu Uehigashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20120031650
- Publication date Feb 9, 2012
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20100317189
- Publication date Dec 16, 2010
- Ulvac, Inc.
- Hideaki Zama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS
- Publication number 20100180819
- Publication date Jul 22, 2010
- Ulvac, Inc.
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASHING APPARATUS
- Publication number 20100089533
- Publication date Apr 15, 2010
- ULVAC, INC.
- Masahisa Ueda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...
- Publication number 20100068880
- Publication date Mar 18, 2010
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING BARRIER FILM
- Publication number 20100068891
- Publication date Mar 18, 2010
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Producing Component for Vacuum Apparatus, Resin Coating...
- Publication number 20090238968
- Publication date Sep 24, 2009
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20090120787
- Publication date May 14, 2009
- ULVAC, Inc.
- Yoshihiro OKAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM FILM-FORMING APPARATUS
- Publication number 20080202423
- Publication date Aug 28, 2008
- ULVAC, Inc.
- Masanobu HATANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaccum film-forming apparatus
- Publication number 20050268852
- Publication date Dec 8, 2005
- Masanobu Hatanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma film-forming apparatus and cleaning method for the same
- Publication number 20040007247
- Publication date Jan 15, 2004
- ULVAC, Inc.
- Shin Asari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma film-forming apparatus and cleaning method for the same
- Publication number 20020124866
- Publication date Sep 12, 2002
- ULVAC, Inc.
- Shin Asari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Michio Ishikawa

Person

Patents Grantslast 30 patents

Radical etching apparatus and method

Ashing apparatus

Method for forming Ni film

Film-forming apparatus

Semiconductor device manufacturing method and semiconductor device...

Method for producing component for vacuum apparatus, resin coating...

Method for manufacturing semiconductor device

Method of forming barrier film

Semiconductor device manufacturing method and semiconductor device...

Vacuum film-forming apparatus

Vacuum film-forming apparatus

Method of forming a SiO.sub.2 passivation film on a plastic substrate

Method of forming passivation film

Chemical vapor deposition apparatus of in-line type

Magnetic recording medium

Magnetic recording member

Magnetic recording media manufactured by a process in which a negat...

Magnetic recording member

Co-based alloy sputter target and process of manufacturing the same

Abrasion resistant magnetic recording member

Patents Applicationslast 30 patents

RADICAL ETCHING APPARATUS AND METHOD

METHOD FOR FORMING NI FILM

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

FILM-FORMING APPARATUS

ASHING APPARATUS

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE...

METHOD OF FORMING BARRIER FILM

Method for Producing Component for Vacuum Apparatus, Resin Coating...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

VACUUM FILM-FORMING APPARATUS

Vaccum film-forming apparatus

Plasma film-forming apparatus and cleaning method for the same

Plasma film-forming apparatus and cleaning method for the same