Minobu Matsunaga

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate treating method and apparatus
- Patent number 7,105,074
- Issue date Sep 12, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Osamu Tamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 6,869,234
- Issue date Mar 22, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treating apparatus and method
- Patent number 6,832,863
- Issue date Dec 21, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Kenji Sugimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical treating apparatus
- Patent number 6,827,782
- Issue date Dec 7, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Developing apparatus and developing method
- Patent number 6,752,544
- Issue date Jun 22, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 6,656,277
- Issue date Dec 2, 2003
- Dainippon Screen Mfg. Co. Ltd.
- Masakazu Sanada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 6,558,053
- Issue date May 6, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating solution applying method and apparatus
- Patent number 6,440,218
- Issue date Aug 27, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing a substrate providing an efficient arrange...
- Patent number 6,099,643
- Issue date Aug 8, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of thermally processing substrate
- Patent number 6,080,969
- Issue date Jun 27, 2000
- SMC Corporation
- Hiroyasu Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing apparatus and developing method
- Patent number 5,984,540
- Issue date Nov 16, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating solution applying method and apparatus
- Patent number 5,976,620
- Issue date Nov 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 5,963,753
- Issue date Oct 5, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masami Ohtani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing system hot plate construction substrate
- Patent number 5,927,077
- Issue date Jul 27, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hisai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin coating apparatus
- Patent number 5,865,893
- Issue date Feb 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Minobu Matsunaga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of and apparatus for washing a substrate
- Patent number 5,857,474
- Issue date Jan 12, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Takamasa Sakai
- B08 - CLEANING
Information Patent Grant
Substrate cooling method and apparatus
- Patent number 5,638,687
- Issue date Jun 17, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Yasuhiro Mizohata
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Substrate cooling apparatus
- Patent number 5,522,215
- Issue date Jun 4, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Minobu Matsunaga
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Substrate cooling device and substrate heat-treating apparatus
- Patent number 5,411,076
- Issue date May 2, 1995
- Dainippon Screen Mfg. Co., Ltd. Corp. of Japan
- Minobu Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Developing apparatus and developing method
- Publication number 20040028403
- Publication date Feb 12, 2004
- DAINIPPON SCREEN MFG. CO. LTD.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate treating apparatus and method
- Publication number 20040005149
- Publication date Jan 8, 2004
- Dainippon Screen Mfg. Co.,Ltd.
- Kenji Sugimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Developing apparatus and developing method
- Publication number 20030185560
- Publication date Oct 2, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20030168007
- Publication date Sep 11, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Masakazu Sanada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical treating apparatus
- Publication number 20030141314
- Publication date Jul 31, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Shigehiro Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate treating method and apparatus
- Publication number 20030017665
- Publication date Jan 23, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Osamu Tamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20020152958
- Publication date Oct 24, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Kazuhito Shigemori
- H01 - BASIC ELECTRIC ELEMENTS

Minobu Matsunaga

Person

Patents Grantslast 30 patents

Substrate treating method and apparatus

Developing apparatus and developing method

Substrate treating apparatus and method

Chemical treating apparatus

Developing apparatus and developing method

Apparatus for and method of processing substrate

Substrate processing apparatus

Coating solution applying method and apparatus

Apparatus for processing a substrate providing an efficient arrange...

Apparatus for and method of thermally processing substrate

Developing apparatus and developing method

Coating solution applying method and apparatus

Substrate processing apparatus

Processing system hot plate construction substrate

Spin coating apparatus

Method of and apparatus for washing a substrate

Substrate cooling method and apparatus

Substrate cooling apparatus

Substrate cooling device and substrate heat-treating apparatus

Patents Applicationslast 30 patents

Developing apparatus and developing method

Substrate treating apparatus and method

Developing apparatus and developing method

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE

Chemical treating apparatus

Substrate treating method and apparatus

Substrate processing apparatus