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Miguel Angel Saldana
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Edge ring assembly for plasma etching chambers
Patent number
8,845,856
Issue date
Sep 30, 2014
Lam Research Corporation
Michael S. Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for enhanced fluid delivery on bevel etch applications
Patent number
8,671,965
Issue date
Mar 18, 2014
Lam Research Corporation
Miguel A. Saldana
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus and methods for enhanced fluid delivery on bevel etch app...
Patent number
8,328,980
Issue date
Dec 11, 2012
Lam Research Corporation
Miguel A. Saldana
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Polishing apparatus and methods having high processing workload for...
Patent number
7,481,695
Issue date
Jan 27, 2009
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for aligning and setting the axis of rotation...
Patent number
7,025,854
Issue date
Apr 11, 2006
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Grant
Platen with diaphragm and method for optimizing wafer polishing
Patent number
7,018,273
Issue date
Mar 28, 2006
Lam Research Corporation
Adrian Kiermasz
B24 - GRINDING POLISHING
Information
Patent Grant
Methods with resolution enhancement feature for improving accuracy...
Patent number
6,909,935
Issue date
Jun 21, 2005
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Oscillating chemical mechanical planarization apparatus
Patent number
6,902,466
Issue date
Jun 7, 2005
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Methods for aligning a surface of an active retainer ring with a wa...
Patent number
6,843,707
Issue date
Jan 18, 2005
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and methods with porous vac...
Patent number
6,752,703
Issue date
Jun 22, 2004
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus and methods with resolution enhancement feature for impro...
Patent number
6,725,120
Issue date
Apr 20, 2004
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Active retaining ring support
Patent number
6,719,874
Issue date
Apr 13, 2004
Lam Research Corporation
Yehiel Gotkis
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for aligning a surface of an active retainer ring with a...
Patent number
6,709,322
Issue date
Mar 23, 2004
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polishing apparatus and methods with central co...
Patent number
6,640,155
Issue date
Oct 28, 2003
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Subaperture chemical mechanical polishing system
Patent number
6,585,572
Issue date
Jul 1, 2003
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for aligning and setting the axis of rotation...
Patent number
6,579,407
Issue date
Jun 17, 2003
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Grant
Adjustable force applying air platen and spindle system, and method...
Patent number
6,561,870
Issue date
May 13, 2003
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Oscillating fixed abrasive CMP system and methods for implementing...
Patent number
6,520,833
Issue date
Feb 18, 2003
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Grant
Spindle assembly for force controlled polishing
Patent number
6,083,082
Issue date
Jul 4, 2000
Lam Research Corporation
Miguel A. Saldana
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
EDGE RING ASSEMBLY FOR PLASMA ETCHING CHAMBERS
Publication number
20140367047
Publication date
Dec 18, 2014
Michael S. Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for Enhanced Fluid Delivery on Bevel Etch Applications
Publication number
20130056078
Publication date
Mar 7, 2013
Miguel A. Saldana
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Methods for Enhanced Fluid Delivery on Bevel Etch App...
Publication number
20110059614
Publication date
Mar 10, 2011
Miguel A. Saldana
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and apparatus for optimal temperature control in a plasma p...
Publication number
20060000551
Publication date
Jan 5, 2006
Miguel A. Saldana
F28 - HEAT EXCHANGE IN GENERAL
Information
Patent Application
Apparatus with resolution enhancement feature for improving accurac...
Publication number
20040177297
Publication date
Sep 9, 2004
Lam Research Corporation
Miguel Angel Saldana
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods with resolution enhancement feature for improving accuracy...
Publication number
20040166771
Publication date
Aug 26, 2004
Lam Research Corporation
Miguel Angel Saldana
G05 - CONTROLLING REGULATING
Information
Patent Application
Methods for aligning a surface of an active retainer ring with a wa...
Publication number
20040102138
Publication date
May 27, 2004
Lam Research Corporation
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for aligning and setting the axis of rotation...
Publication number
20030201067
Publication date
Oct 30, 2003
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Application
Oscillating chemical mechanical planarization apparatus
Publication number
20030134582
Publication date
Jul 17, 2003
Lam Research Corp.
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus and methods with porous vac...
Publication number
20030119431
Publication date
Jun 26, 2003
Lam Research Corporation
John M. Boyd
B24 - GRINDING POLISHING
Information
Patent Application
Oscillating fixed abrasive CMP system and methods for implementing...
Publication number
20030109195
Publication date
Jun 12, 2003
Lam Research Corp.
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and methods with resolution enhancement feature for impro...
Publication number
20020192965
Publication date
Dec 19, 2002
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Chemical mechanical polishing apparatus and methods with central co...
Publication number
20020188370
Publication date
Dec 12, 2002
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and methods for aligning a surface of an active retainer...
Publication number
20020151254
Publication date
Oct 17, 2002
Miguel Angel Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Polishing apparatus and methods having high processing workload for...
Publication number
20020146970
Publication date
Oct 10, 2002
Lam Research Corporation
Miguel A. Saldana
B24 - GRINDING POLISHING
Information
Patent Application
Adjustable force applying air platen and spindle system, and method...
Publication number
20020142710
Publication date
Oct 3, 2002
Miguel A. Saldana
B24 - GRINDING POLISHING