Number | Name | Date | Kind |
---|---|---|---|
3956093 | McLeod | May 1976 | |
4166018 | Chapin | Aug 1979 | |
4198283 | Class et al. | Apr 1980 | |
4426264 | Munz et al. | Jan 1984 | |
4515675 | Kieser et al. | May 1985 | |
4572776 | Aichert et al. | Feb 1986 | |
4657654 | Mintz | Apr 1987 | |
4834860 | Demaray et al. | May 1989 | |
4892633 | Welty | Jan 1990 | |
4966677 | Aichert et al. | Oct 1990 |
Entry |
---|
Chapin, John S., "The Planar Magnetron, " Vacuum Technology, pp. 37-40, (Jan. 1974). |