Michio Yanagisawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement device, processing device, and article manufacturing me...
- Patent number 10,638,021
- Issue date Apr 28, 2020
- Canon Kabushiki Kaisha
- Ippei Uchida
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Microscope
- Patent number 8,964,290
- Issue date Feb 24, 2015
- Canon Kabushiki Kaisha
- Hirofumi Fujii
- G02 - OPTICS
Information Patent Grant
Lithography apparatus, and article manufacturing method
- Patent number 8,916,840
- Issue date Dec 23, 2014
- Canon Kabushiki Kaisha
- Kimitaka Ozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Anti-vibration system in exposure apparatus
- Patent number 6,473,159
- Issue date Oct 29, 2002
- Canon Kabushiki Kaisha
- Shinji Wakui
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT DEVICE, PROCESSING DEVICE, AND ARTICLE MANUFACTURING ME...
- Publication number 20180262656
- Publication date Sep 13, 2018
- Canon Kabushiki Kaisha
- Ippei Uchida
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGE ACQUIRING APPARATUS
- Publication number 20160033753
- Publication date Feb 4, 2016
- Canon Kabushiki Kaisha
- Hiroshi Saito
- G02 - OPTICS
Information Patent Application
MICROSCOPE
- Publication number 20130314778
- Publication date Nov 28, 2013
- Canon Kabushiki Kaisha
- Hirofumi Fujii
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20130230806
- Publication date Sep 5, 2013
- Canon Kabushiki Kaisha
- Kimitaka OZAWA
- B82 - NANO-TECHNOLOGY
Information Patent Application
MICROSCOPE
- Publication number 20130170025
- Publication date Jul 4, 2013
- Canon Kabushiki Kaisha
- Hirofumi Fujii
- G02 - OPTICS
Information Patent Application
MICROSCOPE
- Publication number 20130141562
- Publication date Jun 6, 2013
- Canon Kabushiki Kaisha
- Masashi Yano
- G02 - OPTICS
Information Patent Application
IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD, AND MICROSCOPE
- Publication number 20130083317
- Publication date Apr 4, 2013
- Canon Kabushiki Kaisha
- Hirofumi Fujii
- G02 - OPTICS
Information Patent Application
IMAGING APPARATUS AND CONTROL METHOD THEREFOR
- Publication number 20120314050
- Publication date Dec 13, 2012
- Canon Kabushiki Kaisha
- Ryo Nawata
- G02 - OPTICS
Information Patent Application
Anti-vibration mount apparatus, exposure apparatus, and device manu...
- Publication number 20050211515
- Publication date Sep 29, 2005
- Canon Kabushiki Kaisha
- Tomoyasu Hata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Anti-vibration system, method of controlling the same, exposure app...
- Publication number 20050140961
- Publication date Jun 30, 2005
- Canon Kabushiki Kaisha
- Michio Yanagisawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Michio Yanagisawa

Person

Patents Grantslast 30 patents

Measurement device, processing device, and article manufacturing me...

Microscope

Lithography apparatus, and article manufacturing method

Anti-vibration system in exposure apparatus

Patents Applicationslast 30 patents

MEASUREMENT DEVICE, PROCESSING DEVICE, AND ARTICLE MANUFACTURING ME...

IMAGE ACQUIRING APPARATUS

MICROSCOPE

LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD

MICROSCOPE

MICROSCOPE

IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION METHOD, AND MICROSCOPE

IMAGING APPARATUS AND CONTROL METHOD THEREFOR

Anti-vibration mount apparatus, exposure apparatus, and device manu...

Anti-vibration system, method of controlling the same, exposure app...