Mikio Yamamuka

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma CVD apparatus, method for manufacturing semiconductor film,...
- Patent number 8,631,762
- Issue date Jan 21, 2014
- Mitsubishi Electric Corporation
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Photoelectric converter and manufacturing method thereof, and photo...
- Patent number 8,546,682
- Issue date Oct 1, 2013
- Mitsubishi Electric Corporation
- Kyozo Kanamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,638,880
- Issue date Oct 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid raw material vaporizer, semiconductor device and method of m...
- Patent number 6,512,885
- Issue date Jan 28, 2003
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizer for chemical vapor deposition apparatus, chemical vapor d...
- Patent number 6,470,144
- Issue date Oct 22, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Tarutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,448,191
- Issue date Sep 10, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and a method of manufacturing a...
- Patent number 6,312,526
- Issue date Nov 6, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing device for CVD source materials and CVD apparatus employ...
- Patent number 6,273,957
- Issue date Aug 14, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming high dielectric constant thin film and method of...
- Patent number 6,235,649
- Issue date May 22, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD apparatus for forming thin film having high dielectric constant
- Patent number 6,179,920
- Issue date Jan 30, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Masayoshi Tarutani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,165,556
- Issue date Dec 26, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for monitoring CVD liquid source for forming t...
- Patent number 6,117,482
- Issue date Sep 12, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 6,110,283
- Issue date Aug 29, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 6,101,085
- Issue date Aug 8, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus
- Patent number 6,096,133
- Issue date Aug 1, 2000
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for and method of forming thin film by chemical vapor dep...
- Patent number 6,033,732
- Issue date Mar 7, 2000
- Mitsushita Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 5,989,635
- Issue date Nov 23, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure, method for forming hi...
- Patent number 5,882,410
- Issue date Mar 16, 1999
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High dielectric constant thin film structure method for forming hig...
- Patent number 5,834,060
- Issue date Nov 10, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for forming thin film by chemical vapor deposition
- Patent number 5,776,254
- Issue date Jul 7, 1998
- Mitsubishi Denki Kabushiki Kaisha
- Akimasa Yuuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PHOTOELECTRIC CONVERTER AND MANUFACTURING METHOD THEREOF, AND PHOTO...
- Publication number 20120160298
- Publication date Jun 28, 2012
- MITSUBISHI ELECTRIC CORPORATION
- Kyozo KANAMOTO
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
THIN FILM SOLAR CELL DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110220189
- Publication date Sep 15, 2011
- MITSUBISHI ELECTRIC CORPORATION
- Mikio Yamamuka
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PLASMA CVD APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR FILM,...
- Publication number 20110177644
- Publication date Jul 21, 2011
- Mitsubishi Electric Corporation
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN-FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110108118
- Publication date May 12, 2011
- Mitsubishi Electric Corporation
- Hiroya Yamarin
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Chemical vapor deposition apparatus and a method of manufacturing a...
- Publication number 20020023588
- Publication date Feb 28, 2002
- Mitsubishi Denki Kabushiki Kaisha
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizing device for CVD source materials and CVD apparatus employ...
- Publication number 20010039923
- Publication date Nov 15, 2001
- Mikio Yamamuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming high dielectric constant thin film and method of...
- Publication number 20010029090
- Publication date Oct 11, 2001
- Mitsubishi Denki Kabushiki Kaisha
- Takaaki Kawahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Mikio Yamamuka

Person

Patents Grantslast 30 patents

Plasma CVD apparatus, method for manufacturing semiconductor film,...

Photoelectric converter and manufacturing method thereof, and photo...

Chemical vapor deposition apparatus and a method of manufacturing a...

Liquid raw material vaporizer, semiconductor device and method of m...

Vaporizer for chemical vapor deposition apparatus, chemical vapor d...

Method of forming high dielectric constant thin film and method of...

Chemical vapor deposition apparatus and a method of manufacturing a...

Vaporizing device for CVD source materials and CVD apparatus employ...

Method of forming high dielectric constant thin film and method of...

CVD apparatus for forming thin film having high dielectric constant

High dielectric constant thin film structure, method for forming hi...

Method and apparatus for monitoring CVD liquid source for forming t...

Chemical vapor deposition apparatus

High dielectric constant thin film structure, method for forming hi...

Chemical vapor deposition apparatus

Apparatus for and method of forming thin film by chemical vapor dep...

High dielectric constant thin film structure, method for forming hi...

High dielectric constant thin film structure, method for forming hi...

High dielectric constant thin film structure method for forming hig...

Apparatus for forming thin film by chemical vapor deposition

Patents Applicationslast 30 patents

PHOTOELECTRIC CONVERTER AND MANUFACTURING METHOD THEREOF, AND PHOTO...

THIN FILM SOLAR CELL DEVICE AND METHOD OF MANUFACTURING THE SAME

PLASMA CVD APPARATUS, METHOD FOR MANUFACTURING SEMICONDUCTOR FILM,...

THIN-FILM SOLAR CELL AND METHOD OF MANUFACTURING THE SAME

Chemical vapor deposition apparatus and a method of manufacturing a...

Vaporizing device for CVD source materials and CVD apparatus employ...

Method of forming high dielectric constant thin film and method of...