Milan R. Kirs

Person

  • Lafayette, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Planar magnetron sputtering apparatus

    • Patent number 5,407,551
    • Issue date Apr 18, 1995
    • The BOC Group, Inc.
    • Peter A. Sieck
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Cylindrical magnetron shield structure

    • Patent number 5,108,574
    • Issue date Apr 28, 1992
    • The BOC Group, Inc.
    • Milan R. Kirs
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...