Ming-Kuei Tseng

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 12,087,561
- Issue date Sep 10, 2024
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,888,916
- Issue date Nov 18, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,608,853
- Issue date Dec 17, 2013
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal reactor with improved gas flow distribution
- Patent number 8,056,500
- Issue date Nov 15, 2011
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Retaining ring with tapered inner surface
- Patent number 7,934,979
- Issue date May 3, 2011
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with flange for chemical mechanical polishing
- Patent number 7,677,958
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical mechanical processing
- Patent number 7,678,245
- Issue date Mar 16, 2010
- Applied Materials, Inc.
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Magnetically secured retaining ring
- Patent number 7,134,948
- Issue date Nov 14, 2006
- Applied Materials, Inc.
- Ming-Kuei Tseng
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with gimbal mechanism
- Patent number 7,101,273
- Issue date Sep 5, 2006
- Applied Materials, Inc.
- Ming-Kuei Tseng
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with flange for chemical mechanical polishing
- Patent number 7,094,139
- Issue date Aug 22, 2006
- Applied Materials, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with flexible membrane to provide controllable pressur...
- Patent number 6,979,250
- Issue date Dec 27, 2005
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with edge load retaining ring
- Patent number 6,890,249
- Issue date May 10, 2005
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Method of detecting a substrate in a carrier head
- Patent number 6,857,931
- Issue date Feb 22, 2005
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Retainer with a wear surface for chemical mechanical polishing
- Patent number 6,835,125
- Issue date Dec 28, 2004
- Applied Materials Inc.
- Ming-Kuei Tseng
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for carrier head with multi-part flexible membrane
- Patent number 6,776,694
- Issue date Aug 17, 2004
- Applied Materials Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with flexible membranes to provide controllable pressu...
- Patent number 6,722,965
- Issue date Apr 20, 2004
- Applied Materials Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a substrate detector
- Patent number 6,663,466
- Issue date Dec 16, 2003
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a substrate sensor
- Patent number 6,547,641
- Issue date Apr 15, 2003
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with multi-part flexible membrane
- Patent number 6,450,868
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a substrate sensor
- Patent number 6,398,621
- Issue date Jun 4, 2002
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20210257195
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- John Stephen DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20200105509
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20140079376
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Ming-Kuei (Michael) TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20120058648
- Publication date Mar 8, 2012
- Ming-Kuei (Michael) Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETAINING RING WITH TAPERED INNER SURFACE
- Publication number 20100112914
- Publication date May 6, 2010
- Applied Material, Inc.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Application
THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION
- Publication number 20090163042
- Publication date Jun 25, 2009
- Applied Materials, Inc.
- Ming-Kuei (Michael) Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for multi-chamber exhaust control
- Publication number 20080006650
- Publication date Jan 10, 2008
- Applied Materials, Inc.
- Ming-Kuei Tseng
- G05 - CONTROLLING REGULATING
Information Patent Application
Multi-stage flow control apparatus with flexible membrane and metho...
- Publication number 20070295269
- Publication date Dec 27, 2007
- Applied Materials, Inc.
- Ming-Kuei Tseng
- G05 - CONTROLLING REGULATING
Information Patent Application
Multi-stage flow control apparatus and method of use
- Publication number 20070294870
- Publication date Dec 27, 2007
- Applied Materials, Inc.
- Ming-Kuei Tseng
- G05 - CONTROLLING REGULATING
Information Patent Application
Multi-stage flow control apparatus
- Publication number 20070295268
- Publication date Dec 27, 2007
- Applied Materials, Inc.
- Ming-Kuei Tseng
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for planarizing a substrate with low fluid con...
- Publication number 20070131562
- Publication date Jun 14, 2007
- APPLIED MATERIALS, INC.
- Zhihong Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Retaining ring with flange for chemical mechanical polishing
- Publication number 20060281395
- Publication date Dec 14, 2006
- APPLIED MATERIALS, INC.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Application
Magnetically secured retaining ring
- Publication number 20060160474
- Publication date Jul 20, 2006
- Ming-Kuei Tseng
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head with gimbal mechanism
- Publication number 20060025058
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Ming-Kuei Tseng
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for electrochemical mechanical processing
- Publication number 20050000801
- Publication date Jan 6, 2005
- Yan Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Carrier head with flexible membrane to provide controllable pressur...
- Publication number 20040192173
- Publication date Sep 30, 2004
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
Retaining ring with flange for chemical mechanical polishing
- Publication number 20040152403
- Publication date Aug 5, 2004
- APPLIED MATERIALS, INC.
- Dan A. Marohl
- B24 - GRINDING POLISHING
Information Patent Application
Method of detecting a substrate in a carrier head
- Publication number 20040033762
- Publication date Feb 19, 2004
- Applied Materials, Inc., a Delaware corporation
- Hung Chih Chen
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Methods for carrier head with multi-part flexible membrane
- Publication number 20020182996
- Publication date Dec 5, 2002
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head with a substrate sensor
- Publication number 20020094766
- Publication date Jul 18, 2002
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD WITH MULTI-PART FLEXIBLE MEMBRANE
- Publication number 20020094767
- Publication date Jul 18, 2002
- ZUNIGA
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
CARRIER HEAD WITH A SUBSTRATE SENSOR
- Publication number 20020049024
- Publication date Apr 25, 2002
- ZUNIGA,ET AL
- STEVEN M. ZUNIGA
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head with flexible membranes to provide controllable pressu...
- Publication number 20020039879
- Publication date Apr 4, 2002
- Steven M. Zuniga
- B24 - GRINDING POLISHING

