Mikio Nagai

Follow

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe method for d...
- Patent number 9,153,421
- Issue date Oct 6, 2015
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Passive capacitively-coupled electrostatic (CCE) probe arrangement...
- Patent number 8,179,152
- Issue date May 15, 2012
- Lam Research Corporation
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE METHOD FOR D...
- Publication number 20120316834
- Publication date Dec 13, 2012
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVE CAPACITIVELY-COUPLED ELECTROSTATIC (CCE) PROBE ARRANGEMENT...
- Publication number 20100033195
- Publication date Feb 11, 2010
- Jean-Paul Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING VIA FACET WITH MINIMAL RIE LAG
- Publication number 20090068767
- Publication date Mar 12, 2009
- LAM RESEARCH CORPORATION
- Stephen Sirard
- H01 - BASIC ELECTRIC ELEMENTS