Mikio Ichihashi

Person

Kodaira-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electron gun
- Patent number 8,669,535
- Issue date Mar 11, 2014
- Hitachi High-Technologies Corporation
- Mikio Ichihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 8,604,430
- Issue date Dec 10, 2013
- Hitachi, Ltd.
- Yuko Iwabuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of an inspection system using an electron beam
- Patent number 8,134,125
- Issue date Mar 13, 2012
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,439,506
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for measuring the physical properties of micro...
- Patent number 7,385,198
- Issue date Jun 10, 2008
- Hitachi, Ltd.
- Yoshifumi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Beam irradiation device
- Patent number 7,351,944
- Issue date Apr 1, 2008
- Sanyo Electric Co., LTD
- Masato Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,232,996
- Issue date Jun 19, 2007
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for measuring physical properties of micro region
- Patent number 7,022,988
- Issue date Apr 4, 2006
- Hitachi, Ltd.
- Yoshifumi Taniguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 7,012,252
- Issue date Mar 14, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,987,265
- Issue date Jan 17, 2006
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for scanning transmission electron microscopy
- Patent number 6,822,233
- Issue date Nov 23, 2004
- Hitachi, Ltd.
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Observation apparatus and observation method using an electron beam
- Patent number 6,750,451
- Issue date Jun 15, 2004
- Hitachi, Ltd.
- Masanari Koguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for scanning transmission electron microscopy
- Patent number 6,531,697
- Issue date Mar 11, 2003
- Hitachi, Ltd.
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting patterns of a semiconductor dev...
- Patent number 6,512,227
- Issue date Jan 28, 2003
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,452,178
- Issue date Sep 17, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and an apparatus of an inspection system using an electron beam
- Patent number 6,348,690
- Issue date Feb 19, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron microscope
- Patent number 6,051,834
- Issue date Apr 18, 2000
- Hitachi, Ltd.
- Hiroshi Kakibayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 5,866,905
- Issue date Feb 2, 1999
- Hitachi, Ltd.
- Hiroshi Kakibayashi
- G01 - MEASURING TESTING
Information Patent Grant
Printing method and printing apparatus using split seal paper sheets
- Patent number 5,813,776
- Issue date Sep 29, 1998
- Sanyo Electric Co., Ltd.
- Susumu Fujiwara
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Sample evaluation/process observation system and method
- Patent number 5,783,830
- Issue date Jul 21, 1998
- Hitachi, Ltd.
- Hiroshi Hirose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 5,552,602
- Issue date Sep 3, 1996
- Hitachi, Ltd.
- Hiroshi Kakibayashi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus including means for maintaining a v...
- Patent number 5,442,183
- Issue date Aug 15, 1995
- Hitachi, Ltd.
- Hironobu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron lens
- Patent number 5,442,182
- Issue date Aug 15, 1995
- Hitachi, Ltd.
- Toshiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field-emission transmission electron microscope and operation metho...
- Patent number 5,373,158
- Issue date Dec 13, 1994
- Hitachi, Ltd.
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 5,324,950
- Issue date Jun 28, 1994
- Hitachi, Ltd.
- Tadashi Otaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus having particular electrostatic obj...
- Patent number 5,254,856
- Issue date Oct 19, 1993
- Hitachi, Ltd.
- Hironobu Matsui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combination apparatus having a scanning electron microscope therein
- Patent number 5,229,607
- Issue date Jul 20, 1993
- Hitachi, Ltd.
- Hironobu Matsui
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam apparatus
- Patent number 5,187,371
- Issue date Feb 16, 1993
- Hitachi, Ltd.
- Hironobu Matsui
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electron microscope and method for observing microscopic image
- Patent number 5,153,434
- Issue date Oct 6, 1992
- Hitachi, Ltd.
- Yusuke Yajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field emission electron device which produces a constant beam current
- Patent number 5,134,289
- Issue date Jul 28, 1992
- Hitachi, Ltd.
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20130087703
- Publication date Apr 11, 2013
- Takashi Onishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...
- Publication number 20120132801
- Publication date May 31, 2012
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON GUN
- Publication number 20120062094
- Publication date Mar 15, 2012
- Mikio Ichihashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM
- Publication number 20090057556
- Publication date Mar 5, 2009
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20070215803
- Publication date Sep 20, 2007
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20060151699
- Publication date Jul 13, 2006
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Beam irradiation device
- Publication number 20060113462
- Publication date Jun 1, 2006
- SANYO ELECTRIC CO., LTD.
- Masato Yamada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring the physical properties of micro...
- Publication number 20060113473
- Publication date Jun 1, 2006
- Yoshifumi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20050205782
- Publication date Sep 22, 2005
- Yuko Iwabuchi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for measuring physical properties of micro region
- Publication number 20040061053
- Publication date Apr 1, 2004
- Yoshifumi Taniguchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for scanning transmission electron microscopy
- Publication number 20030127595
- Publication date Jul 10, 2003
- Hitachi, Ltd.
- Kuniyasu Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Observation apparatus and observation method using an electron beam
- Publication number 20030006373
- Publication date Jan 9, 2003
- HITACHI LTD.
- Masanari Koguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20020092986
- Publication date Jul 18, 2002
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting patterns of a semiconductor dev...
- Publication number 20020024021
- Publication date Feb 28, 2002
- Hitachi, Ltd.
- Yuko Iwabuchi
- G01 - MEASURING TESTING
Information Patent Application
Method and an apparatus of an inspection system using an electron beam
- Publication number 20010030294
- Publication date Oct 18, 2001
- Hitachi, Ltd
- Yuko Iwabuchi
- G01 - MEASURING TESTING

Mikio Ichihashi

Person

Patents Grantslast 30 patents

Electron gun

Method and an apparatus of an inspection system using an electron beam

Method and apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for measuring the physical properties of micro...

Beam irradiation device

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for measuring physical properties of micro region

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for scanning transmission electron microscopy

Observation apparatus and observation method using an electron beam

Method and apparatus for scanning transmission electron microscopy

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Electron microscope

Electron microscope

Printing method and printing apparatus using split seal paper sheets

Sample evaluation/process observation system and method

Electron microscope

Charged particle beam apparatus including means for maintaining a v...

Electron lens

Field-emission transmission electron microscope and operation metho...

Charged particle beam apparatus

Charged particle beam apparatus having particular electrostatic obj...

Combination apparatus having a scanning electron microscope therein

Charged particle beam apparatus

Electron microscope and method for observing microscopic image

Field emission electron device which produces a constant beam current

Patents Applicationslast 30 patents

ELECTRON MICROSCOPE

METHOD AND AN APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON...

ELECTRON GUN

METHOD AND APPARATUS OF AN INSPECTION SYSTEM USING AN ELECTRON BEAM

Method and an apparatus of an inspection system using an electron beam

Method and an apparatus of an inspection system using an electron beam

Beam irradiation device

Method and apparatus for measuring the physical properties of micro...

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for measuring physical properties of micro region

Method and apparatus for scanning transmission electron microscopy

Observation apparatus and observation method using an electron beam

Method and an apparatus of an inspection system using an electron beam

Method and apparatus for inspecting patterns of a semiconductor dev...

Method and an apparatus of an inspection system using an electron beam