Ming-Kuei Tseng

Person

Patents Grantslast 30 patents

Vacuum pump protection against deposition byproduct buildup

Vacuum pump protection against deposition byproduct buildup

Vacuum pump protection against deposition byproduct buildup

Thermal reactor with improved gas flow distribution

Thermal reactor with improved gas flow distribution

Thermal reactor with improved gas flow distribution

Retaining ring with tapered inner surface

Retaining ring with flange for chemical mechanical polishing

Method and apparatus for electrochemical mechanical processing

Magnetically secured retaining ring

Carrier head with gimbal mechanism

Retaining ring with flange for chemical mechanical polishing

Carrier head with flexible membrane to provide controllable pressur...

Carrier head with edge load retaining ring

Method of detecting a substrate in a carrier head

Retainer with a wear surface for chemical mechanical polishing

Methods for carrier head with multi-part flexible membrane

Carrier head with flexible membranes to provide controllable pressu...

Carrier head with a substrate detector

Carrier head with a substrate sensor

Carrier head with multi-part flexible membrane

Carrier head with a substrate sensor

Patents Applicationslast 30 patents

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

RETAINING RING WITH TAPERED INNER SURFACE

THERMAL REACTOR WITH IMPROVED GAS FLOW DISTRIBUTION

Method and apparatus for multi-chamber exhaust control

Multi-stage flow control apparatus with flexible membrane and metho...

Multi-stage flow control apparatus and method of use

Multi-stage flow control apparatus

Method and apparatus for planarizing a substrate with low fluid con...

Retaining ring with flange for chemical mechanical polishing

Magnetically secured retaining ring

Carrier head with gimbal mechanism

Method and apparatus for electrochemical mechanical processing

Carrier head with flexible membrane to provide controllable pressur...

Retaining ring with flange for chemical mechanical polishing

Method of detecting a substrate in a carrier head

Methods for carrier head with multi-part flexible membrane

Carrier head with a substrate sensor

CARRIER HEAD WITH MULTI-PART FLEXIBLE MEMBRANE

CARRIER HEAD WITH A SUBSTRATE SENSOR

Carrier head with flexible membranes to provide controllable pressu...